2/17/2012	12:11:01 AM	H2 valve closed
2/17/2012	12:11:01 AM	BCl3 valve closed
2/17/2012	12:11:01 AM	PH3 valve closed
2/17/2012	12:11:01 AM	SiCl4 pre valve closed
2/17/2012	12:11:01 AM	SiCl4 post valve closed
2/17/2012	12:11:01 AM	Main Vac valve closed
2/17/2012	12:11:01 AM	Bypass valve closed
2/17/2012	12:11:01 AM	Helium valve opened
2/17/2012	12:11:01 AM	Bubbler valve opened
2/17/2012	12:11:01 AM	Helium MFC set to  500.000000
2/17/2012	12:11:01 AM	H2 MFC set to  0.000000
2/17/2012	12:11:01 AM	BCl3 MFC set to  0.000000
2/17/2012	12:11:01 AM	PH3 MFC set to  0.000000
2/17/2012	12:11:01 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:11:01 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:11:01 AM	Tube furnace set to 0
2/17/2012	12:31:01 AM	Helium valve closed
2/17/2012	12:31:01 AM	H2 valve closed
2/17/2012	12:31:01 AM	BCl3 valve closed
2/17/2012	12:31:01 AM	PH3 valve closed
2/17/2012	12:31:01 AM	SiCl4 pre valve closed
2/17/2012	12:31:01 AM	SiCl4 post valve closed
2/17/2012	12:31:01 AM	Main Vac valve closed
2/17/2012	12:31:01 AM	Bypass valve closed
2/17/2012	12:31:01 AM	Bubbler valve closed
2/17/2012	12:31:01 AM	Helium MFC set to  0.000000
2/17/2012	12:31:01 AM	H2 MFC set to  0.000000
2/17/2012	12:31:01 AM	BCl3 MFC set to  0.000000
2/17/2012	12:31:01 AM	PH3 MFC set to  0.000000
2/17/2012	12:31:01 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:31:01 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:31:02 AM	Tube furnace set to 0
2/17/2012	12:37:38 AM	Run aborted at 12:37 AM
2/17/2012	12:37:38 AM	Helium valve closed
2/17/2012	12:37:38 AM	H2 valve closed
2/17/2012	12:37:38 AM	BCl3 valve closed
2/17/2012	12:37:38 AM	PH3 valve closed
2/17/2012	12:37:38 AM	SiCl4 pre valve closed
2/17/2012	12:37:38 AM	SiCl4 post valve closed
2/17/2012	12:37:38 AM	Bypass valve closed
2/17/2012	12:37:38 AM	Main Vac valve closed
2/17/2012	12:37:38 AM	Bubbler valve closed
2/17/2012	12:37:38 AM	Helium MFC set to  0.000000
2/17/2012	12:37:38 AM	H2 MFC set to  0.000000
2/17/2012	12:37:38 AM	BCl3 MFC set to  0.000000
2/17/2012	12:37:38 AM	PH3 MFC set to  0.000000
2/17/2012	12:37:38 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:37:38 AM	Tube furnace set to 0
2/17/2012	12:37:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:37:48 AM	Recipe started at 12:37 AM
2/17/2012	12:37:48 AM	Helium valve closed
2/17/2012	12:37:48 AM	H2 valve closed
2/17/2012	12:37:48 AM	BCl3 valve closed
2/17/2012	12:37:48 AM	PH3 valve closed
2/17/2012	12:37:48 AM	SiCl4 pre valve closed
2/17/2012	12:37:48 AM	SiCl4 post valve closed
2/17/2012	12:37:48 AM	Main Vac valve closed
2/17/2012	12:37:48 AM	Bubbler valve closed
2/17/2012	12:37:48 AM	Bypass valve opened
2/17/2012	12:37:48 AM	Helium MFC set to  0.000000
2/17/2012	12:37:48 AM	H2 MFC set to  0.000000
2/17/2012	12:37:48 AM	BCl3 MFC set to  0.000000
2/17/2012	12:37:48 AM	PH3 MFC set to  0.000000
2/17/2012	12:37:48 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:37:48 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:37:48 AM	Tube furnace set to 0
2/17/2012	12:38:36 AM	Helium valve closed
2/17/2012	12:38:36 AM	H2 valve closed
2/17/2012	12:38:36 AM	BCl3 valve closed
2/17/2012	12:38:36 AM	PH3 valve closed
2/17/2012	12:38:36 AM	SiCl4 pre valve closed
2/17/2012	12:38:36 AM	SiCl4 post valve closed
2/17/2012	12:38:36 AM	Main Vac valve closed
2/17/2012	12:38:36 AM	Bubbler valve closed
2/17/2012	12:38:36 AM	Bypass valve opened
2/17/2012	12:38:36 AM	Helium MFC set to  0.000000
2/17/2012	12:38:36 AM	H2 MFC set to  0.000000
2/17/2012	12:38:36 AM	BCl3 MFC set to  0.000000
2/17/2012	12:38:36 AM	PH3 MFC set to  0.000000
2/17/2012	12:38:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:38:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:38:36 AM	Tube furnace set to 0
2/17/2012	12:39:36 AM	Helium valve closed
2/17/2012	12:39:36 AM	H2 valve closed
2/17/2012	12:39:36 AM	BCl3 valve closed
2/17/2012	12:39:36 AM	PH3 valve closed
2/17/2012	12:39:36 AM	SiCl4 pre valve closed
2/17/2012	12:39:36 AM	SiCl4 post valve closed
2/17/2012	12:39:36 AM	Bypass valve closed
2/17/2012	12:39:36 AM	Bubbler valve closed
2/17/2012	12:39:36 AM	Main Vac valve opened
2/17/2012	12:39:36 AM	Helium MFC set to  0.000000
2/17/2012	12:39:36 AM	H2 MFC set to  0.000000
2/17/2012	12:39:36 AM	BCl3 MFC set to  0.000000
2/17/2012	12:39:36 AM	PH3 MFC set to  0.000000
2/17/2012	12:39:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:39:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:39:36 AM	Tube furnace set to 0
2/17/2012	12:39:37 AM	Run finished at 12:39 AM
2/17/2012	12:39:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:39:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	12:39:51 AM	Recipe started at 12:39 AM
2/17/2012	12:39:51 AM	Helium valve closed
2/17/2012	12:39:51 AM	H2 valve closed
2/17/2012	12:39:51 AM	BCl3 valve closed
2/17/2012	12:39:51 AM	PH3 valve closed
2/17/2012	12:39:51 AM	SiCl4 pre valve closed
2/17/2012	12:39:51 AM	SiCl4 post valve closed
2/17/2012	12:39:51 AM	Main Vac valve closed
2/17/2012	12:39:51 AM	Bypass valve closed
2/17/2012	12:39:51 AM	Bubbler valve closed
2/17/2012	12:39:51 AM	Helium MFC set to  0.000000
2/17/2012	12:39:51 AM	H2 MFC set to  0.000000
2/17/2012	12:39:51 AM	BCl3 MFC set to  0.000000
2/17/2012	12:39:51 AM	PH3 MFC set to  0.000000
2/17/2012	12:39:51 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:39:51 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:39:51 AM	Tube furnace set to 0
2/17/2012	12:39:54 AM	H2 valve closed
2/17/2012	12:39:54 AM	BCl3 valve closed
2/17/2012	12:39:54 AM	PH3 valve closed
2/17/2012	12:39:54 AM	SiCl4 pre valve closed
2/17/2012	12:39:54 AM	SiCl4 post valve closed
2/17/2012	12:39:54 AM	Main Vac valve closed
2/17/2012	12:39:54 AM	Bypass valve closed
2/17/2012	12:39:54 AM	Bubbler valve closed
2/17/2012	12:39:54 AM	Helium valve opened
2/17/2012	12:39:54 AM	Helium MFC set to  500.000000
2/17/2012	12:39:54 AM	H2 MFC set to  0.000000
2/17/2012	12:39:54 AM	BCl3 MFC set to  0.000000
2/17/2012	12:39:54 AM	PH3 MFC set to  0.000000
2/17/2012	12:39:54 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:39:54 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:39:54 AM	Tube furnace set to 0
2/17/2012	12:40:54 AM	Helium valve closed
2/17/2012	12:40:54 AM	H2 valve closed
2/17/2012	12:40:54 AM	BCl3 valve closed
2/17/2012	12:40:54 AM	PH3 valve closed
2/17/2012	12:40:54 AM	SiCl4 pre valve closed
2/17/2012	12:40:54 AM	SiCl4 post valve closed
2/17/2012	12:40:54 AM	Main Vac valve closed
2/17/2012	12:40:54 AM	Bypass valve closed
2/17/2012	12:40:54 AM	Bubbler valve closed
2/17/2012	12:40:54 AM	Helium MFC set to  0.000000
2/17/2012	12:40:54 AM	H2 MFC set to  0.000000
2/17/2012	12:40:54 AM	BCl3 MFC set to  0.000000
2/17/2012	12:40:54 AM	PH3 MFC set to  0.000000
2/17/2012	12:40:54 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:40:54 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:40:55 AM	Tube furnace set to 0
2/17/2012	12:40:56 AM	Run finished at 12:40 AM
2/17/2012	12:40:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	12:46:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:46:20 AM	Recipe started at 12:46 AM
2/17/2012	12:46:20 AM	Helium valve closed
2/17/2012	12:46:20 AM	H2 valve closed
2/17/2012	12:46:20 AM	BCl3 valve closed
2/17/2012	12:46:20 AM	PH3 valve closed
2/17/2012	12:46:20 AM	SiCl4 pre valve closed
2/17/2012	12:46:20 AM	SiCl4 post valve closed
2/17/2012	12:46:20 AM	Main Vac valve closed
2/17/2012	12:46:20 AM	Bubbler valve closed
2/17/2012	12:46:20 AM	Bypass valve opened
2/17/2012	12:46:20 AM	Helium MFC set to  0.000000
2/17/2012	12:46:20 AM	H2 MFC set to  0.000000
2/17/2012	12:46:20 AM	BCl3 MFC set to  0.000000
2/17/2012	12:46:20 AM	PH3 MFC set to  0.000000
2/17/2012	12:46:20 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:46:20 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:46:20 AM	Tube furnace set to 0
2/17/2012	12:47:22 AM	Helium valve closed
2/17/2012	12:47:22 AM	H2 valve closed
2/17/2012	12:47:22 AM	BCl3 valve closed
2/17/2012	12:47:22 AM	PH3 valve closed
2/17/2012	12:47:22 AM	SiCl4 pre valve closed
2/17/2012	12:47:22 AM	SiCl4 post valve closed
2/17/2012	12:47:22 AM	Main Vac valve closed
2/17/2012	12:47:22 AM	Bubbler valve closed
2/17/2012	12:47:22 AM	Bypass valve opened
2/17/2012	12:47:22 AM	Helium MFC set to  0.000000
2/17/2012	12:47:22 AM	H2 MFC set to  0.000000
2/17/2012	12:47:22 AM	BCl3 MFC set to  0.000000
2/17/2012	12:47:22 AM	PH3 MFC set to  0.000000
2/17/2012	12:47:22 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:47:22 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:47:23 AM	Tube furnace set to 0
2/17/2012	12:48:22 AM	Helium valve closed
2/17/2012	12:48:22 AM	H2 valve closed
2/17/2012	12:48:22 AM	BCl3 valve closed
2/17/2012	12:48:22 AM	PH3 valve closed
2/17/2012	12:48:22 AM	SiCl4 pre valve closed
2/17/2012	12:48:22 AM	SiCl4 post valve closed
2/17/2012	12:48:22 AM	Bypass valve closed
2/17/2012	12:48:22 AM	Bubbler valve closed
2/17/2012	12:48:22 AM	Main Vac valve opened
2/17/2012	12:48:22 AM	Helium MFC set to  0.000000
2/17/2012	12:48:22 AM	H2 MFC set to  0.000000
2/17/2012	12:48:22 AM	BCl3 MFC set to  0.000000
2/17/2012	12:48:22 AM	PH3 MFC set to  0.000000
2/17/2012	12:48:22 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:48:22 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:48:23 AM	Tube furnace set to 0
2/17/2012	12:48:24 AM	Run finished at 12:48 AM
2/17/2012	12:48:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:48:40 AM	Recipe started at 12:48 AM
2/17/2012	12:48:40 AM	Helium valve closed
2/17/2012	12:48:40 AM	H2 valve closed
2/17/2012	12:48:40 AM	BCl3 valve closed
2/17/2012	12:48:40 AM	PH3 valve closed
2/17/2012	12:48:40 AM	SiCl4 pre valve closed
2/17/2012	12:48:40 AM	SiCl4 post valve closed
2/17/2012	12:48:40 AM	Bypass valve closed
2/17/2012	12:48:40 AM	Bubbler valve closed
2/17/2012	12:48:40 AM	Main Vac valve opened
2/17/2012	12:48:40 AM	Helium MFC set to  0.000000
2/17/2012	12:48:40 AM	H2 MFC set to  0.000000
2/17/2012	12:48:40 AM	BCl3 MFC set to  0.000000
2/17/2012	12:48:40 AM	PH3 MFC set to  0.000000
2/17/2012	12:48:40 AM	SiCl4 MFC set to  0.000000
2/17/2012	12:48:40 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:48:41 AM	Tube furnace set to 0
2/17/2012	2:18:41 AM	Helium valve closed
2/17/2012	2:18:41 AM	H2 valve closed
2/17/2012	2:18:41 AM	BCl3 valve closed
2/17/2012	2:18:41 AM	PH3 valve closed
2/17/2012	2:18:41 AM	SiCl4 pre valve closed
2/17/2012	2:18:41 AM	SiCl4 post valve closed
2/17/2012	2:18:41 AM	Main Vac valve closed
2/17/2012	2:18:41 AM	Bypass valve closed
2/17/2012	2:18:41 AM	Bubbler valve closed
2/17/2012	2:18:41 AM	Helium MFC set to  0.000000
2/17/2012	2:18:41 AM	H2 MFC set to  0.000000
2/17/2012	2:18:41 AM	BCl3 MFC set to  0.000000
2/17/2012	2:18:41 AM	PH3 MFC set to  0.000000
2/17/2012	2:18:41 AM	SiCl4 MFC set to  0.000000
2/17/2012	2:18:41 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:18:41 AM	Tube furnace set to 0
2/17/2012	2:18:44 AM	Helium valve closed
2/17/2012	2:18:44 AM	BCl3 valve closed
2/17/2012	2:18:44 AM	PH3 valve closed
2/17/2012	2:18:44 AM	SiCl4 pre valve closed
2/17/2012	2:18:44 AM	SiCl4 post valve closed
2/17/2012	2:18:44 AM	Main Vac valve closed
2/17/2012	2:18:44 AM	Bypass valve closed
2/17/2012	2:18:44 AM	Bubbler valve closed
2/17/2012	2:18:44 AM	H2 valve opened
2/17/2012	2:18:44 AM	Helium MFC set to  0.000000
2/17/2012	2:18:44 AM	H2 MFC set to  500.000000
2/17/2012	2:18:44 AM	BCl3 MFC set to  0.000000
2/17/2012	2:18:44 AM	PH3 MFC set to  0.000000
2/17/2012	2:18:44 AM	SiCl4 MFC set to  0.000000
2/17/2012	2:18:44 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:18:44 AM	Tube furnace set to 0
2/17/2012	2:19:49 AM	Helium valve closed
2/17/2012	2:19:49 AM	BCl3 valve closed
2/17/2012	2:19:49 AM	PH3 valve closed
2/17/2012	2:19:49 AM	SiCl4 pre valve closed
2/17/2012	2:19:49 AM	SiCl4 post valve closed
2/17/2012	2:19:49 AM	Main Vac valve closed
2/17/2012	2:19:49 AM	Bypass valve closed
2/17/2012	2:19:49 AM	H2 valve opened
2/17/2012	2:19:49 AM	Bubbler valve opened
2/17/2012	2:19:49 AM	Helium MFC set to  0.000000
2/17/2012	2:19:49 AM	H2 MFC set to  500.000000
2/17/2012	2:19:49 AM	BCl3 MFC set to  0.000000
2/17/2012	2:19:49 AM	PH3 MFC set to  0.000000
2/17/2012	2:19:49 AM	SiCl4 MFC set to  0.000000
2/17/2012	2:19:49 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:19:49 AM	Tube furnace set to 0
2/17/2012	2:19:50 AM	Helium valve closed
2/17/2012	2:19:50 AM	BCl3 valve closed
2/17/2012	2:19:50 AM	PH3 valve closed
2/17/2012	2:19:50 AM	SiCl4 pre valve closed
2/17/2012	2:19:50 AM	SiCl4 post valve closed
2/17/2012	2:19:50 AM	Main Vac valve closed
2/17/2012	2:19:50 AM	Bypass valve closed
2/17/2012	2:19:50 AM	H2 valve opened
2/17/2012	2:19:50 AM	Bubbler valve opened
2/17/2012	2:19:50 AM	Helium MFC set to  0.000000
2/17/2012	2:19:50 AM	H2 MFC set to  500.000000
2/17/2012	2:19:50 AM	BCl3 MFC set to  0.000000
2/17/2012	2:19:50 AM	PH3 MFC set to  0.000000
2/17/2012	2:19:50 AM	SiCl4 MFC set to  0.000000
2/17/2012	2:19:50 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:19:50 AM	Tube furnace set to 1000
2/17/2012	2:44:50 AM	Helium valve closed
2/17/2012	2:44:50 AM	PH3 valve closed
2/17/2012	2:44:50 AM	Main Vac valve closed
2/17/2012	2:44:50 AM	Bypass valve closed
2/17/2012	2:44:50 AM	H2 valve opened
2/17/2012	2:44:50 AM	BCl3 valve opened
2/17/2012	2:44:50 AM	SiCl4 pre valve opened
2/17/2012	2:44:50 AM	SiCl4 post valve opened
2/17/2012	2:44:50 AM	Bubbler valve opened
2/17/2012	2:44:50 AM	Helium MFC set to  0.000000
2/17/2012	2:44:50 AM	H2 MFC set to  450.000000
2/17/2012	2:44:50 AM	BCl3 MFC set to  1.500000
2/17/2012	2:44:50 AM	PH3 MFC set to  0.000000
2/17/2012	2:44:50 AM	SiCl4 MFC set to  50.000000
2/17/2012	2:44:50 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:44:50 AM	Tube furnace set to 1000
2/17/2012	3:02:50 AM	Helium valve closed
2/17/2012	3:02:50 AM	BCl3 valve closed
2/17/2012	3:02:50 AM	PH3 valve closed
2/17/2012	3:02:50 AM	SiCl4 pre valve closed
2/17/2012	3:02:50 AM	SiCl4 post valve closed
2/17/2012	3:02:50 AM	Main Vac valve closed
2/17/2012	3:02:50 AM	Bypass valve closed
2/17/2012	3:02:50 AM	H2 valve opened
2/17/2012	3:02:50 AM	Bubbler valve opened
2/17/2012	3:02:50 AM	Helium MFC set to  0.000000
2/17/2012	3:02:50 AM	H2 MFC set to  500.000000
2/17/2012	3:02:50 AM	BCl3 MFC set to  0.000000
2/17/2012	3:02:50 AM	PH3 MFC set to  0.000000
2/17/2012	3:02:50 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:02:50 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:02:50 AM	Tube furnace set to 750
2/17/2012	3:17:50 AM	H2 valve closed
2/17/2012	3:17:50 AM	BCl3 valve closed
2/17/2012	3:17:50 AM	PH3 valve closed
2/17/2012	3:17:50 AM	SiCl4 pre valve closed
2/17/2012	3:17:50 AM	SiCl4 post valve closed
2/17/2012	3:17:50 AM	Main Vac valve closed
2/17/2012	3:17:50 AM	Bypass valve closed
2/17/2012	3:17:50 AM	Helium valve opened
2/17/2012	3:17:50 AM	Bubbler valve opened
2/17/2012	3:17:50 AM	Helium MFC set to  500.000000
2/17/2012	3:17:50 AM	H2 MFC set to  0.000000
2/17/2012	3:17:50 AM	BCl3 MFC set to  0.000000
2/17/2012	3:17:50 AM	PH3 MFC set to  0.000000
2/17/2012	3:17:50 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:17:50 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:17:51 AM	Tube furnace set to 0
2/17/2012	3:37:51 AM	Helium valve closed
2/17/2012	3:37:51 AM	H2 valve closed
2/17/2012	3:37:51 AM	BCl3 valve closed
2/17/2012	3:37:51 AM	PH3 valve closed
2/17/2012	3:37:51 AM	SiCl4 pre valve closed
2/17/2012	3:37:51 AM	SiCl4 post valve closed
2/17/2012	3:37:51 AM	Main Vac valve closed
2/17/2012	3:37:51 AM	Bypass valve closed
2/17/2012	3:37:51 AM	Bubbler valve closed
2/17/2012	3:37:51 AM	Helium MFC set to  0.000000
2/17/2012	3:37:51 AM	H2 MFC set to  0.000000
2/17/2012	3:37:51 AM	BCl3 MFC set to  0.000000
2/17/2012	3:37:51 AM	PH3 MFC set to  0.000000
2/17/2012	3:37:51 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:37:51 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:37:51 AM	Tube furnace set to 0
2/17/2012	3:57:51 AM	Helium valve closed
2/17/2012	3:57:51 AM	H2 valve closed
2/17/2012	3:57:51 AM	BCl3 valve closed
2/17/2012	3:57:51 AM	PH3 valve closed
2/17/2012	3:57:51 AM	SiCl4 pre valve closed
2/17/2012	3:57:51 AM	SiCl4 post valve closed
2/17/2012	3:57:51 AM	Main Vac valve closed
2/17/2012	3:57:51 AM	Bubbler valve closed
2/17/2012	3:57:51 AM	Bypass valve opened
2/17/2012	3:57:51 AM	Helium MFC set to  0.000000
2/17/2012	3:57:51 AM	H2 MFC set to  0.000000
2/17/2012	3:57:51 AM	BCl3 MFC set to  0.000000
2/17/2012	3:57:51 AM	PH3 MFC set to  0.000000
2/17/2012	3:57:51 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:57:51 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:57:51 AM	Tube furnace set to 0
2/17/2012	3:58:37 AM	Helium valve closed
2/17/2012	3:58:37 AM	H2 valve closed
2/17/2012	3:58:37 AM	BCl3 valve closed
2/17/2012	3:58:37 AM	PH3 valve closed
2/17/2012	3:58:37 AM	SiCl4 pre valve closed
2/17/2012	3:58:37 AM	SiCl4 post valve closed
2/17/2012	3:58:37 AM	Main Vac valve closed
2/17/2012	3:58:37 AM	Bubbler valve closed
2/17/2012	3:58:37 AM	Bypass valve opened
2/17/2012	3:58:37 AM	Helium MFC set to  0.000000
2/17/2012	3:58:37 AM	H2 MFC set to  0.000000
2/17/2012	3:58:37 AM	BCl3 MFC set to  0.000000
2/17/2012	3:58:37 AM	PH3 MFC set to  0.000000
2/17/2012	3:58:37 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:58:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:58:37 AM	Tube furnace set to 0
2/17/2012	3:59:37 AM	Helium valve closed
2/17/2012	3:59:37 AM	H2 valve closed
2/17/2012	3:59:37 AM	BCl3 valve closed
2/17/2012	3:59:37 AM	PH3 valve closed
2/17/2012	3:59:37 AM	SiCl4 pre valve closed
2/17/2012	3:59:37 AM	SiCl4 post valve closed
2/17/2012	3:59:37 AM	Bypass valve closed
2/17/2012	3:59:37 AM	Bubbler valve closed
2/17/2012	3:59:37 AM	Main Vac valve opened
2/17/2012	3:59:37 AM	Helium MFC set to  0.000000
2/17/2012	3:59:37 AM	H2 MFC set to  0.000000
2/17/2012	3:59:37 AM	BCl3 MFC set to  0.000000
2/17/2012	3:59:37 AM	PH3 MFC set to  0.000000
2/17/2012	3:59:37 AM	SiCl4 MFC set to  0.000000
2/17/2012	3:59:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:59:38 AM	Tube furnace set to 0
2/17/2012	4:59:38 AM	Run finished at 4:59 AM
2/17/2012	8:49:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	8:49:17 AM	Recipe started at 8:49 AM
2/17/2012	8:49:17 AM	Helium valve closed
2/17/2012	8:49:17 AM	H2 valve closed
2/17/2012	8:49:17 AM	BCl3 valve closed
2/17/2012	8:49:17 AM	PH3 valve closed
2/17/2012	8:49:17 AM	SiCl4 pre valve closed
2/17/2012	8:49:17 AM	SiCl4 post valve closed
2/17/2012	8:49:17 AM	Main Vac valve closed
2/17/2012	8:49:17 AM	Bubbler valve closed
2/17/2012	8:49:17 AM	Bypass valve opened
2/17/2012	8:49:17 AM	Helium MFC set to  0.000000
2/17/2012	8:49:17 AM	H2 MFC set to  0.000000
2/17/2012	8:49:17 AM	BCl3 MFC set to  0.000000
2/17/2012	8:49:17 AM	PH3 MFC set to  0.000000
2/17/2012	8:49:17 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:49:17 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:49:18 AM	Tube furnace set to 0
2/17/2012	8:49:18 AM	Helium valve closed
2/17/2012	8:49:18 AM	H2 valve closed
2/17/2012	8:49:18 AM	BCl3 valve closed
2/17/2012	8:49:18 AM	PH3 valve closed
2/17/2012	8:49:18 AM	SiCl4 pre valve closed
2/17/2012	8:49:18 AM	SiCl4 post valve closed
2/17/2012	8:49:18 AM	Main Vac valve closed
2/17/2012	8:49:18 AM	Bubbler valve closed
2/17/2012	8:49:18 AM	Bypass valve opened
2/17/2012	8:49:18 AM	Helium MFC set to  0.000000
2/17/2012	8:49:18 AM	H2 MFC set to  0.000000
2/17/2012	8:49:18 AM	BCl3 MFC set to  0.000000
2/17/2012	8:49:18 AM	PH3 MFC set to  0.000000
2/17/2012	8:49:18 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:49:18 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:49:18 AM	Tube furnace set to 0
2/17/2012	8:49:21 AM	Run aborted at 8:49 AM
2/17/2012	8:49:21 AM	Helium valve closed
2/17/2012	8:49:21 AM	H2 valve closed
2/17/2012	8:49:21 AM	BCl3 valve closed
2/17/2012	8:49:21 AM	PH3 valve closed
2/17/2012	8:49:21 AM	SiCl4 pre valve closed
2/17/2012	8:49:21 AM	SiCl4 post valve closed
2/17/2012	8:49:21 AM	Bypass valve closed
2/17/2012	8:49:21 AM	Main Vac valve closed
2/17/2012	8:49:21 AM	Bubbler valve closed
2/17/2012	8:49:21 AM	Helium MFC set to  0.000000
2/17/2012	8:49:21 AM	H2 MFC set to  0.000000
2/17/2012	8:49:21 AM	BCl3 MFC set to  0.000000
2/17/2012	8:49:21 AM	PH3 MFC set to  0.000000
2/17/2012	8:49:21 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:49:21 AM	Tube furnace set to 0
2/17/2012	8:49:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	8:49:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	8:49:25 AM	Recipe started at 8:49 AM
2/17/2012	8:49:25 AM	Helium valve closed
2/17/2012	8:49:25 AM	H2 valve closed
2/17/2012	8:49:25 AM	BCl3 valve closed
2/17/2012	8:49:25 AM	PH3 valve closed
2/17/2012	8:49:25 AM	SiCl4 pre valve closed
2/17/2012	8:49:25 AM	SiCl4 post valve closed
2/17/2012	8:49:25 AM	Main Vac valve closed
2/17/2012	8:49:25 AM	Bypass valve closed
2/17/2012	8:49:25 AM	Bubbler valve closed
2/17/2012	8:49:25 AM	Helium MFC set to  0.000000
2/17/2012	8:49:25 AM	H2 MFC set to  0.000000
2/17/2012	8:49:25 AM	BCl3 MFC set to  0.000000
2/17/2012	8:49:25 AM	PH3 MFC set to  0.000000
2/17/2012	8:49:25 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:49:25 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:49:25 AM	Tube furnace set to 0
2/17/2012	8:49:28 AM	H2 valve closed
2/17/2012	8:49:28 AM	BCl3 valve closed
2/17/2012	8:49:28 AM	PH3 valve closed
2/17/2012	8:49:28 AM	SiCl4 pre valve closed
2/17/2012	8:49:28 AM	SiCl4 post valve closed
2/17/2012	8:49:28 AM	Main Vac valve closed
2/17/2012	8:49:28 AM	Bypass valve closed
2/17/2012	8:49:28 AM	Bubbler valve closed
2/17/2012	8:49:28 AM	Helium valve opened
2/17/2012	8:49:28 AM	Helium MFC set to  500.000000
2/17/2012	8:49:28 AM	H2 MFC set to  0.000000
2/17/2012	8:49:28 AM	BCl3 MFC set to  0.000000
2/17/2012	8:49:28 AM	PH3 MFC set to  0.000000
2/17/2012	8:49:28 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:49:28 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:49:29 AM	Tube furnace set to 0
2/17/2012	8:50:33 AM	Helium valve closed
2/17/2012	8:50:33 AM	H2 valve closed
2/17/2012	8:50:33 AM	BCl3 valve closed
2/17/2012	8:50:33 AM	PH3 valve closed
2/17/2012	8:50:33 AM	SiCl4 pre valve closed
2/17/2012	8:50:33 AM	SiCl4 post valve closed
2/17/2012	8:50:33 AM	Main Vac valve closed
2/17/2012	8:50:33 AM	Bypass valve closed
2/17/2012	8:50:33 AM	Bubbler valve closed
2/17/2012	8:50:33 AM	Helium MFC set to  0.000000
2/17/2012	8:50:33 AM	H2 MFC set to  0.000000
2/17/2012	8:50:33 AM	BCl3 MFC set to  0.000000
2/17/2012	8:50:33 AM	PH3 MFC set to  0.000000
2/17/2012	8:50:33 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:50:33 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:50:33 AM	Tube furnace set to 0
2/17/2012	8:50:34 AM	Run finished at 8:50 AM
2/17/2012	8:50:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	8:53:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	8:53:53 AM	Recipe started at 8:53 AM
2/17/2012	8:53:53 AM	Helium valve closed
2/17/2012	8:53:53 AM	H2 valve closed
2/17/2012	8:53:53 AM	BCl3 valve closed
2/17/2012	8:53:53 AM	PH3 valve closed
2/17/2012	8:53:53 AM	SiCl4 pre valve closed
2/17/2012	8:53:53 AM	SiCl4 post valve closed
2/17/2012	8:53:53 AM	Main Vac valve closed
2/17/2012	8:53:53 AM	Bubbler valve closed
2/17/2012	8:53:53 AM	Bypass valve opened
2/17/2012	8:53:53 AM	Helium MFC set to  0.000000
2/17/2012	8:53:53 AM	H2 MFC set to  0.000000
2/17/2012	8:53:53 AM	BCl3 MFC set to  0.000000
2/17/2012	8:53:53 AM	PH3 MFC set to  0.000000
2/17/2012	8:53:53 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:53:53 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:53:53 AM	Tube furnace set to 0
2/17/2012	8:54:55 AM	Helium valve closed
2/17/2012	8:54:55 AM	H2 valve closed
2/17/2012	8:54:55 AM	BCl3 valve closed
2/17/2012	8:54:55 AM	PH3 valve closed
2/17/2012	8:54:55 AM	SiCl4 pre valve closed
2/17/2012	8:54:55 AM	SiCl4 post valve closed
2/17/2012	8:54:55 AM	Main Vac valve closed
2/17/2012	8:54:55 AM	Bubbler valve closed
2/17/2012	8:54:55 AM	Bypass valve opened
2/17/2012	8:54:55 AM	Helium MFC set to  0.000000
2/17/2012	8:54:55 AM	H2 MFC set to  0.000000
2/17/2012	8:54:55 AM	BCl3 MFC set to  0.000000
2/17/2012	8:54:55 AM	PH3 MFC set to  0.000000
2/17/2012	8:54:55 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:54:55 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:54:56 AM	Tube furnace set to 0
2/17/2012	8:55:56 AM	Helium valve closed
2/17/2012	8:55:56 AM	H2 valve closed
2/17/2012	8:55:56 AM	BCl3 valve closed
2/17/2012	8:55:56 AM	PH3 valve closed
2/17/2012	8:55:56 AM	SiCl4 pre valve closed
2/17/2012	8:55:56 AM	SiCl4 post valve closed
2/17/2012	8:55:56 AM	Bypass valve closed
2/17/2012	8:55:56 AM	Bubbler valve closed
2/17/2012	8:55:56 AM	Main Vac valve opened
2/17/2012	8:55:56 AM	Helium MFC set to  0.000000
2/17/2012	8:55:56 AM	H2 MFC set to  0.000000
2/17/2012	8:55:56 AM	BCl3 MFC set to  0.000000
2/17/2012	8:55:56 AM	PH3 MFC set to  0.000000
2/17/2012	8:55:56 AM	SiCl4 MFC set to  0.000000
2/17/2012	8:55:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:55:56 AM	Tube furnace set to 0
2/17/2012	8:55:57 AM	Run finished at 8:55 AM
2/17/2012	8:55:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	9:45:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	9:45:36 AM	Recipe started at 9:45 AM
2/17/2012	9:45:36 AM	Helium valve closed
2/17/2012	9:45:36 AM	H2 valve closed
2/17/2012	9:45:36 AM	BCl3 valve closed
2/17/2012	9:45:36 AM	PH3 valve closed
2/17/2012	9:45:36 AM	SiCl4 pre valve closed
2/17/2012	9:45:36 AM	SiCl4 post valve closed
2/17/2012	9:45:36 AM	Main Vac valve closed
2/17/2012	9:45:36 AM	Bypass valve closed
2/17/2012	9:45:36 AM	Bubbler valve closed
2/17/2012	9:45:36 AM	Helium MFC set to  0.000000
2/17/2012	9:45:36 AM	H2 MFC set to  0.000000
2/17/2012	9:45:36 AM	BCl3 MFC set to  0.000000
2/17/2012	9:45:36 AM	PH3 MFC set to  0.000000
2/17/2012	9:45:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:45:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:45:36 AM	Tube furnace set to 0
2/17/2012	9:45:39 AM	H2 valve closed
2/17/2012	9:45:39 AM	BCl3 valve closed
2/17/2012	9:45:39 AM	PH3 valve closed
2/17/2012	9:45:39 AM	SiCl4 pre valve closed
2/17/2012	9:45:39 AM	SiCl4 post valve closed
2/17/2012	9:45:39 AM	Main Vac valve closed
2/17/2012	9:45:39 AM	Bypass valve closed
2/17/2012	9:45:39 AM	Bubbler valve closed
2/17/2012	9:45:39 AM	Helium valve opened
2/17/2012	9:45:39 AM	Helium MFC set to  500.000000
2/17/2012	9:45:39 AM	H2 MFC set to  0.000000
2/17/2012	9:45:39 AM	BCl3 MFC set to  0.000000
2/17/2012	9:45:39 AM	PH3 MFC set to  0.000000
2/17/2012	9:45:39 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:45:39 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:45:39 AM	Tube furnace set to 0
2/17/2012	9:46:44 AM	Helium valve closed
2/17/2012	9:46:44 AM	H2 valve closed
2/17/2012	9:46:44 AM	BCl3 valve closed
2/17/2012	9:46:44 AM	PH3 valve closed
2/17/2012	9:46:44 AM	SiCl4 pre valve closed
2/17/2012	9:46:44 AM	SiCl4 post valve closed
2/17/2012	9:46:44 AM	Main Vac valve closed
2/17/2012	9:46:44 AM	Bypass valve closed
2/17/2012	9:46:44 AM	Bubbler valve closed
2/17/2012	9:46:44 AM	Helium MFC set to  0.000000
2/17/2012	9:46:44 AM	H2 MFC set to  0.000000
2/17/2012	9:46:44 AM	BCl3 MFC set to  0.000000
2/17/2012	9:46:44 AM	PH3 MFC set to  0.000000
2/17/2012	9:46:44 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:46:44 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:46:44 AM	Tube furnace set to 0
2/17/2012	9:46:45 AM	Run finished at 9:46 AM
2/17/2012	9:46:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	9:50:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	9:50:19 AM	Recipe started at 9:50 AM
2/17/2012	9:50:19 AM	Helium valve closed
2/17/2012	9:50:19 AM	H2 valve closed
2/17/2012	9:50:19 AM	BCl3 valve closed
2/17/2012	9:50:19 AM	PH3 valve closed
2/17/2012	9:50:19 AM	SiCl4 pre valve closed
2/17/2012	9:50:19 AM	SiCl4 post valve closed
2/17/2012	9:50:19 AM	Main Vac valve closed
2/17/2012	9:50:19 AM	Bubbler valve closed
2/17/2012	9:50:19 AM	Bypass valve opened
2/17/2012	9:50:19 AM	Helium MFC set to  0.000000
2/17/2012	9:50:19 AM	H2 MFC set to  0.000000
2/17/2012	9:50:19 AM	BCl3 MFC set to  0.000000
2/17/2012	9:50:19 AM	PH3 MFC set to  0.000000
2/17/2012	9:50:19 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:50:19 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:50:19 AM	Tube furnace set to 0
2/17/2012	9:51:22 AM	Helium valve closed
2/17/2012	9:51:22 AM	H2 valve closed
2/17/2012	9:51:22 AM	BCl3 valve closed
2/17/2012	9:51:22 AM	PH3 valve closed
2/17/2012	9:51:22 AM	SiCl4 pre valve closed
2/17/2012	9:51:22 AM	SiCl4 post valve closed
2/17/2012	9:51:22 AM	Main Vac valve closed
2/17/2012	9:51:22 AM	Bubbler valve closed
2/17/2012	9:51:22 AM	Bypass valve opened
2/17/2012	9:51:22 AM	Helium MFC set to  0.000000
2/17/2012	9:51:22 AM	H2 MFC set to  0.000000
2/17/2012	9:51:22 AM	BCl3 MFC set to  0.000000
2/17/2012	9:51:22 AM	PH3 MFC set to  0.000000
2/17/2012	9:51:22 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:51:22 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:51:22 AM	Tube furnace set to 0
2/17/2012	9:52:22 AM	Helium valve closed
2/17/2012	9:52:22 AM	H2 valve closed
2/17/2012	9:52:22 AM	BCl3 valve closed
2/17/2012	9:52:22 AM	PH3 valve closed
2/17/2012	9:52:22 AM	SiCl4 pre valve closed
2/17/2012	9:52:22 AM	SiCl4 post valve closed
2/17/2012	9:52:22 AM	Bypass valve closed
2/17/2012	9:52:22 AM	Bubbler valve closed
2/17/2012	9:52:22 AM	Main Vac valve opened
2/17/2012	9:52:22 AM	Helium MFC set to  0.000000
2/17/2012	9:52:22 AM	H2 MFC set to  0.000000
2/17/2012	9:52:22 AM	BCl3 MFC set to  0.000000
2/17/2012	9:52:22 AM	PH3 MFC set to  0.000000
2/17/2012	9:52:22 AM	SiCl4 MFC set to  0.000000
2/17/2012	9:52:22 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:52:22 AM	Tube furnace set to 0
2/17/2012	9:52:23 AM	Run finished at 9:52 AM
2/17/2012	9:52:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	10:30:43 AM	Recipe started at 10:30 AM
2/17/2012	10:30:43 AM	Helium valve closed
2/17/2012	10:30:43 AM	H2 valve closed
2/17/2012	10:30:43 AM	BCl3 valve closed
2/17/2012	10:30:43 AM	PH3 valve closed
2/17/2012	10:30:43 AM	SiCl4 pre valve closed
2/17/2012	10:30:43 AM	SiCl4 post valve closed
2/17/2012	10:30:43 AM	Bypass valve closed
2/17/2012	10:30:43 AM	Bubbler valve closed
2/17/2012	10:30:43 AM	Main Vac valve opened
2/17/2012	10:30:43 AM	Helium MFC set to  0.000000
2/17/2012	10:30:43 AM	H2 MFC set to  0.000000
2/17/2012	10:30:43 AM	BCl3 MFC set to  0.000000
2/17/2012	10:30:43 AM	PH3 MFC set to  0.000000
2/17/2012	10:30:43 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:30:43 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:30:43 AM	Tube furnace set to 150
2/17/2012	10:31:13 AM	H2 valve closed
2/17/2012	10:31:13 AM	BCl3 valve closed
2/17/2012	10:31:13 AM	PH3 valve closed
2/17/2012	10:31:13 AM	SiCl4 pre valve closed
2/17/2012	10:31:13 AM	SiCl4 post valve closed
2/17/2012	10:31:13 AM	Bypass valve closed
2/17/2012	10:31:13 AM	Bubbler valve closed
2/17/2012	10:31:13 AM	Helium valve opened
2/17/2012	10:31:13 AM	Main Vac valve opened
2/17/2012	10:31:13 AM	Helium MFC set to  20.000000
2/17/2012	10:31:13 AM	H2 MFC set to  0.000000
2/17/2012	10:31:13 AM	BCl3 MFC set to  0.000000
2/17/2012	10:31:13 AM	PH3 MFC set to  0.000000
2/17/2012	10:31:13 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:31:13 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:31:14 AM	Tube furnace set to 150
2/17/2012	10:31:44 AM	Helium valve closed
2/17/2012	10:31:44 AM	H2 valve closed
2/17/2012	10:31:44 AM	BCl3 valve closed
2/17/2012	10:31:44 AM	PH3 valve closed
2/17/2012	10:31:44 AM	SiCl4 pre valve closed
2/17/2012	10:31:44 AM	SiCl4 post valve closed
2/17/2012	10:31:44 AM	Bypass valve closed
2/17/2012	10:31:44 AM	Bubbler valve closed
2/17/2012	10:31:44 AM	Main Vac valve opened
2/17/2012	10:31:44 AM	Helium MFC set to  0.000000
2/17/2012	10:31:44 AM	H2 MFC set to  0.000000
2/17/2012	10:31:44 AM	BCl3 MFC set to  0.000000
2/17/2012	10:31:44 AM	PH3 MFC set to  0.000000
2/17/2012	10:31:44 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:31:44 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:31:44 AM	Tube furnace set to 150
2/17/2012	10:32:14 AM	H2 valve closed
2/17/2012	10:32:14 AM	BCl3 valve closed
2/17/2012	10:32:14 AM	PH3 valve closed
2/17/2012	10:32:14 AM	SiCl4 pre valve closed
2/17/2012	10:32:14 AM	SiCl4 post valve closed
2/17/2012	10:32:14 AM	Bypass valve closed
2/17/2012	10:32:14 AM	Bubbler valve closed
2/17/2012	10:32:14 AM	Helium valve opened
2/17/2012	10:32:14 AM	Main Vac valve opened
2/17/2012	10:32:14 AM	Helium MFC set to  20.000000
2/17/2012	10:32:14 AM	H2 MFC set to  0.000000
2/17/2012	10:32:14 AM	BCl3 MFC set to  0.000000
2/17/2012	10:32:14 AM	PH3 MFC set to  0.000000
2/17/2012	10:32:14 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:32:14 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:32:14 AM	Tube furnace set to 150
2/17/2012	10:32:44 AM	Helium valve closed
2/17/2012	10:32:44 AM	H2 valve closed
2/17/2012	10:32:44 AM	BCl3 valve closed
2/17/2012	10:32:44 AM	PH3 valve closed
2/17/2012	10:32:44 AM	SiCl4 pre valve closed
2/17/2012	10:32:44 AM	SiCl4 post valve closed
2/17/2012	10:32:44 AM	Bypass valve closed
2/17/2012	10:32:44 AM	Bubbler valve closed
2/17/2012	10:32:44 AM	Main Vac valve opened
2/17/2012	10:32:44 AM	Helium MFC set to  0.000000
2/17/2012	10:32:44 AM	H2 MFC set to  0.000000
2/17/2012	10:32:44 AM	BCl3 MFC set to  0.000000
2/17/2012	10:32:44 AM	PH3 MFC set to  0.000000
2/17/2012	10:32:44 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:32:44 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:32:44 AM	Tube furnace set to 150
2/17/2012	10:33:14 AM	H2 valve closed
2/17/2012	10:33:14 AM	BCl3 valve closed
2/17/2012	10:33:14 AM	PH3 valve closed
2/17/2012	10:33:14 AM	SiCl4 pre valve closed
2/17/2012	10:33:14 AM	SiCl4 post valve closed
2/17/2012	10:33:14 AM	Bypass valve closed
2/17/2012	10:33:14 AM	Bubbler valve closed
2/17/2012	10:33:14 AM	Helium valve opened
2/17/2012	10:33:14 AM	Main Vac valve opened
2/17/2012	10:33:14 AM	Helium MFC set to  20.000000
2/17/2012	10:33:14 AM	H2 MFC set to  0.000000
2/17/2012	10:33:14 AM	BCl3 MFC set to  0.000000
2/17/2012	10:33:14 AM	PH3 MFC set to  0.000000
2/17/2012	10:33:14 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:33:14 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:33:14 AM	Tube furnace set to 150
2/17/2012	10:33:44 AM	Helium valve closed
2/17/2012	10:33:44 AM	H2 valve closed
2/17/2012	10:33:44 AM	BCl3 valve closed
2/17/2012	10:33:44 AM	PH3 valve closed
2/17/2012	10:33:44 AM	SiCl4 pre valve closed
2/17/2012	10:33:44 AM	SiCl4 post valve closed
2/17/2012	10:33:44 AM	Bypass valve closed
2/17/2012	10:33:44 AM	Bubbler valve closed
2/17/2012	10:33:44 AM	Main Vac valve opened
2/17/2012	10:33:44 AM	Helium MFC set to  0.000000
2/17/2012	10:33:44 AM	H2 MFC set to  0.000000
2/17/2012	10:33:44 AM	BCl3 MFC set to  0.000000
2/17/2012	10:33:44 AM	PH3 MFC set to  0.000000
2/17/2012	10:33:44 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:33:44 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:33:45 AM	Tube furnace set to 150
2/17/2012	10:34:15 AM	H2 valve closed
2/17/2012	10:34:15 AM	BCl3 valve closed
2/17/2012	10:34:15 AM	PH3 valve closed
2/17/2012	10:34:15 AM	SiCl4 pre valve closed
2/17/2012	10:34:15 AM	SiCl4 post valve closed
2/17/2012	10:34:15 AM	Bypass valve closed
2/17/2012	10:34:15 AM	Bubbler valve closed
2/17/2012	10:34:15 AM	Helium valve opened
2/17/2012	10:34:15 AM	Main Vac valve opened
2/17/2012	10:34:15 AM	Helium MFC set to  20.000000
2/17/2012	10:34:15 AM	H2 MFC set to  0.000000
2/17/2012	10:34:15 AM	BCl3 MFC set to  0.000000
2/17/2012	10:34:15 AM	PH3 MFC set to  0.000000
2/17/2012	10:34:15 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:34:15 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:34:15 AM	Tube furnace set to 150
2/17/2012	10:34:45 AM	Helium valve closed
2/17/2012	10:34:45 AM	H2 valve closed
2/17/2012	10:34:45 AM	BCl3 valve closed
2/17/2012	10:34:45 AM	PH3 valve closed
2/17/2012	10:34:45 AM	SiCl4 pre valve closed
2/17/2012	10:34:45 AM	SiCl4 post valve closed
2/17/2012	10:34:45 AM	Bypass valve closed
2/17/2012	10:34:45 AM	Bubbler valve closed
2/17/2012	10:34:45 AM	Main Vac valve opened
2/17/2012	10:34:45 AM	Helium MFC set to  0.000000
2/17/2012	10:34:45 AM	H2 MFC set to  0.000000
2/17/2012	10:34:45 AM	BCl3 MFC set to  0.000000
2/17/2012	10:34:45 AM	PH3 MFC set to  0.000000
2/17/2012	10:34:45 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:34:45 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:34:45 AM	Tube furnace set to 150
2/17/2012	10:35:15 AM	H2 valve closed
2/17/2012	10:35:15 AM	BCl3 valve closed
2/17/2012	10:35:15 AM	PH3 valve closed
2/17/2012	10:35:15 AM	SiCl4 pre valve closed
2/17/2012	10:35:15 AM	SiCl4 post valve closed
2/17/2012	10:35:15 AM	Bypass valve closed
2/17/2012	10:35:15 AM	Bubbler valve closed
2/17/2012	10:35:15 AM	Helium valve opened
2/17/2012	10:35:15 AM	Main Vac valve opened
2/17/2012	10:35:15 AM	Helium MFC set to  20.000000
2/17/2012	10:35:15 AM	H2 MFC set to  0.000000
2/17/2012	10:35:15 AM	BCl3 MFC set to  0.000000
2/17/2012	10:35:15 AM	PH3 MFC set to  0.000000
2/17/2012	10:35:15 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:35:15 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:35:15 AM	Tube furnace set to 150
2/17/2012	10:35:45 AM	Helium valve closed
2/17/2012	10:35:45 AM	H2 valve closed
2/17/2012	10:35:45 AM	BCl3 valve closed
2/17/2012	10:35:45 AM	PH3 valve closed
2/17/2012	10:35:45 AM	SiCl4 pre valve closed
2/17/2012	10:35:45 AM	SiCl4 post valve closed
2/17/2012	10:35:45 AM	Bypass valve closed
2/17/2012	10:35:45 AM	Bubbler valve closed
2/17/2012	10:35:45 AM	Main Vac valve opened
2/17/2012	10:35:45 AM	Helium MFC set to  0.000000
2/17/2012	10:35:45 AM	H2 MFC set to  0.000000
2/17/2012	10:35:45 AM	BCl3 MFC set to  0.000000
2/17/2012	10:35:45 AM	PH3 MFC set to  0.000000
2/17/2012	10:35:45 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:35:45 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:35:45 AM	Tube furnace set to 150
2/17/2012	10:36:15 AM	H2 valve closed
2/17/2012	10:36:15 AM	BCl3 valve closed
2/17/2012	10:36:15 AM	PH3 valve closed
2/17/2012	10:36:15 AM	SiCl4 pre valve closed
2/17/2012	10:36:15 AM	SiCl4 post valve closed
2/17/2012	10:36:15 AM	Bypass valve closed
2/17/2012	10:36:15 AM	Bubbler valve closed
2/17/2012	10:36:15 AM	Helium valve opened
2/17/2012	10:36:15 AM	Main Vac valve opened
2/17/2012	10:36:15 AM	Helium MFC set to  20.000000
2/17/2012	10:36:15 AM	H2 MFC set to  0.000000
2/17/2012	10:36:15 AM	BCl3 MFC set to  0.000000
2/17/2012	10:36:15 AM	PH3 MFC set to  0.000000
2/17/2012	10:36:15 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:36:15 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:36:16 AM	Tube furnace set to 150
2/17/2012	10:36:46 AM	Helium valve closed
2/17/2012	10:36:46 AM	H2 valve closed
2/17/2012	10:36:46 AM	BCl3 valve closed
2/17/2012	10:36:46 AM	PH3 valve closed
2/17/2012	10:36:46 AM	SiCl4 pre valve closed
2/17/2012	10:36:46 AM	SiCl4 post valve closed
2/17/2012	10:36:46 AM	Bypass valve closed
2/17/2012	10:36:46 AM	Bubbler valve closed
2/17/2012	10:36:46 AM	Main Vac valve opened
2/17/2012	10:36:46 AM	Helium MFC set to  0.000000
2/17/2012	10:36:46 AM	H2 MFC set to  0.000000
2/17/2012	10:36:46 AM	BCl3 MFC set to  0.000000
2/17/2012	10:36:46 AM	PH3 MFC set to  0.000000
2/17/2012	10:36:46 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:36:46 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:36:46 AM	Tube furnace set to 150
2/17/2012	10:37:16 AM	H2 valve closed
2/17/2012	10:37:16 AM	BCl3 valve closed
2/17/2012	10:37:16 AM	PH3 valve closed
2/17/2012	10:37:16 AM	SiCl4 pre valve closed
2/17/2012	10:37:16 AM	SiCl4 post valve closed
2/17/2012	10:37:16 AM	Bypass valve closed
2/17/2012	10:37:16 AM	Bubbler valve closed
2/17/2012	10:37:16 AM	Helium valve opened
2/17/2012	10:37:16 AM	Main Vac valve opened
2/17/2012	10:37:16 AM	Helium MFC set to  20.000000
2/17/2012	10:37:16 AM	H2 MFC set to  0.000000
2/17/2012	10:37:16 AM	BCl3 MFC set to  0.000000
2/17/2012	10:37:16 AM	PH3 MFC set to  0.000000
2/17/2012	10:37:16 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:37:16 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:37:16 AM	Tube furnace set to 150
2/17/2012	10:37:46 AM	Helium valve closed
2/17/2012	10:37:46 AM	H2 valve closed
2/17/2012	10:37:46 AM	BCl3 valve closed
2/17/2012	10:37:46 AM	PH3 valve closed
2/17/2012	10:37:46 AM	SiCl4 pre valve closed
2/17/2012	10:37:46 AM	SiCl4 post valve closed
2/17/2012	10:37:46 AM	Bypass valve closed
2/17/2012	10:37:46 AM	Bubbler valve closed
2/17/2012	10:37:46 AM	Main Vac valve opened
2/17/2012	10:37:46 AM	Helium MFC set to  0.000000
2/17/2012	10:37:46 AM	H2 MFC set to  0.000000
2/17/2012	10:37:46 AM	BCl3 MFC set to  0.000000
2/17/2012	10:37:46 AM	PH3 MFC set to  0.000000
2/17/2012	10:37:46 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:37:46 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:37:46 AM	Tube furnace set to 150
2/17/2012	10:38:16 AM	H2 valve closed
2/17/2012	10:38:16 AM	BCl3 valve closed
2/17/2012	10:38:16 AM	PH3 valve closed
2/17/2012	10:38:16 AM	SiCl4 pre valve closed
2/17/2012	10:38:16 AM	SiCl4 post valve closed
2/17/2012	10:38:16 AM	Bypass valve closed
2/17/2012	10:38:16 AM	Bubbler valve closed
2/17/2012	10:38:16 AM	Helium valve opened
2/17/2012	10:38:16 AM	Main Vac valve opened
2/17/2012	10:38:16 AM	Helium MFC set to  20.000000
2/17/2012	10:38:16 AM	H2 MFC set to  0.000000
2/17/2012	10:38:16 AM	BCl3 MFC set to  0.000000
2/17/2012	10:38:16 AM	PH3 MFC set to  0.000000
2/17/2012	10:38:16 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:38:16 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:38:16 AM	Tube furnace set to 150
2/17/2012	10:38:46 AM	Helium valve closed
2/17/2012	10:38:46 AM	H2 valve closed
2/17/2012	10:38:46 AM	BCl3 valve closed
2/17/2012	10:38:46 AM	PH3 valve closed
2/17/2012	10:38:46 AM	SiCl4 pre valve closed
2/17/2012	10:38:46 AM	SiCl4 post valve closed
2/17/2012	10:38:46 AM	Bypass valve closed
2/17/2012	10:38:46 AM	Bubbler valve closed
2/17/2012	10:38:46 AM	Main Vac valve opened
2/17/2012	10:38:46 AM	Helium MFC set to  0.000000
2/17/2012	10:38:46 AM	H2 MFC set to  0.000000
2/17/2012	10:38:46 AM	BCl3 MFC set to  0.000000
2/17/2012	10:38:46 AM	PH3 MFC set to  0.000000
2/17/2012	10:38:46 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:38:46 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:38:47 AM	Tube furnace set to 150
2/17/2012	10:39:17 AM	H2 valve closed
2/17/2012	10:39:17 AM	BCl3 valve closed
2/17/2012	10:39:17 AM	PH3 valve closed
2/17/2012	10:39:17 AM	SiCl4 pre valve closed
2/17/2012	10:39:17 AM	SiCl4 post valve closed
2/17/2012	10:39:17 AM	Bypass valve closed
2/17/2012	10:39:17 AM	Bubbler valve closed
2/17/2012	10:39:17 AM	Helium valve opened
2/17/2012	10:39:17 AM	Main Vac valve opened
2/17/2012	10:39:17 AM	Helium MFC set to  20.000000
2/17/2012	10:39:17 AM	H2 MFC set to  0.000000
2/17/2012	10:39:17 AM	BCl3 MFC set to  0.000000
2/17/2012	10:39:17 AM	PH3 MFC set to  0.000000
2/17/2012	10:39:17 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:39:17 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:39:17 AM	Tube furnace set to 150
2/17/2012	10:39:47 AM	Helium valve closed
2/17/2012	10:39:47 AM	H2 valve closed
2/17/2012	10:39:47 AM	BCl3 valve closed
2/17/2012	10:39:47 AM	PH3 valve closed
2/17/2012	10:39:47 AM	SiCl4 pre valve closed
2/17/2012	10:39:47 AM	SiCl4 post valve closed
2/17/2012	10:39:47 AM	Bypass valve closed
2/17/2012	10:39:47 AM	Bubbler valve closed
2/17/2012	10:39:47 AM	Main Vac valve opened
2/17/2012	10:39:47 AM	Helium MFC set to  0.000000
2/17/2012	10:39:47 AM	H2 MFC set to  0.000000
2/17/2012	10:39:47 AM	BCl3 MFC set to  0.000000
2/17/2012	10:39:47 AM	PH3 MFC set to  0.000000
2/17/2012	10:39:47 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:39:47 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:39:47 AM	Tube furnace set to 150
2/17/2012	10:40:17 AM	H2 valve closed
2/17/2012	10:40:17 AM	BCl3 valve closed
2/17/2012	10:40:17 AM	PH3 valve closed
2/17/2012	10:40:17 AM	SiCl4 pre valve closed
2/17/2012	10:40:17 AM	SiCl4 post valve closed
2/17/2012	10:40:17 AM	Bypass valve closed
2/17/2012	10:40:17 AM	Bubbler valve closed
2/17/2012	10:40:17 AM	Helium valve opened
2/17/2012	10:40:17 AM	Main Vac valve opened
2/17/2012	10:40:17 AM	Helium MFC set to  20.000000
2/17/2012	10:40:17 AM	H2 MFC set to  0.000000
2/17/2012	10:40:17 AM	BCl3 MFC set to  0.000000
2/17/2012	10:40:17 AM	PH3 MFC set to  0.000000
2/17/2012	10:40:17 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:40:17 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:40:17 AM	Tube furnace set to 150
2/17/2012	10:40:47 AM	Helium valve closed
2/17/2012	10:40:47 AM	H2 valve closed
2/17/2012	10:40:47 AM	BCl3 valve closed
2/17/2012	10:40:47 AM	PH3 valve closed
2/17/2012	10:40:47 AM	SiCl4 pre valve closed
2/17/2012	10:40:47 AM	SiCl4 post valve closed
2/17/2012	10:40:47 AM	Bypass valve closed
2/17/2012	10:40:47 AM	Bubbler valve closed
2/17/2012	10:40:47 AM	Main Vac valve opened
2/17/2012	10:40:47 AM	Helium MFC set to  0.000000
2/17/2012	10:40:47 AM	H2 MFC set to  0.000000
2/17/2012	10:40:47 AM	BCl3 MFC set to  0.000000
2/17/2012	10:40:47 AM	PH3 MFC set to  0.000000
2/17/2012	10:40:47 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:40:47 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:40:47 AM	Tube furnace set to 150
2/17/2012	10:40:48 AM	Run finished at 10:40 AM
2/17/2012	10:48:14 AM	Main Vac valve closed
2/17/2012	10:48:36 AM	Main Vac valve opened
2/17/2012	10:52:27 AM	Recipe started at 10:52 AM
2/17/2012	10:52:27 AM	Helium valve closed
2/17/2012	10:52:27 AM	H2 valve closed
2/17/2012	10:52:27 AM	BCl3 valve closed
2/17/2012	10:52:27 AM	PH3 valve closed
2/17/2012	10:52:27 AM	SiCl4 pre valve closed
2/17/2012	10:52:27 AM	SiCl4 post valve closed
2/17/2012	10:52:27 AM	Main Vac valve closed
2/17/2012	10:52:27 AM	Bypass valve closed
2/17/2012	10:52:27 AM	Bubbler valve closed
2/17/2012	10:52:27 AM	Helium MFC set to  0.000000
2/17/2012	10:52:27 AM	H2 MFC set to  0.000000
2/17/2012	10:52:27 AM	BCl3 MFC set to  0.000000
2/17/2012	10:52:27 AM	PH3 MFC set to  0.000000
2/17/2012	10:52:27 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:52:27 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:52:27 AM	Tube furnace set to 0
2/17/2012	10:52:30 AM	Helium valve closed
2/17/2012	10:52:30 AM	BCl3 valve closed
2/17/2012	10:52:30 AM	PH3 valve closed
2/17/2012	10:52:31 AM	SiCl4 pre valve closed
2/17/2012	10:52:31 AM	SiCl4 post valve closed
2/17/2012	10:52:31 AM	Main Vac valve closed
2/17/2012	10:52:31 AM	Bypass valve closed
2/17/2012	10:52:31 AM	Bubbler valve closed
2/17/2012	10:52:31 AM	H2 valve opened
2/17/2012	10:52:31 AM	Helium MFC set to  0.000000
2/17/2012	10:52:31 AM	H2 MFC set to  500.000000
2/17/2012	10:52:31 AM	BCl3 MFC set to  0.000000
2/17/2012	10:52:31 AM	PH3 MFC set to  0.000000
2/17/2012	10:52:31 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:52:31 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:52:31 AM	Tube furnace set to 0
2/17/2012	10:53:34 AM	Helium valve closed
2/17/2012	10:53:34 AM	BCl3 valve closed
2/17/2012	10:53:34 AM	PH3 valve closed
2/17/2012	10:53:34 AM	SiCl4 pre valve closed
2/17/2012	10:53:34 AM	SiCl4 post valve closed
2/17/2012	10:53:34 AM	Main Vac valve closed
2/17/2012	10:53:34 AM	Bypass valve closed
2/17/2012	10:53:34 AM	H2 valve opened
2/17/2012	10:53:34 AM	Bubbler valve opened
2/17/2012	10:53:34 AM	Helium MFC set to  0.000000
2/17/2012	10:53:34 AM	H2 MFC set to  500.000000
2/17/2012	10:53:34 AM	BCl3 MFC set to  0.000000
2/17/2012	10:53:34 AM	PH3 MFC set to  0.000000
2/17/2012	10:53:34 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:53:34 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:53:34 AM	Tube furnace set to 0
2/17/2012	10:53:35 AM	Helium valve closed
2/17/2012	10:53:35 AM	BCl3 valve closed
2/17/2012	10:53:35 AM	PH3 valve closed
2/17/2012	10:53:35 AM	SiCl4 pre valve closed
2/17/2012	10:53:35 AM	SiCl4 post valve closed
2/17/2012	10:53:35 AM	Main Vac valve closed
2/17/2012	10:53:35 AM	Bypass valve closed
2/17/2012	10:53:35 AM	H2 valve opened
2/17/2012	10:53:35 AM	Bubbler valve opened
2/17/2012	10:53:35 AM	Helium MFC set to  0.000000
2/17/2012	10:53:35 AM	H2 MFC set to  500.000000
2/17/2012	10:53:35 AM	BCl3 MFC set to  0.000000
2/17/2012	10:53:35 AM	PH3 MFC set to  0.000000
2/17/2012	10:53:35 AM	SiCl4 MFC set to  0.000000
2/17/2012	10:53:35 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:53:36 AM	Tube furnace set to 1000
2/17/2012	11:13:36 AM	Helium valve closed
2/17/2012	11:13:36 AM	BCl3 valve closed
2/17/2012	11:13:36 AM	Main Vac valve closed
2/17/2012	11:13:36 AM	Bypass valve closed
2/17/2012	11:13:36 AM	H2 valve opened
2/17/2012	11:13:36 AM	PH3 valve opened
2/17/2012	11:13:36 AM	SiCl4 pre valve opened
2/17/2012	11:13:36 AM	SiCl4 post valve opened
2/17/2012	11:13:36 AM	Bubbler valve opened
2/17/2012	11:13:36 AM	Helium MFC set to  0.000000
2/17/2012	11:13:36 AM	H2 MFC set to  500.000000
2/17/2012	11:13:36 AM	BCl3 MFC set to  0.000000
2/17/2012	11:13:36 AM	PH3 MFC set to  0.300000
2/17/2012	11:13:36 AM	SiCl4 MFC set to  25.000000
2/17/2012	11:13:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:13:36 AM	Tube furnace set to 1000
2/17/2012	11:33:36 AM	Helium valve closed
2/17/2012	11:33:36 AM	BCl3 valve closed
2/17/2012	11:33:36 AM	PH3 valve closed
2/17/2012	11:33:36 AM	SiCl4 pre valve closed
2/17/2012	11:33:36 AM	SiCl4 post valve closed
2/17/2012	11:33:36 AM	Main Vac valve closed
2/17/2012	11:33:36 AM	Bypass valve closed
2/17/2012	11:33:36 AM	H2 valve opened
2/17/2012	11:33:36 AM	Bubbler valve opened
2/17/2012	11:33:36 AM	Helium MFC set to  0.000000
2/17/2012	11:33:36 AM	H2 MFC set to  500.000000
2/17/2012	11:33:36 AM	BCl3 MFC set to  0.000000
2/17/2012	11:33:36 AM	PH3 MFC set to  0.000000
2/17/2012	11:33:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	11:33:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:33:36 AM	Tube furnace set to 750
2/17/2012	11:38:36 AM	H2 valve closed
2/17/2012	11:38:36 AM	BCl3 valve closed
2/17/2012	11:38:36 AM	PH3 valve closed
2/17/2012	11:38:36 AM	SiCl4 pre valve closed
2/17/2012	11:38:36 AM	SiCl4 post valve closed
2/17/2012	11:38:36 AM	Main Vac valve closed
2/17/2012	11:38:36 AM	Bypass valve closed
2/17/2012	11:38:36 AM	Helium valve opened
2/17/2012	11:38:36 AM	Bubbler valve opened
2/17/2012	11:38:36 AM	Helium MFC set to  500.000000
2/17/2012	11:38:36 AM	H2 MFC set to  0.000000
2/17/2012	11:38:36 AM	BCl3 MFC set to  0.000000
2/17/2012	11:38:36 AM	PH3 MFC set to  0.000000
2/17/2012	11:38:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	11:38:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:38:36 AM	Tube furnace set to 0
2/17/2012	11:58:36 AM	Helium valve closed
2/17/2012	11:58:36 AM	H2 valve closed
2/17/2012	11:58:36 AM	BCl3 valve closed
2/17/2012	11:58:36 AM	PH3 valve closed
2/17/2012	11:58:36 AM	SiCl4 pre valve closed
2/17/2012	11:58:36 AM	SiCl4 post valve closed
2/17/2012	11:58:36 AM	Main Vac valve closed
2/17/2012	11:58:36 AM	Bypass valve closed
2/17/2012	11:58:36 AM	Bubbler valve closed
2/17/2012	11:58:36 AM	Helium MFC set to  0.000000
2/17/2012	11:58:36 AM	H2 MFC set to  0.000000
2/17/2012	11:58:36 AM	BCl3 MFC set to  0.000000
2/17/2012	11:58:36 AM	PH3 MFC set to  0.000000
2/17/2012	11:58:36 AM	SiCl4 MFC set to  0.000000
2/17/2012	11:58:36 AM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:58:36 AM	Tube furnace set to 0
2/17/2012	11:58:37 AM	Run finished at 11:58 AM
2/17/2012	12:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:06:09 PM	Recipe started at 12:06 PM
2/17/2012	12:06:09 PM	Helium valve closed
2/17/2012	12:06:09 PM	H2 valve closed
2/17/2012	12:06:09 PM	BCl3 valve closed
2/17/2012	12:06:09 PM	PH3 valve closed
2/17/2012	12:06:09 PM	SiCl4 pre valve closed
2/17/2012	12:06:09 PM	SiCl4 post valve closed
2/17/2012	12:06:09 PM	Main Vac valve closed
2/17/2012	12:06:09 PM	Bubbler valve closed
2/17/2012	12:06:09 PM	Bypass valve opened
2/17/2012	12:06:09 PM	Helium MFC set to  0.000000
2/17/2012	12:06:09 PM	H2 MFC set to  0.000000
2/17/2012	12:06:09 PM	BCl3 MFC set to  0.000000
2/17/2012	12:06:09 PM	PH3 MFC set to  0.000000
2/17/2012	12:06:09 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:06:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:06:10 PM	Tube furnace set to 0
2/17/2012	12:07:11 PM	Helium valve closed
2/17/2012	12:07:11 PM	H2 valve closed
2/17/2012	12:07:11 PM	BCl3 valve closed
2/17/2012	12:07:11 PM	PH3 valve closed
2/17/2012	12:07:11 PM	SiCl4 pre valve closed
2/17/2012	12:07:11 PM	SiCl4 post valve closed
2/17/2012	12:07:11 PM	Main Vac valve closed
2/17/2012	12:07:11 PM	Bubbler valve closed
2/17/2012	12:07:11 PM	Bypass valve opened
2/17/2012	12:07:11 PM	Helium MFC set to  0.000000
2/17/2012	12:07:11 PM	H2 MFC set to  0.000000
2/17/2012	12:07:11 PM	BCl3 MFC set to  0.000000
2/17/2012	12:07:11 PM	PH3 MFC set to  0.000000
2/17/2012	12:07:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:07:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:07:11 PM	Tube furnace set to 0
2/17/2012	12:08:11 PM	Helium valve closed
2/17/2012	12:08:11 PM	H2 valve closed
2/17/2012	12:08:11 PM	BCl3 valve closed
2/17/2012	12:08:11 PM	PH3 valve closed
2/17/2012	12:08:11 PM	SiCl4 pre valve closed
2/17/2012	12:08:11 PM	SiCl4 post valve closed
2/17/2012	12:08:11 PM	Bypass valve closed
2/17/2012	12:08:11 PM	Bubbler valve closed
2/17/2012	12:08:11 PM	Main Vac valve opened
2/17/2012	12:08:11 PM	Helium MFC set to  0.000000
2/17/2012	12:08:11 PM	H2 MFC set to  0.000000
2/17/2012	12:08:11 PM	BCl3 MFC set to  0.000000
2/17/2012	12:08:11 PM	PH3 MFC set to  0.000000
2/17/2012	12:08:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:08:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:08:11 PM	Tube furnace set to 0
2/17/2012	12:08:12 PM	Run finished at 12:08 PM
2/17/2012	12:08:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	12:37:34 PM	Main Vac valve closed
2/17/2012	12:38:01 PM	Main Vac valve opened
2/17/2012	12:42:10 PM	Recipe started at 12:42 PM
2/17/2012	12:42:10 PM	Helium valve closed
2/17/2012	12:42:10 PM	H2 valve closed
2/17/2012	12:42:10 PM	BCl3 valve closed
2/17/2012	12:42:10 PM	PH3 valve closed
2/17/2012	12:42:10 PM	SiCl4 pre valve closed
2/17/2012	12:42:10 PM	SiCl4 post valve closed
2/17/2012	12:42:10 PM	Main Vac valve closed
2/17/2012	12:42:10 PM	Bypass valve closed
2/17/2012	12:42:10 PM	Bubbler valve closed
2/17/2012	12:42:10 PM	Helium MFC set to  0.000000
2/17/2012	12:42:10 PM	H2 MFC set to  0.000000
2/17/2012	12:42:10 PM	BCl3 MFC set to  0.000000
2/17/2012	12:42:10 PM	PH3 MFC set to  0.000000
2/17/2012	12:42:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:42:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:42:10 PM	Tube furnace set to 0
2/17/2012	12:42:13 PM	Helium valve closed
2/17/2012	12:42:13 PM	BCl3 valve closed
2/17/2012	12:42:13 PM	PH3 valve closed
2/17/2012	12:42:13 PM	SiCl4 pre valve closed
2/17/2012	12:42:13 PM	SiCl4 post valve closed
2/17/2012	12:42:13 PM	Main Vac valve closed
2/17/2012	12:42:13 PM	Bypass valve closed
2/17/2012	12:42:13 PM	Bubbler valve closed
2/17/2012	12:42:13 PM	H2 valve opened
2/17/2012	12:42:13 PM	Helium MFC set to  0.000000
2/17/2012	12:42:13 PM	H2 MFC set to  500.000000
2/17/2012	12:42:13 PM	BCl3 MFC set to  0.000000
2/17/2012	12:42:13 PM	PH3 MFC set to  0.000000
2/17/2012	12:42:13 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:42:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:42:13 PM	Tube furnace set to 0
2/17/2012	12:43:20 PM	Helium valve closed
2/17/2012	12:43:20 PM	BCl3 valve closed
2/17/2012	12:43:20 PM	PH3 valve closed
2/17/2012	12:43:20 PM	SiCl4 pre valve closed
2/17/2012	12:43:20 PM	SiCl4 post valve closed
2/17/2012	12:43:20 PM	Main Vac valve closed
2/17/2012	12:43:20 PM	Bypass valve closed
2/17/2012	12:43:20 PM	H2 valve opened
2/17/2012	12:43:20 PM	Bubbler valve opened
2/17/2012	12:43:20 PM	Helium MFC set to  0.000000
2/17/2012	12:43:20 PM	H2 MFC set to  500.000000
2/17/2012	12:43:20 PM	BCl3 MFC set to  0.000000
2/17/2012	12:43:20 PM	PH3 MFC set to  0.000000
2/17/2012	12:43:20 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:43:20 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:43:20 PM	Tube furnace set to 0
2/17/2012	12:43:21 PM	Helium valve closed
2/17/2012	12:43:21 PM	BCl3 valve closed
2/17/2012	12:43:21 PM	PH3 valve closed
2/17/2012	12:43:21 PM	SiCl4 pre valve closed
2/17/2012	12:43:21 PM	SiCl4 post valve closed
2/17/2012	12:43:21 PM	Main Vac valve closed
2/17/2012	12:43:21 PM	Bypass valve closed
2/17/2012	12:43:21 PM	H2 valve opened
2/17/2012	12:43:21 PM	Bubbler valve opened
2/17/2012	12:43:21 PM	Helium MFC set to  0.000000
2/17/2012	12:43:21 PM	H2 MFC set to  500.000000
2/17/2012	12:43:21 PM	BCl3 MFC set to  0.000000
2/17/2012	12:43:21 PM	PH3 MFC set to  0.000000
2/17/2012	12:43:21 PM	SiCl4 MFC set to  0.000000
2/17/2012	12:43:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	12:43:21 PM	Tube furnace set to 1000
2/17/2012	1:03:21 PM	Helium valve closed
2/17/2012	1:03:21 PM	BCl3 valve closed
2/17/2012	1:03:21 PM	Main Vac valve closed
2/17/2012	1:03:21 PM	Bypass valve closed
2/17/2012	1:03:21 PM	H2 valve opened
2/17/2012	1:03:21 PM	PH3 valve opened
2/17/2012	1:03:21 PM	SiCl4 pre valve opened
2/17/2012	1:03:21 PM	SiCl4 post valve opened
2/17/2012	1:03:21 PM	Bubbler valve opened
2/17/2012	1:03:21 PM	Helium MFC set to  0.000000
2/17/2012	1:03:21 PM	H2 MFC set to  500.000000
2/17/2012	1:03:21 PM	BCl3 MFC set to  0.000000
2/17/2012	1:03:21 PM	PH3 MFC set to  0.300000
2/17/2012	1:03:21 PM	SiCl4 MFC set to  25.000000
2/17/2012	1:03:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:03:21 PM	Tube furnace set to 1000
2/17/2012	1:18:21 PM	Helium valve closed
2/17/2012	1:18:21 PM	BCl3 valve closed
2/17/2012	1:18:21 PM	PH3 valve closed
2/17/2012	1:18:21 PM	SiCl4 pre valve closed
2/17/2012	1:18:21 PM	SiCl4 post valve closed
2/17/2012	1:18:21 PM	Main Vac valve closed
2/17/2012	1:18:21 PM	Bypass valve closed
2/17/2012	1:18:21 PM	H2 valve opened
2/17/2012	1:18:21 PM	Bubbler valve opened
2/17/2012	1:18:21 PM	Helium MFC set to  0.000000
2/17/2012	1:18:21 PM	H2 MFC set to  500.000000
2/17/2012	1:18:21 PM	BCl3 MFC set to  0.000000
2/17/2012	1:18:21 PM	PH3 MFC set to  0.000000
2/17/2012	1:18:21 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:18:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:18:22 PM	Tube furnace set to 750
2/17/2012	1:23:22 PM	H2 valve closed
2/17/2012	1:23:22 PM	BCl3 valve closed
2/17/2012	1:23:22 PM	PH3 valve closed
2/17/2012	1:23:22 PM	SiCl4 pre valve closed
2/17/2012	1:23:22 PM	SiCl4 post valve closed
2/17/2012	1:23:22 PM	Main Vac valve closed
2/17/2012	1:23:22 PM	Bypass valve closed
2/17/2012	1:23:22 PM	Helium valve opened
2/17/2012	1:23:22 PM	Bubbler valve opened
2/17/2012	1:23:22 PM	Helium MFC set to  500.000000
2/17/2012	1:23:22 PM	H2 MFC set to  0.000000
2/17/2012	1:23:22 PM	BCl3 MFC set to  0.000000
2/17/2012	1:23:22 PM	PH3 MFC set to  0.000000
2/17/2012	1:23:22 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:23:22 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:23:22 PM	Tube furnace set to 0
2/17/2012	1:43:22 PM	Helium valve closed
2/17/2012	1:43:22 PM	H2 valve closed
2/17/2012	1:43:22 PM	BCl3 valve closed
2/17/2012	1:43:22 PM	PH3 valve closed
2/17/2012	1:43:22 PM	SiCl4 pre valve closed
2/17/2012	1:43:22 PM	SiCl4 post valve closed
2/17/2012	1:43:22 PM	Main Vac valve closed
2/17/2012	1:43:22 PM	Bypass valve closed
2/17/2012	1:43:22 PM	Bubbler valve closed
2/17/2012	1:43:22 PM	Helium MFC set to  0.000000
2/17/2012	1:43:22 PM	H2 MFC set to  0.000000
2/17/2012	1:43:22 PM	BCl3 MFC set to  0.000000
2/17/2012	1:43:22 PM	PH3 MFC set to  0.000000
2/17/2012	1:43:22 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:43:22 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:43:22 PM	Tube furnace set to 0
2/17/2012	1:43:23 PM	Run finished at 1:43 PM
2/17/2012	1:52:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	1:52:02 PM	Recipe started at 1:52 PM
2/17/2012	1:52:02 PM	Helium valve closed
2/17/2012	1:52:02 PM	H2 valve closed
2/17/2012	1:52:02 PM	BCl3 valve closed
2/17/2012	1:52:02 PM	PH3 valve closed
2/17/2012	1:52:02 PM	SiCl4 pre valve closed
2/17/2012	1:52:02 PM	SiCl4 post valve closed
2/17/2012	1:52:02 PM	Main Vac valve closed
2/17/2012	1:52:02 PM	Bubbler valve closed
2/17/2012	1:52:02 PM	Bypass valve opened
2/17/2012	1:52:02 PM	Helium MFC set to  0.000000
2/17/2012	1:52:02 PM	H2 MFC set to  0.000000
2/17/2012	1:52:02 PM	BCl3 MFC set to  0.000000
2/17/2012	1:52:02 PM	PH3 MFC set to  0.000000
2/17/2012	1:52:02 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:52:02 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:52:02 PM	Tube furnace set to 0
2/17/2012	1:53:01 PM	Helium valve closed
2/17/2012	1:53:01 PM	H2 valve closed
2/17/2012	1:53:01 PM	BCl3 valve closed
2/17/2012	1:53:01 PM	PH3 valve closed
2/17/2012	1:53:01 PM	SiCl4 pre valve closed
2/17/2012	1:53:01 PM	SiCl4 post valve closed
2/17/2012	1:53:01 PM	Main Vac valve closed
2/17/2012	1:53:01 PM	Bubbler valve closed
2/17/2012	1:53:01 PM	Bypass valve opened
2/17/2012	1:53:01 PM	Helium MFC set to  0.000000
2/17/2012	1:53:01 PM	H2 MFC set to  0.000000
2/17/2012	1:53:01 PM	BCl3 MFC set to  0.000000
2/17/2012	1:53:01 PM	PH3 MFC set to  0.000000
2/17/2012	1:53:01 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:53:01 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:53:01 PM	Tube furnace set to 0
2/17/2012	1:54:01 PM	Helium valve closed
2/17/2012	1:54:01 PM	H2 valve closed
2/17/2012	1:54:01 PM	BCl3 valve closed
2/17/2012	1:54:01 PM	PH3 valve closed
2/17/2012	1:54:01 PM	SiCl4 pre valve closed
2/17/2012	1:54:01 PM	SiCl4 post valve closed
2/17/2012	1:54:01 PM	Bypass valve closed
2/17/2012	1:54:01 PM	Bubbler valve closed
2/17/2012	1:54:01 PM	Main Vac valve opened
2/17/2012	1:54:01 PM	Helium MFC set to  0.000000
2/17/2012	1:54:01 PM	H2 MFC set to  0.000000
2/17/2012	1:54:01 PM	BCl3 MFC set to  0.000000
2/17/2012	1:54:01 PM	PH3 MFC set to  0.000000
2/17/2012	1:54:01 PM	SiCl4 MFC set to  0.000000
2/17/2012	1:54:01 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	1:54:02 PM	Tube furnace set to 0
2/17/2012	1:54:03 PM	Run finished at 1:54 PM
2/17/2012	1:54:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	2:02:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	2:02:49 PM	Recipe started at 2:02 PM
2/17/2012	2:02:49 PM	Helium valve closed
2/17/2012	2:02:49 PM	H2 valve closed
2/17/2012	2:02:49 PM	BCl3 valve closed
2/17/2012	2:02:49 PM	PH3 valve closed
2/17/2012	2:02:49 PM	SiCl4 pre valve closed
2/17/2012	2:02:49 PM	SiCl4 post valve closed
2/17/2012	2:02:49 PM	Main Vac valve closed
2/17/2012	2:02:49 PM	Bubbler valve closed
2/17/2012	2:02:49 PM	Bypass valve opened
2/17/2012	2:02:49 PM	Helium MFC set to  0.000000
2/17/2012	2:02:49 PM	H2 MFC set to  0.000000
2/17/2012	2:02:49 PM	BCl3 MFC set to  0.000000
2/17/2012	2:02:49 PM	PH3 MFC set to  0.000000
2/17/2012	2:02:49 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:02:49 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:02:49 PM	Tube furnace set to 0
2/17/2012	2:02:50 PM	Helium valve closed
2/17/2012	2:02:50 PM	H2 valve closed
2/17/2012	2:02:50 PM	BCl3 valve closed
2/17/2012	2:02:50 PM	PH3 valve closed
2/17/2012	2:02:50 PM	SiCl4 pre valve closed
2/17/2012	2:02:50 PM	SiCl4 post valve closed
2/17/2012	2:02:50 PM	Main Vac valve closed
2/17/2012	2:02:50 PM	Bubbler valve closed
2/17/2012	2:02:50 PM	Bypass valve opened
2/17/2012	2:02:50 PM	Helium MFC set to  0.000000
2/17/2012	2:02:50 PM	H2 MFC set to  0.000000
2/17/2012	2:02:50 PM	BCl3 MFC set to  0.000000
2/17/2012	2:02:50 PM	PH3 MFC set to  0.000000
2/17/2012	2:02:50 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:02:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:02:50 PM	Tube furnace set to 0
2/17/2012	2:02:50 PM	Helium valve closed
2/17/2012	2:02:50 PM	H2 valve closed
2/17/2012	2:02:50 PM	BCl3 valve closed
2/17/2012	2:02:50 PM	PH3 valve closed
2/17/2012	2:02:50 PM	SiCl4 pre valve closed
2/17/2012	2:02:50 PM	SiCl4 post valve closed
2/17/2012	2:02:50 PM	Bypass valve closed
2/17/2012	2:02:50 PM	Bubbler valve closed
2/17/2012	2:02:50 PM	Main Vac valve opened
2/17/2012	2:02:50 PM	Helium MFC set to  0.000000
2/17/2012	2:02:50 PM	H2 MFC set to  0.000000
2/17/2012	2:02:50 PM	BCl3 MFC set to  0.000000
2/17/2012	2:02:50 PM	PH3 MFC set to  0.000000
2/17/2012	2:02:50 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:02:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:02:50 PM	Tube furnace set to 0
2/17/2012	2:02:51 PM	H2 valve closed
2/17/2012	2:02:51 PM	BCl3 valve closed
2/17/2012	2:02:51 PM	PH3 valve closed
2/17/2012	2:02:51 PM	SiCl4 pre valve closed
2/17/2012	2:02:51 PM	SiCl4 post valve closed
2/17/2012	2:02:51 PM	Bypass valve closed
2/17/2012	2:02:51 PM	Bubbler valve closed
2/17/2012	2:02:51 PM	Helium valve opened
2/17/2012	2:02:51 PM	Main Vac valve opened
2/17/2012	2:02:51 PM	Helium MFC set to  20.000000
2/17/2012	2:02:51 PM	H2 MFC set to  0.000000
2/17/2012	2:02:51 PM	BCl3 MFC set to  0.000000
2/17/2012	2:02:51 PM	PH3 MFC set to  0.000000
2/17/2012	2:02:51 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:02:51 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:02:51 PM	Tube furnace set to 0
2/17/2012	2:03:21 PM	Helium valve closed
2/17/2012	2:03:21 PM	H2 valve closed
2/17/2012	2:03:21 PM	BCl3 valve closed
2/17/2012	2:03:21 PM	PH3 valve closed
2/17/2012	2:03:21 PM	SiCl4 pre valve closed
2/17/2012	2:03:21 PM	SiCl4 post valve closed
2/17/2012	2:03:21 PM	Bypass valve closed
2/17/2012	2:03:21 PM	Bubbler valve closed
2/17/2012	2:03:21 PM	Main Vac valve opened
2/17/2012	2:03:21 PM	Helium MFC set to  0.000000
2/17/2012	2:03:21 PM	H2 MFC set to  0.000000
2/17/2012	2:03:21 PM	BCl3 MFC set to  0.000000
2/17/2012	2:03:21 PM	PH3 MFC set to  0.000000
2/17/2012	2:03:21 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:03:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:03:21 PM	Tube furnace set to 0
2/17/2012	2:03:51 PM	H2 valve closed
2/17/2012	2:03:51 PM	BCl3 valve closed
2/17/2012	2:03:51 PM	PH3 valve closed
2/17/2012	2:03:51 PM	SiCl4 pre valve closed
2/17/2012	2:03:51 PM	SiCl4 post valve closed
2/17/2012	2:03:51 PM	Bypass valve closed
2/17/2012	2:03:51 PM	Bubbler valve closed
2/17/2012	2:03:51 PM	Helium valve opened
2/17/2012	2:03:51 PM	Main Vac valve opened
2/17/2012	2:03:51 PM	Helium MFC set to  20.000000
2/17/2012	2:03:51 PM	H2 MFC set to  0.000000
2/17/2012	2:03:51 PM	BCl3 MFC set to  0.000000
2/17/2012	2:03:51 PM	PH3 MFC set to  0.000000
2/17/2012	2:03:51 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:03:51 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:03:51 PM	Tube furnace set to 0
2/17/2012	2:04:21 PM	Helium valve closed
2/17/2012	2:04:21 PM	H2 valve closed
2/17/2012	2:04:21 PM	BCl3 valve closed
2/17/2012	2:04:21 PM	PH3 valve closed
2/17/2012	2:04:21 PM	SiCl4 pre valve closed
2/17/2012	2:04:21 PM	SiCl4 post valve closed
2/17/2012	2:04:21 PM	Bypass valve closed
2/17/2012	2:04:21 PM	Bubbler valve closed
2/17/2012	2:04:21 PM	Main Vac valve opened
2/17/2012	2:04:21 PM	Helium MFC set to  0.000000
2/17/2012	2:04:21 PM	H2 MFC set to  0.000000
2/17/2012	2:04:21 PM	BCl3 MFC set to  0.000000
2/17/2012	2:04:21 PM	PH3 MFC set to  0.000000
2/17/2012	2:04:21 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:04:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:04:22 PM	Tube furnace set to 0
2/17/2012	2:04:52 PM	H2 valve closed
2/17/2012	2:04:52 PM	BCl3 valve closed
2/17/2012	2:04:52 PM	PH3 valve closed
2/17/2012	2:04:52 PM	SiCl4 pre valve closed
2/17/2012	2:04:52 PM	SiCl4 post valve closed
2/17/2012	2:04:52 PM	Bypass valve closed
2/17/2012	2:04:52 PM	Bubbler valve closed
2/17/2012	2:04:52 PM	Helium valve opened
2/17/2012	2:04:52 PM	Main Vac valve opened
2/17/2012	2:04:52 PM	Helium MFC set to  20.000000
2/17/2012	2:04:52 PM	H2 MFC set to  0.000000
2/17/2012	2:04:52 PM	BCl3 MFC set to  0.000000
2/17/2012	2:04:52 PM	PH3 MFC set to  0.000000
2/17/2012	2:04:52 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:04:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:04:52 PM	Tube furnace set to 0
2/17/2012	2:05:22 PM	Helium valve closed
2/17/2012	2:05:22 PM	H2 valve closed
2/17/2012	2:05:22 PM	BCl3 valve closed
2/17/2012	2:05:22 PM	PH3 valve closed
2/17/2012	2:05:22 PM	SiCl4 pre valve closed
2/17/2012	2:05:22 PM	SiCl4 post valve closed
2/17/2012	2:05:22 PM	Bypass valve closed
2/17/2012	2:05:22 PM	Bubbler valve closed
2/17/2012	2:05:22 PM	Main Vac valve opened
2/17/2012	2:05:22 PM	Helium MFC set to  0.000000
2/17/2012	2:05:22 PM	H2 MFC set to  0.000000
2/17/2012	2:05:22 PM	BCl3 MFC set to  0.000000
2/17/2012	2:05:22 PM	PH3 MFC set to  0.000000
2/17/2012	2:05:22 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:05:22 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:05:22 PM	Tube furnace set to 0
2/17/2012	2:05:52 PM	H2 valve closed
2/17/2012	2:05:52 PM	BCl3 valve closed
2/17/2012	2:05:52 PM	PH3 valve closed
2/17/2012	2:05:52 PM	SiCl4 pre valve closed
2/17/2012	2:05:52 PM	SiCl4 post valve closed
2/17/2012	2:05:52 PM	Bypass valve closed
2/17/2012	2:05:52 PM	Bubbler valve closed
2/17/2012	2:05:52 PM	Helium valve opened
2/17/2012	2:05:52 PM	Main Vac valve opened
2/17/2012	2:05:52 PM	Helium MFC set to  20.000000
2/17/2012	2:05:52 PM	H2 MFC set to  0.000000
2/17/2012	2:05:52 PM	BCl3 MFC set to  0.000000
2/17/2012	2:05:52 PM	PH3 MFC set to  0.000000
2/17/2012	2:05:52 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:05:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:05:52 PM	Tube furnace set to 0
2/17/2012	2:06:22 PM	Helium valve closed
2/17/2012	2:06:22 PM	H2 valve closed
2/17/2012	2:06:22 PM	BCl3 valve closed
2/17/2012	2:06:22 PM	PH3 valve closed
2/17/2012	2:06:22 PM	SiCl4 pre valve closed
2/17/2012	2:06:22 PM	SiCl4 post valve closed
2/17/2012	2:06:22 PM	Bypass valve closed
2/17/2012	2:06:22 PM	Bubbler valve closed
2/17/2012	2:06:22 PM	Main Vac valve opened
2/17/2012	2:06:22 PM	Helium MFC set to  0.000000
2/17/2012	2:06:22 PM	H2 MFC set to  0.000000
2/17/2012	2:06:22 PM	BCl3 MFC set to  0.000000
2/17/2012	2:06:22 PM	PH3 MFC set to  0.000000
2/17/2012	2:06:22 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:06:22 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:06:22 PM	Tube furnace set to 0
2/17/2012	2:06:52 PM	H2 valve closed
2/17/2012	2:06:52 PM	BCl3 valve closed
2/17/2012	2:06:52 PM	PH3 valve closed
2/17/2012	2:06:52 PM	SiCl4 pre valve closed
2/17/2012	2:06:52 PM	SiCl4 post valve closed
2/17/2012	2:06:52 PM	Bypass valve closed
2/17/2012	2:06:52 PM	Bubbler valve closed
2/17/2012	2:06:53 PM	Helium valve opened
2/17/2012	2:06:53 PM	Main Vac valve opened
2/17/2012	2:06:53 PM	Helium MFC set to  20.000000
2/17/2012	2:06:53 PM	H2 MFC set to  0.000000
2/17/2012	2:06:53 PM	BCl3 MFC set to  0.000000
2/17/2012	2:06:53 PM	PH3 MFC set to  0.000000
2/17/2012	2:06:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:06:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:06:53 PM	Tube furnace set to 0
2/17/2012	2:07:23 PM	Helium valve closed
2/17/2012	2:07:23 PM	H2 valve closed
2/17/2012	2:07:23 PM	BCl3 valve closed
2/17/2012	2:07:23 PM	PH3 valve closed
2/17/2012	2:07:23 PM	SiCl4 pre valve closed
2/17/2012	2:07:23 PM	SiCl4 post valve closed
2/17/2012	2:07:23 PM	Bypass valve closed
2/17/2012	2:07:23 PM	Bubbler valve closed
2/17/2012	2:07:23 PM	Main Vac valve opened
2/17/2012	2:07:23 PM	Helium MFC set to  0.000000
2/17/2012	2:07:23 PM	H2 MFC set to  0.000000
2/17/2012	2:07:23 PM	BCl3 MFC set to  0.000000
2/17/2012	2:07:23 PM	PH3 MFC set to  0.000000
2/17/2012	2:07:23 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:07:23 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:07:23 PM	Tube furnace set to 0
2/17/2012	2:07:53 PM	H2 valve closed
2/17/2012	2:07:53 PM	BCl3 valve closed
2/17/2012	2:07:53 PM	PH3 valve closed
2/17/2012	2:07:53 PM	SiCl4 pre valve closed
2/17/2012	2:07:53 PM	SiCl4 post valve closed
2/17/2012	2:07:53 PM	Bypass valve closed
2/17/2012	2:07:53 PM	Bubbler valve closed
2/17/2012	2:07:53 PM	Helium valve opened
2/17/2012	2:07:53 PM	Main Vac valve opened
2/17/2012	2:07:53 PM	Helium MFC set to  20.000000
2/17/2012	2:07:53 PM	H2 MFC set to  0.000000
2/17/2012	2:07:53 PM	BCl3 MFC set to  0.000000
2/17/2012	2:07:53 PM	PH3 MFC set to  0.000000
2/17/2012	2:07:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:07:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:07:53 PM	Tube furnace set to 0
2/17/2012	2:08:23 PM	Helium valve closed
2/17/2012	2:08:23 PM	H2 valve closed
2/17/2012	2:08:23 PM	BCl3 valve closed
2/17/2012	2:08:23 PM	PH3 valve closed
2/17/2012	2:08:23 PM	SiCl4 pre valve closed
2/17/2012	2:08:23 PM	SiCl4 post valve closed
2/17/2012	2:08:23 PM	Bypass valve closed
2/17/2012	2:08:23 PM	Bubbler valve closed
2/17/2012	2:08:23 PM	Main Vac valve opened
2/17/2012	2:08:23 PM	Helium MFC set to  0.000000
2/17/2012	2:08:23 PM	H2 MFC set to  0.000000
2/17/2012	2:08:23 PM	BCl3 MFC set to  0.000000
2/17/2012	2:08:23 PM	PH3 MFC set to  0.000000
2/17/2012	2:08:23 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:08:23 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:08:23 PM	Tube furnace set to 0
2/17/2012	2:08:53 PM	H2 valve closed
2/17/2012	2:08:53 PM	BCl3 valve closed
2/17/2012	2:08:53 PM	PH3 valve closed
2/17/2012	2:08:53 PM	SiCl4 pre valve closed
2/17/2012	2:08:53 PM	SiCl4 post valve closed
2/17/2012	2:08:53 PM	Bypass valve closed
2/17/2012	2:08:53 PM	Bubbler valve closed
2/17/2012	2:08:53 PM	Helium valve opened
2/17/2012	2:08:53 PM	Main Vac valve opened
2/17/2012	2:08:53 PM	Helium MFC set to  20.000000
2/17/2012	2:08:53 PM	H2 MFC set to  0.000000
2/17/2012	2:08:53 PM	BCl3 MFC set to  0.000000
2/17/2012	2:08:53 PM	PH3 MFC set to  0.000000
2/17/2012	2:08:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:08:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:08:54 PM	Tube furnace set to 0
2/17/2012	2:09:24 PM	Helium valve closed
2/17/2012	2:09:24 PM	H2 valve closed
2/17/2012	2:09:24 PM	BCl3 valve closed
2/17/2012	2:09:24 PM	PH3 valve closed
2/17/2012	2:09:24 PM	SiCl4 pre valve closed
2/17/2012	2:09:24 PM	SiCl4 post valve closed
2/17/2012	2:09:24 PM	Bypass valve closed
2/17/2012	2:09:24 PM	Bubbler valve closed
2/17/2012	2:09:24 PM	Main Vac valve opened
2/17/2012	2:09:24 PM	Helium MFC set to  0.000000
2/17/2012	2:09:24 PM	H2 MFC set to  0.000000
2/17/2012	2:09:24 PM	BCl3 MFC set to  0.000000
2/17/2012	2:09:24 PM	PH3 MFC set to  0.000000
2/17/2012	2:09:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:09:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:09:24 PM	Tube furnace set to 0
2/17/2012	2:09:54 PM	H2 valve closed
2/17/2012	2:09:54 PM	BCl3 valve closed
2/17/2012	2:09:54 PM	PH3 valve closed
2/17/2012	2:09:54 PM	SiCl4 pre valve closed
2/17/2012	2:09:54 PM	SiCl4 post valve closed
2/17/2012	2:09:54 PM	Bypass valve closed
2/17/2012	2:09:54 PM	Bubbler valve closed
2/17/2012	2:09:54 PM	Helium valve opened
2/17/2012	2:09:54 PM	Main Vac valve opened
2/17/2012	2:09:54 PM	Helium MFC set to  20.000000
2/17/2012	2:09:54 PM	H2 MFC set to  0.000000
2/17/2012	2:09:54 PM	BCl3 MFC set to  0.000000
2/17/2012	2:09:54 PM	PH3 MFC set to  0.000000
2/17/2012	2:09:54 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:09:54 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:09:54 PM	Tube furnace set to 0
2/17/2012	2:10:24 PM	Helium valve closed
2/17/2012	2:10:24 PM	H2 valve closed
2/17/2012	2:10:24 PM	BCl3 valve closed
2/17/2012	2:10:24 PM	PH3 valve closed
2/17/2012	2:10:24 PM	SiCl4 pre valve closed
2/17/2012	2:10:24 PM	SiCl4 post valve closed
2/17/2012	2:10:24 PM	Bypass valve closed
2/17/2012	2:10:24 PM	Bubbler valve closed
2/17/2012	2:10:24 PM	Main Vac valve opened
2/17/2012	2:10:24 PM	Helium MFC set to  0.000000
2/17/2012	2:10:24 PM	H2 MFC set to  0.000000
2/17/2012	2:10:24 PM	BCl3 MFC set to  0.000000
2/17/2012	2:10:24 PM	PH3 MFC set to  0.000000
2/17/2012	2:10:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:10:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:10:24 PM	Tube furnace set to 0
2/17/2012	2:10:54 PM	H2 valve closed
2/17/2012	2:10:54 PM	BCl3 valve closed
2/17/2012	2:10:54 PM	PH3 valve closed
2/17/2012	2:10:54 PM	SiCl4 pre valve closed
2/17/2012	2:10:54 PM	SiCl4 post valve closed
2/17/2012	2:10:54 PM	Bypass valve closed
2/17/2012	2:10:54 PM	Bubbler valve closed
2/17/2012	2:10:54 PM	Helium valve opened
2/17/2012	2:10:54 PM	Main Vac valve opened
2/17/2012	2:10:54 PM	Helium MFC set to  20.000000
2/17/2012	2:10:54 PM	H2 MFC set to  0.000000
2/17/2012	2:10:54 PM	BCl3 MFC set to  0.000000
2/17/2012	2:10:54 PM	PH3 MFC set to  0.000000
2/17/2012	2:10:54 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:10:54 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:10:54 PM	Tube furnace set to 0
2/17/2012	2:11:24 PM	Helium valve closed
2/17/2012	2:11:24 PM	H2 valve closed
2/17/2012	2:11:24 PM	BCl3 valve closed
2/17/2012	2:11:24 PM	PH3 valve closed
2/17/2012	2:11:24 PM	SiCl4 pre valve closed
2/17/2012	2:11:24 PM	SiCl4 post valve closed
2/17/2012	2:11:24 PM	Bypass valve closed
2/17/2012	2:11:24 PM	Bubbler valve closed
2/17/2012	2:11:24 PM	Main Vac valve opened
2/17/2012	2:11:24 PM	Helium MFC set to  0.000000
2/17/2012	2:11:24 PM	H2 MFC set to  0.000000
2/17/2012	2:11:24 PM	BCl3 MFC set to  0.000000
2/17/2012	2:11:24 PM	PH3 MFC set to  0.000000
2/17/2012	2:11:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:11:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:11:25 PM	Tube furnace set to 0
2/17/2012	2:11:55 PM	H2 valve closed
2/17/2012	2:11:55 PM	BCl3 valve closed
2/17/2012	2:11:55 PM	PH3 valve closed
2/17/2012	2:11:55 PM	SiCl4 pre valve closed
2/17/2012	2:11:55 PM	SiCl4 post valve closed
2/17/2012	2:11:55 PM	Bypass valve closed
2/17/2012	2:11:55 PM	Bubbler valve closed
2/17/2012	2:11:55 PM	Helium valve opened
2/17/2012	2:11:55 PM	Main Vac valve opened
2/17/2012	2:11:55 PM	Helium MFC set to  20.000000
2/17/2012	2:11:55 PM	H2 MFC set to  0.000000
2/17/2012	2:11:55 PM	BCl3 MFC set to  0.000000
2/17/2012	2:11:55 PM	PH3 MFC set to  0.000000
2/17/2012	2:11:55 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:11:55 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:11:55 PM	Tube furnace set to 0
2/17/2012	2:12:25 PM	Helium valve closed
2/17/2012	2:12:25 PM	H2 valve closed
2/17/2012	2:12:25 PM	BCl3 valve closed
2/17/2012	2:12:25 PM	PH3 valve closed
2/17/2012	2:12:25 PM	SiCl4 pre valve closed
2/17/2012	2:12:25 PM	SiCl4 post valve closed
2/17/2012	2:12:25 PM	Bypass valve closed
2/17/2012	2:12:25 PM	Bubbler valve closed
2/17/2012	2:12:25 PM	Main Vac valve opened
2/17/2012	2:12:25 PM	Helium MFC set to  0.000000
2/17/2012	2:12:25 PM	H2 MFC set to  0.000000
2/17/2012	2:12:25 PM	BCl3 MFC set to  0.000000
2/17/2012	2:12:25 PM	PH3 MFC set to  0.000000
2/17/2012	2:12:25 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:12:25 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:12:25 PM	Tube furnace set to 0
2/17/2012	2:12:26 PM	Run finished at 2:12 PM
2/17/2012	2:12:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	2:29:28 PM	Main Vac valve closed
2/17/2012	2:29:51 PM	Main Vac valve opened
2/17/2012	2:30:47 PM	Recipe started at 2:30 PM
2/17/2012	2:30:47 PM	Helium valve closed
2/17/2012	2:30:47 PM	H2 valve closed
2/17/2012	2:30:47 PM	BCl3 valve closed
2/17/2012	2:30:47 PM	PH3 valve closed
2/17/2012	2:30:47 PM	SiCl4 pre valve closed
2/17/2012	2:30:47 PM	SiCl4 post valve closed
2/17/2012	2:30:47 PM	Main Vac valve closed
2/17/2012	2:30:47 PM	Bypass valve closed
2/17/2012	2:30:47 PM	Bubbler valve closed
2/17/2012	2:30:47 PM	Helium MFC set to  0.000000
2/17/2012	2:30:47 PM	H2 MFC set to  0.000000
2/17/2012	2:30:47 PM	BCl3 MFC set to  0.000000
2/17/2012	2:30:47 PM	PH3 MFC set to  0.000000
2/17/2012	2:30:47 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:30:47 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:30:47 PM	Tube furnace set to 0
2/17/2012	2:30:50 PM	Helium valve closed
2/17/2012	2:30:50 PM	BCl3 valve closed
2/17/2012	2:30:50 PM	PH3 valve closed
2/17/2012	2:30:50 PM	SiCl4 pre valve closed
2/17/2012	2:30:50 PM	SiCl4 post valve closed
2/17/2012	2:30:50 PM	Main Vac valve closed
2/17/2012	2:30:50 PM	Bypass valve closed
2/17/2012	2:30:50 PM	Bubbler valve closed
2/17/2012	2:30:50 PM	H2 valve opened
2/17/2012	2:30:50 PM	Helium MFC set to  0.000000
2/17/2012	2:30:50 PM	H2 MFC set to  500.000000
2/17/2012	2:30:50 PM	BCl3 MFC set to  0.000000
2/17/2012	2:30:50 PM	PH3 MFC set to  0.000000
2/17/2012	2:30:50 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:30:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:30:50 PM	Tube furnace set to 0
2/17/2012	2:31:55 PM	Helium valve closed
2/17/2012	2:31:55 PM	BCl3 valve closed
2/17/2012	2:31:55 PM	PH3 valve closed
2/17/2012	2:31:55 PM	SiCl4 pre valve closed
2/17/2012	2:31:55 PM	SiCl4 post valve closed
2/17/2012	2:31:55 PM	Main Vac valve closed
2/17/2012	2:31:55 PM	Bypass valve closed
2/17/2012	2:31:55 PM	H2 valve opened
2/17/2012	2:31:55 PM	Bubbler valve opened
2/17/2012	2:31:55 PM	Helium MFC set to  0.000000
2/17/2012	2:31:55 PM	H2 MFC set to  500.000000
2/17/2012	2:31:55 PM	BCl3 MFC set to  0.000000
2/17/2012	2:31:55 PM	PH3 MFC set to  0.000000
2/17/2012	2:31:55 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:31:55 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:31:55 PM	Tube furnace set to 0
2/17/2012	2:31:56 PM	Helium valve closed
2/17/2012	2:31:56 PM	BCl3 valve closed
2/17/2012	2:31:56 PM	PH3 valve closed
2/17/2012	2:31:56 PM	SiCl4 pre valve closed
2/17/2012	2:31:56 PM	SiCl4 post valve closed
2/17/2012	2:31:56 PM	Main Vac valve closed
2/17/2012	2:31:56 PM	Bypass valve closed
2/17/2012	2:31:56 PM	H2 valve opened
2/17/2012	2:31:56 PM	Bubbler valve opened
2/17/2012	2:31:56 PM	Helium MFC set to  0.000000
2/17/2012	2:31:56 PM	H2 MFC set to  500.000000
2/17/2012	2:31:56 PM	BCl3 MFC set to  0.000000
2/17/2012	2:31:56 PM	PH3 MFC set to  0.000000
2/17/2012	2:31:56 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:31:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:31:56 PM	Tube furnace set to 1000
2/17/2012	2:51:56 PM	Helium valve closed
2/17/2012	2:51:56 PM	BCl3 valve closed
2/17/2012	2:51:56 PM	Main Vac valve closed
2/17/2012	2:51:56 PM	Bypass valve closed
2/17/2012	2:51:56 PM	H2 valve opened
2/17/2012	2:51:56 PM	PH3 valve opened
2/17/2012	2:51:56 PM	SiCl4 pre valve opened
2/17/2012	2:51:56 PM	SiCl4 post valve opened
2/17/2012	2:51:56 PM	Bubbler valve opened
2/17/2012	2:51:56 PM	Helium MFC set to  0.000000
2/17/2012	2:51:56 PM	H2 MFC set to  500.000000
2/17/2012	2:51:56 PM	BCl3 MFC set to  0.000000
2/17/2012	2:51:56 PM	PH3 MFC set to  0.300000
2/17/2012	2:51:56 PM	SiCl4 MFC set to  25.000000
2/17/2012	2:51:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:51:57 PM	Tube furnace set to 1000
2/17/2012	2:58:57 PM	Helium valve closed
2/17/2012	2:58:57 PM	BCl3 valve closed
2/17/2012	2:58:57 PM	PH3 valve closed
2/17/2012	2:58:57 PM	SiCl4 pre valve closed
2/17/2012	2:58:57 PM	SiCl4 post valve closed
2/17/2012	2:58:57 PM	Main Vac valve closed
2/17/2012	2:58:57 PM	Bypass valve closed
2/17/2012	2:58:57 PM	H2 valve opened
2/17/2012	2:58:57 PM	Bubbler valve opened
2/17/2012	2:58:57 PM	Helium MFC set to  0.000000
2/17/2012	2:58:57 PM	H2 MFC set to  500.000000
2/17/2012	2:58:57 PM	BCl3 MFC set to  0.000000
2/17/2012	2:58:57 PM	PH3 MFC set to  0.000000
2/17/2012	2:58:57 PM	SiCl4 MFC set to  0.000000
2/17/2012	2:58:57 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	2:58:57 PM	Tube furnace set to 750
2/17/2012	3:03:57 PM	H2 valve closed
2/17/2012	3:03:57 PM	BCl3 valve closed
2/17/2012	3:03:57 PM	PH3 valve closed
2/17/2012	3:03:57 PM	SiCl4 pre valve closed
2/17/2012	3:03:57 PM	SiCl4 post valve closed
2/17/2012	3:03:57 PM	Main Vac valve closed
2/17/2012	3:03:57 PM	Bypass valve closed
2/17/2012	3:03:57 PM	Helium valve opened
2/17/2012	3:03:57 PM	Bubbler valve opened
2/17/2012	3:03:57 PM	Helium MFC set to  500.000000
2/17/2012	3:03:57 PM	H2 MFC set to  0.000000
2/17/2012	3:03:57 PM	BCl3 MFC set to  0.000000
2/17/2012	3:03:57 PM	PH3 MFC set to  0.000000
2/17/2012	3:03:57 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:03:57 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:03:57 PM	Tube furnace set to 0
2/17/2012	3:23:57 PM	Helium valve closed
2/17/2012	3:23:57 PM	H2 valve closed
2/17/2012	3:23:57 PM	BCl3 valve closed
2/17/2012	3:23:57 PM	PH3 valve closed
2/17/2012	3:23:57 PM	SiCl4 pre valve closed
2/17/2012	3:23:57 PM	SiCl4 post valve closed
2/17/2012	3:23:57 PM	Main Vac valve closed
2/17/2012	3:23:57 PM	Bypass valve closed
2/17/2012	3:23:57 PM	Bubbler valve closed
2/17/2012	3:23:57 PM	Helium MFC set to  0.000000
2/17/2012	3:23:57 PM	H2 MFC set to  0.000000
2/17/2012	3:23:57 PM	BCl3 MFC set to  0.000000
2/17/2012	3:23:57 PM	PH3 MFC set to  0.000000
2/17/2012	3:23:57 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:23:57 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:23:57 PM	Tube furnace set to 0
2/17/2012	3:23:58 PM	Run finished at 3:23 PM
2/17/2012	3:38:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	3:38:59 PM	Recipe started at 3:38 PM
2/17/2012	3:38:59 PM	Helium valve closed
2/17/2012	3:38:59 PM	H2 valve closed
2/17/2012	3:38:59 PM	BCl3 valve closed
2/17/2012	3:38:59 PM	PH3 valve closed
2/17/2012	3:38:59 PM	SiCl4 pre valve closed
2/17/2012	3:38:59 PM	SiCl4 post valve closed
2/17/2012	3:38:59 PM	Main Vac valve closed
2/17/2012	3:38:59 PM	Bypass valve closed
2/17/2012	3:38:59 PM	Bubbler valve closed
2/17/2012	3:38:59 PM	Helium MFC set to  0.000000
2/17/2012	3:38:59 PM	H2 MFC set to  0.000000
2/17/2012	3:38:59 PM	BCl3 MFC set to  0.000000
2/17/2012	3:38:59 PM	PH3 MFC set to  0.000000
2/17/2012	3:38:59 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:38:59 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:38:59 PM	Tube furnace set to 0
2/17/2012	3:39:02 PM	H2 valve closed
2/17/2012	3:39:02 PM	BCl3 valve closed
2/17/2012	3:39:02 PM	PH3 valve closed
2/17/2012	3:39:02 PM	SiCl4 pre valve closed
2/17/2012	3:39:02 PM	SiCl4 post valve closed
2/17/2012	3:39:02 PM	Main Vac valve closed
2/17/2012	3:39:02 PM	Bypass valve closed
2/17/2012	3:39:02 PM	Bubbler valve closed
2/17/2012	3:39:02 PM	Helium valve opened
2/17/2012	3:39:02 PM	Helium MFC set to  500.000000
2/17/2012	3:39:02 PM	H2 MFC set to  0.000000
2/17/2012	3:39:02 PM	BCl3 MFC set to  0.000000
2/17/2012	3:39:02 PM	PH3 MFC set to  0.000000
2/17/2012	3:39:02 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:39:02 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:39:02 PM	Tube furnace set to 0
2/17/2012	3:39:04 PM	Helium valve closed
2/17/2012	3:39:04 PM	H2 valve closed
2/17/2012	3:39:04 PM	BCl3 valve closed
2/17/2012	3:39:04 PM	PH3 valve closed
2/17/2012	3:39:04 PM	SiCl4 pre valve closed
2/17/2012	3:39:04 PM	SiCl4 post valve closed
2/17/2012	3:39:04 PM	Main Vac valve closed
2/17/2012	3:39:04 PM	Bypass valve closed
2/17/2012	3:39:04 PM	Bubbler valve closed
2/17/2012	3:39:04 PM	Helium MFC set to  0.000000
2/17/2012	3:39:04 PM	H2 MFC set to  0.000000
2/17/2012	3:39:04 PM	BCl3 MFC set to  0.000000
2/17/2012	3:39:04 PM	PH3 MFC set to  0.000000
2/17/2012	3:39:04 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:39:04 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:39:04 PM	Tube furnace set to 0
2/17/2012	3:39:05 PM	Run finished at 3:39 PM
2/17/2012	3:39:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	3:42:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	3:42:02 PM	Recipe started at 3:42 PM
2/17/2012	3:42:02 PM	Helium valve closed
2/17/2012	3:42:02 PM	H2 valve closed
2/17/2012	3:42:02 PM	BCl3 valve closed
2/17/2012	3:42:02 PM	PH3 valve closed
2/17/2012	3:42:02 PM	SiCl4 pre valve closed
2/17/2012	3:42:02 PM	SiCl4 post valve closed
2/17/2012	3:42:02 PM	Main Vac valve closed
2/17/2012	3:42:02 PM	Bubbler valve closed
2/17/2012	3:42:02 PM	Bypass valve opened
2/17/2012	3:42:02 PM	Helium MFC set to  0.000000
2/17/2012	3:42:02 PM	H2 MFC set to  0.000000
2/17/2012	3:42:02 PM	BCl3 MFC set to  0.000000
2/17/2012	3:42:02 PM	PH3 MFC set to  0.000000
2/17/2012	3:42:02 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:42:02 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:42:03 PM	Tube furnace set to 0
2/17/2012	3:43:02 PM	Helium valve closed
2/17/2012	3:43:02 PM	H2 valve closed
2/17/2012	3:43:02 PM	BCl3 valve closed
2/17/2012	3:43:02 PM	PH3 valve closed
2/17/2012	3:43:02 PM	SiCl4 pre valve closed
2/17/2012	3:43:02 PM	SiCl4 post valve closed
2/17/2012	3:43:02 PM	Main Vac valve closed
2/17/2012	3:43:02 PM	Bubbler valve closed
2/17/2012	3:43:02 PM	Bypass valve opened
2/17/2012	3:43:02 PM	Helium MFC set to  0.000000
2/17/2012	3:43:02 PM	H2 MFC set to  0.000000
2/17/2012	3:43:02 PM	BCl3 MFC set to  0.000000
2/17/2012	3:43:02 PM	PH3 MFC set to  0.000000
2/17/2012	3:43:02 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:43:02 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:43:02 PM	Tube furnace set to 0
2/17/2012	3:44:02 PM	Helium valve closed
2/17/2012	3:44:02 PM	H2 valve closed
2/17/2012	3:44:02 PM	BCl3 valve closed
2/17/2012	3:44:02 PM	PH3 valve closed
2/17/2012	3:44:02 PM	SiCl4 pre valve closed
2/17/2012	3:44:02 PM	SiCl4 post valve closed
2/17/2012	3:44:02 PM	Bypass valve closed
2/17/2012	3:44:02 PM	Bubbler valve closed
2/17/2012	3:44:02 PM	Main Vac valve opened
2/17/2012	3:44:02 PM	Helium MFC set to  0.000000
2/17/2012	3:44:02 PM	H2 MFC set to  0.000000
2/17/2012	3:44:02 PM	BCl3 MFC set to  0.000000
2/17/2012	3:44:02 PM	PH3 MFC set to  0.000000
2/17/2012	3:44:02 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:44:02 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:44:02 PM	Tube furnace set to 0
2/17/2012	3:44:03 PM	Run finished at 3:44 PM
2/17/2012	3:44:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	3:58:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	3:58:38 PM	Recipe started at 3:58 PM
2/17/2012	3:58:38 PM	Helium valve closed
2/17/2012	3:58:38 PM	H2 valve closed
2/17/2012	3:58:38 PM	BCl3 valve closed
2/17/2012	3:58:38 PM	PH3 valve closed
2/17/2012	3:58:38 PM	SiCl4 pre valve closed
2/17/2012	3:58:38 PM	SiCl4 post valve closed
2/17/2012	3:58:38 PM	Main Vac valve closed
2/17/2012	3:58:38 PM	Bubbler valve closed
2/17/2012	3:58:38 PM	Bypass valve opened
2/17/2012	3:58:38 PM	Helium MFC set to  0.000000
2/17/2012	3:58:38 PM	H2 MFC set to  0.000000
2/17/2012	3:58:38 PM	BCl3 MFC set to  0.000000
2/17/2012	3:58:38 PM	PH3 MFC set to  0.000000
2/17/2012	3:58:38 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:58:38 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:58:38 PM	Tube furnace set to 0
2/17/2012	3:58:38 PM	Helium valve closed
2/17/2012	3:58:38 PM	H2 valve closed
2/17/2012	3:58:38 PM	BCl3 valve closed
2/17/2012	3:58:38 PM	PH3 valve closed
2/17/2012	3:58:38 PM	SiCl4 pre valve closed
2/17/2012	3:58:38 PM	SiCl4 post valve closed
2/17/2012	3:58:38 PM	Main Vac valve closed
2/17/2012	3:58:38 PM	Bubbler valve closed
2/17/2012	3:58:38 PM	Bypass valve opened
2/17/2012	3:58:38 PM	Helium MFC set to  0.000000
2/17/2012	3:58:38 PM	H2 MFC set to  0.000000
2/17/2012	3:58:38 PM	BCl3 MFC set to  0.000000
2/17/2012	3:58:38 PM	PH3 MFC set to  0.000000
2/17/2012	3:58:38 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:58:38 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:58:38 PM	Tube furnace set to 0
2/17/2012	3:58:39 PM	Helium valve closed
2/17/2012	3:58:39 PM	H2 valve closed
2/17/2012	3:58:39 PM	BCl3 valve closed
2/17/2012	3:58:39 PM	PH3 valve closed
2/17/2012	3:58:39 PM	SiCl4 pre valve closed
2/17/2012	3:58:39 PM	SiCl4 post valve closed
2/17/2012	3:58:39 PM	Bypass valve closed
2/17/2012	3:58:39 PM	Bubbler valve closed
2/17/2012	3:58:39 PM	Main Vac valve opened
2/17/2012	3:58:39 PM	Helium MFC set to  0.000000
2/17/2012	3:58:39 PM	H2 MFC set to  0.000000
2/17/2012	3:58:39 PM	BCl3 MFC set to  0.000000
2/17/2012	3:58:39 PM	PH3 MFC set to  0.000000
2/17/2012	3:58:39 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:58:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:58:39 PM	Tube furnace set to 0
2/17/2012	3:59:09 PM	H2 valve closed
2/17/2012	3:59:09 PM	BCl3 valve closed
2/17/2012	3:59:09 PM	PH3 valve closed
2/17/2012	3:59:09 PM	SiCl4 pre valve closed
2/17/2012	3:59:09 PM	SiCl4 post valve closed
2/17/2012	3:59:09 PM	Bypass valve closed
2/17/2012	3:59:09 PM	Bubbler valve closed
2/17/2012	3:59:09 PM	Helium valve opened
2/17/2012	3:59:09 PM	Main Vac valve opened
2/17/2012	3:59:09 PM	Helium MFC set to  20.000000
2/17/2012	3:59:09 PM	H2 MFC set to  0.000000
2/17/2012	3:59:09 PM	BCl3 MFC set to  0.000000
2/17/2012	3:59:09 PM	PH3 MFC set to  0.000000
2/17/2012	3:59:09 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:59:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:59:09 PM	Tube furnace set to 0
2/17/2012	3:59:39 PM	Helium valve closed
2/17/2012	3:59:39 PM	H2 valve closed
2/17/2012	3:59:39 PM	BCl3 valve closed
2/17/2012	3:59:39 PM	PH3 valve closed
2/17/2012	3:59:39 PM	SiCl4 pre valve closed
2/17/2012	3:59:39 PM	SiCl4 post valve closed
2/17/2012	3:59:39 PM	Bypass valve closed
2/17/2012	3:59:39 PM	Bubbler valve closed
2/17/2012	3:59:39 PM	Main Vac valve opened
2/17/2012	3:59:39 PM	Helium MFC set to  0.000000
2/17/2012	3:59:39 PM	H2 MFC set to  0.000000
2/17/2012	3:59:39 PM	BCl3 MFC set to  0.000000
2/17/2012	3:59:39 PM	PH3 MFC set to  0.000000
2/17/2012	3:59:39 PM	SiCl4 MFC set to  0.000000
2/17/2012	3:59:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	3:59:39 PM	Tube furnace set to 0
2/17/2012	4:00:09 PM	H2 valve closed
2/17/2012	4:00:09 PM	BCl3 valve closed
2/17/2012	4:00:09 PM	PH3 valve closed
2/17/2012	4:00:09 PM	SiCl4 pre valve closed
2/17/2012	4:00:09 PM	SiCl4 post valve closed
2/17/2012	4:00:09 PM	Bypass valve closed
2/17/2012	4:00:09 PM	Bubbler valve closed
2/17/2012	4:00:09 PM	Helium valve opened
2/17/2012	4:00:09 PM	Main Vac valve opened
2/17/2012	4:00:09 PM	Helium MFC set to  20.000000
2/17/2012	4:00:09 PM	H2 MFC set to  0.000000
2/17/2012	4:00:09 PM	BCl3 MFC set to  0.000000
2/17/2012	4:00:09 PM	PH3 MFC set to  0.000000
2/17/2012	4:00:09 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:00:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:00:09 PM	Tube furnace set to 0
2/17/2012	4:00:39 PM	Helium valve closed
2/17/2012	4:00:39 PM	H2 valve closed
2/17/2012	4:00:39 PM	BCl3 valve closed
2/17/2012	4:00:39 PM	PH3 valve closed
2/17/2012	4:00:39 PM	SiCl4 pre valve closed
2/17/2012	4:00:39 PM	SiCl4 post valve closed
2/17/2012	4:00:39 PM	Bypass valve closed
2/17/2012	4:00:39 PM	Bubbler valve closed
2/17/2012	4:00:39 PM	Main Vac valve opened
2/17/2012	4:00:39 PM	Helium MFC set to  0.000000
2/17/2012	4:00:39 PM	H2 MFC set to  0.000000
2/17/2012	4:00:39 PM	BCl3 MFC set to  0.000000
2/17/2012	4:00:39 PM	PH3 MFC set to  0.000000
2/17/2012	4:00:39 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:00:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:00:40 PM	Tube furnace set to 0
2/17/2012	4:01:10 PM	H2 valve closed
2/17/2012	4:01:10 PM	BCl3 valve closed
2/17/2012	4:01:10 PM	PH3 valve closed
2/17/2012	4:01:10 PM	SiCl4 pre valve closed
2/17/2012	4:01:10 PM	SiCl4 post valve closed
2/17/2012	4:01:10 PM	Bypass valve closed
2/17/2012	4:01:10 PM	Bubbler valve closed
2/17/2012	4:01:10 PM	Helium valve opened
2/17/2012	4:01:10 PM	Main Vac valve opened
2/17/2012	4:01:10 PM	Helium MFC set to  20.000000
2/17/2012	4:01:10 PM	H2 MFC set to  0.000000
2/17/2012	4:01:10 PM	BCl3 MFC set to  0.000000
2/17/2012	4:01:10 PM	PH3 MFC set to  0.000000
2/17/2012	4:01:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:01:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:01:10 PM	Tube furnace set to 0
2/17/2012	4:01:40 PM	Helium valve closed
2/17/2012	4:01:40 PM	H2 valve closed
2/17/2012	4:01:40 PM	BCl3 valve closed
2/17/2012	4:01:40 PM	PH3 valve closed
2/17/2012	4:01:40 PM	SiCl4 pre valve closed
2/17/2012	4:01:40 PM	SiCl4 post valve closed
2/17/2012	4:01:40 PM	Bypass valve closed
2/17/2012	4:01:40 PM	Bubbler valve closed
2/17/2012	4:01:40 PM	Main Vac valve opened
2/17/2012	4:01:40 PM	Helium MFC set to  0.000000
2/17/2012	4:01:40 PM	H2 MFC set to  0.000000
2/17/2012	4:01:40 PM	BCl3 MFC set to  0.000000
2/17/2012	4:01:40 PM	PH3 MFC set to  0.000000
2/17/2012	4:01:40 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:01:40 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:01:40 PM	Tube furnace set to 0
2/17/2012	4:02:10 PM	H2 valve closed
2/17/2012	4:02:10 PM	BCl3 valve closed
2/17/2012	4:02:10 PM	PH3 valve closed
2/17/2012	4:02:10 PM	SiCl4 pre valve closed
2/17/2012	4:02:10 PM	SiCl4 post valve closed
2/17/2012	4:02:10 PM	Bypass valve closed
2/17/2012	4:02:10 PM	Bubbler valve closed
2/17/2012	4:02:10 PM	Helium valve opened
2/17/2012	4:02:10 PM	Main Vac valve opened
2/17/2012	4:02:10 PM	Helium MFC set to  20.000000
2/17/2012	4:02:10 PM	H2 MFC set to  0.000000
2/17/2012	4:02:10 PM	BCl3 MFC set to  0.000000
2/17/2012	4:02:10 PM	PH3 MFC set to  0.000000
2/17/2012	4:02:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:02:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:02:10 PM	Tube furnace set to 0
2/17/2012	4:02:40 PM	Helium valve closed
2/17/2012	4:02:40 PM	H2 valve closed
2/17/2012	4:02:40 PM	BCl3 valve closed
2/17/2012	4:02:40 PM	PH3 valve closed
2/17/2012	4:02:40 PM	SiCl4 pre valve closed
2/17/2012	4:02:40 PM	SiCl4 post valve closed
2/17/2012	4:02:40 PM	Bypass valve closed
2/17/2012	4:02:40 PM	Bubbler valve closed
2/17/2012	4:02:40 PM	Main Vac valve opened
2/17/2012	4:02:40 PM	Helium MFC set to  0.000000
2/17/2012	4:02:40 PM	H2 MFC set to  0.000000
2/17/2012	4:02:40 PM	BCl3 MFC set to  0.000000
2/17/2012	4:02:40 PM	PH3 MFC set to  0.000000
2/17/2012	4:02:40 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:02:40 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:02:40 PM	Tube furnace set to 0
2/17/2012	4:03:10 PM	H2 valve closed
2/17/2012	4:03:10 PM	BCl3 valve closed
2/17/2012	4:03:10 PM	PH3 valve closed
2/17/2012	4:03:10 PM	SiCl4 pre valve closed
2/17/2012	4:03:10 PM	SiCl4 post valve closed
2/17/2012	4:03:10 PM	Bypass valve closed
2/17/2012	4:03:10 PM	Bubbler valve closed
2/17/2012	4:03:10 PM	Helium valve opened
2/17/2012	4:03:10 PM	Main Vac valve opened
2/17/2012	4:03:10 PM	Helium MFC set to  20.000000
2/17/2012	4:03:10 PM	H2 MFC set to  0.000000
2/17/2012	4:03:10 PM	BCl3 MFC set to  0.000000
2/17/2012	4:03:10 PM	PH3 MFC set to  0.000000
2/17/2012	4:03:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:03:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:03:11 PM	Tube furnace set to 0
2/17/2012	4:03:41 PM	Helium valve closed
2/17/2012	4:03:41 PM	H2 valve closed
2/17/2012	4:03:41 PM	BCl3 valve closed
2/17/2012	4:03:41 PM	PH3 valve closed
2/17/2012	4:03:41 PM	SiCl4 pre valve closed
2/17/2012	4:03:41 PM	SiCl4 post valve closed
2/17/2012	4:03:41 PM	Bypass valve closed
2/17/2012	4:03:41 PM	Bubbler valve closed
2/17/2012	4:03:41 PM	Main Vac valve opened
2/17/2012	4:03:41 PM	Helium MFC set to  0.000000
2/17/2012	4:03:41 PM	H2 MFC set to  0.000000
2/17/2012	4:03:41 PM	BCl3 MFC set to  0.000000
2/17/2012	4:03:41 PM	PH3 MFC set to  0.000000
2/17/2012	4:03:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:03:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:03:41 PM	Tube furnace set to 0
2/17/2012	4:04:11 PM	H2 valve closed
2/17/2012	4:04:11 PM	BCl3 valve closed
2/17/2012	4:04:11 PM	PH3 valve closed
2/17/2012	4:04:11 PM	SiCl4 pre valve closed
2/17/2012	4:04:11 PM	SiCl4 post valve closed
2/17/2012	4:04:11 PM	Bypass valve closed
2/17/2012	4:04:11 PM	Bubbler valve closed
2/17/2012	4:04:11 PM	Helium valve opened
2/17/2012	4:04:11 PM	Main Vac valve opened
2/17/2012	4:04:11 PM	Helium MFC set to  20.000000
2/17/2012	4:04:11 PM	H2 MFC set to  0.000000
2/17/2012	4:04:11 PM	BCl3 MFC set to  0.000000
2/17/2012	4:04:11 PM	PH3 MFC set to  0.000000
2/17/2012	4:04:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:04:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:04:11 PM	Tube furnace set to 0
2/17/2012	4:04:41 PM	Helium valve closed
2/17/2012	4:04:41 PM	H2 valve closed
2/17/2012	4:04:41 PM	BCl3 valve closed
2/17/2012	4:04:41 PM	PH3 valve closed
2/17/2012	4:04:41 PM	SiCl4 pre valve closed
2/17/2012	4:04:41 PM	SiCl4 post valve closed
2/17/2012	4:04:41 PM	Bypass valve closed
2/17/2012	4:04:41 PM	Bubbler valve closed
2/17/2012	4:04:41 PM	Main Vac valve opened
2/17/2012	4:04:41 PM	Helium MFC set to  0.000000
2/17/2012	4:04:41 PM	H2 MFC set to  0.000000
2/17/2012	4:04:41 PM	BCl3 MFC set to  0.000000
2/17/2012	4:04:41 PM	PH3 MFC set to  0.000000
2/17/2012	4:04:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:04:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:04:41 PM	Tube furnace set to 0
2/17/2012	4:05:11 PM	H2 valve closed
2/17/2012	4:05:11 PM	BCl3 valve closed
2/17/2012	4:05:11 PM	PH3 valve closed
2/17/2012	4:05:11 PM	SiCl4 pre valve closed
2/17/2012	4:05:11 PM	SiCl4 post valve closed
2/17/2012	4:05:11 PM	Bypass valve closed
2/17/2012	4:05:11 PM	Bubbler valve closed
2/17/2012	4:05:11 PM	Helium valve opened
2/17/2012	4:05:11 PM	Main Vac valve opened
2/17/2012	4:05:11 PM	Helium MFC set to  20.000000
2/17/2012	4:05:11 PM	H2 MFC set to  0.000000
2/17/2012	4:05:11 PM	BCl3 MFC set to  0.000000
2/17/2012	4:05:11 PM	PH3 MFC set to  0.000000
2/17/2012	4:05:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:05:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:05:11 PM	Tube furnace set to 0
2/17/2012	4:05:41 PM	Helium valve closed
2/17/2012	4:05:41 PM	H2 valve closed
2/17/2012	4:05:41 PM	BCl3 valve closed
2/17/2012	4:05:41 PM	PH3 valve closed
2/17/2012	4:05:41 PM	SiCl4 pre valve closed
2/17/2012	4:05:41 PM	SiCl4 post valve closed
2/17/2012	4:05:41 PM	Bypass valve closed
2/17/2012	4:05:41 PM	Bubbler valve closed
2/17/2012	4:05:41 PM	Main Vac valve opened
2/17/2012	4:05:41 PM	Helium MFC set to  0.000000
2/17/2012	4:05:41 PM	H2 MFC set to  0.000000
2/17/2012	4:05:41 PM	BCl3 MFC set to  0.000000
2/17/2012	4:05:42 PM	PH3 MFC set to  0.000000
2/17/2012	4:05:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:05:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:05:42 PM	Tube furnace set to 0
2/17/2012	4:06:12 PM	H2 valve closed
2/17/2012	4:06:12 PM	BCl3 valve closed
2/17/2012	4:06:12 PM	PH3 valve closed
2/17/2012	4:06:12 PM	SiCl4 pre valve closed
2/17/2012	4:06:12 PM	SiCl4 post valve closed
2/17/2012	4:06:12 PM	Bypass valve closed
2/17/2012	4:06:12 PM	Bubbler valve closed
2/17/2012	4:06:12 PM	Helium valve opened
2/17/2012	4:06:12 PM	Main Vac valve opened
2/17/2012	4:06:12 PM	Helium MFC set to  20.000000
2/17/2012	4:06:12 PM	H2 MFC set to  0.000000
2/17/2012	4:06:12 PM	BCl3 MFC set to  0.000000
2/17/2012	4:06:12 PM	PH3 MFC set to  0.000000
2/17/2012	4:06:12 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:06:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:06:12 PM	Tube furnace set to 0
2/17/2012	4:06:42 PM	Helium valve closed
2/17/2012	4:06:42 PM	H2 valve closed
2/17/2012	4:06:42 PM	BCl3 valve closed
2/17/2012	4:06:42 PM	PH3 valve closed
2/17/2012	4:06:42 PM	SiCl4 pre valve closed
2/17/2012	4:06:42 PM	SiCl4 post valve closed
2/17/2012	4:06:42 PM	Bypass valve closed
2/17/2012	4:06:42 PM	Bubbler valve closed
2/17/2012	4:06:42 PM	Main Vac valve opened
2/17/2012	4:06:42 PM	Helium MFC set to  0.000000
2/17/2012	4:06:42 PM	H2 MFC set to  0.000000
2/17/2012	4:06:42 PM	BCl3 MFC set to  0.000000
2/17/2012	4:06:42 PM	PH3 MFC set to  0.000000
2/17/2012	4:06:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:06:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:06:42 PM	Tube furnace set to 0
2/17/2012	4:07:12 PM	H2 valve closed
2/17/2012	4:07:12 PM	BCl3 valve closed
2/17/2012	4:07:12 PM	PH3 valve closed
2/17/2012	4:07:12 PM	SiCl4 pre valve closed
2/17/2012	4:07:12 PM	SiCl4 post valve closed
2/17/2012	4:07:12 PM	Bypass valve closed
2/17/2012	4:07:12 PM	Bubbler valve closed
2/17/2012	4:07:12 PM	Helium valve opened
2/17/2012	4:07:12 PM	Main Vac valve opened
2/17/2012	4:07:12 PM	Helium MFC set to  20.000000
2/17/2012	4:07:12 PM	H2 MFC set to  0.000000
2/17/2012	4:07:12 PM	BCl3 MFC set to  0.000000
2/17/2012	4:07:12 PM	PH3 MFC set to  0.000000
2/17/2012	4:07:12 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:07:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:07:12 PM	Tube furnace set to 0
2/17/2012	4:07:42 PM	Helium valve closed
2/17/2012	4:07:42 PM	H2 valve closed
2/17/2012	4:07:42 PM	BCl3 valve closed
2/17/2012	4:07:42 PM	PH3 valve closed
2/17/2012	4:07:42 PM	SiCl4 pre valve closed
2/17/2012	4:07:42 PM	SiCl4 post valve closed
2/17/2012	4:07:42 PM	Bypass valve closed
2/17/2012	4:07:42 PM	Bubbler valve closed
2/17/2012	4:07:42 PM	Main Vac valve opened
2/17/2012	4:07:42 PM	Helium MFC set to  0.000000
2/17/2012	4:07:42 PM	H2 MFC set to  0.000000
2/17/2012	4:07:42 PM	BCl3 MFC set to  0.000000
2/17/2012	4:07:42 PM	PH3 MFC set to  0.000000
2/17/2012	4:07:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:07:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:07:43 PM	Tube furnace set to 0
2/17/2012	4:08:13 PM	H2 valve closed
2/17/2012	4:08:13 PM	BCl3 valve closed
2/17/2012	4:08:13 PM	PH3 valve closed
2/17/2012	4:08:13 PM	SiCl4 pre valve closed
2/17/2012	4:08:13 PM	SiCl4 post valve closed
2/17/2012	4:08:13 PM	Bypass valve closed
2/17/2012	4:08:13 PM	Bubbler valve closed
2/17/2012	4:08:13 PM	Helium valve opened
2/17/2012	4:08:13 PM	Main Vac valve opened
2/17/2012	4:08:13 PM	Helium MFC set to  20.000000
2/17/2012	4:08:13 PM	H2 MFC set to  0.000000
2/17/2012	4:08:13 PM	BCl3 MFC set to  0.000000
2/17/2012	4:08:13 PM	PH3 MFC set to  0.000000
2/17/2012	4:08:13 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:08:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:08:13 PM	Tube furnace set to 0
2/17/2012	4:08:43 PM	Helium valve closed
2/17/2012	4:08:43 PM	H2 valve closed
2/17/2012	4:08:43 PM	BCl3 valve closed
2/17/2012	4:08:43 PM	PH3 valve closed
2/17/2012	4:08:43 PM	SiCl4 pre valve closed
2/17/2012	4:08:43 PM	SiCl4 post valve closed
2/17/2012	4:08:43 PM	Bypass valve closed
2/17/2012	4:08:43 PM	Bubbler valve closed
2/17/2012	4:08:43 PM	Main Vac valve opened
2/17/2012	4:08:43 PM	Helium MFC set to  0.000000
2/17/2012	4:08:43 PM	H2 MFC set to  0.000000
2/17/2012	4:08:43 PM	BCl3 MFC set to  0.000000
2/17/2012	4:08:43 PM	PH3 MFC set to  0.000000
2/17/2012	4:08:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:08:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:08:43 PM	Tube furnace set to 0
2/17/2012	4:08:44 PM	Run finished at 4:08 PM
2/17/2012	4:08:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	4:12:18 PM	Main Vac valve closed
2/17/2012	4:12:38 PM	Main Vac valve opened
2/17/2012	4:13:50 PM	Recipe started at 4:13 PM
2/17/2012	4:13:50 PM	Helium valve closed
2/17/2012	4:13:50 PM	H2 valve closed
2/17/2012	4:13:50 PM	BCl3 valve closed
2/17/2012	4:13:50 PM	PH3 valve closed
2/17/2012	4:13:50 PM	SiCl4 pre valve closed
2/17/2012	4:13:50 PM	SiCl4 post valve closed
2/17/2012	4:13:50 PM	Main Vac valve closed
2/17/2012	4:13:50 PM	Bypass valve closed
2/17/2012	4:13:50 PM	Bubbler valve closed
2/17/2012	4:13:50 PM	Helium MFC set to  0.000000
2/17/2012	4:13:50 PM	H2 MFC set to  0.000000
2/17/2012	4:13:50 PM	BCl3 MFC set to  0.000000
2/17/2012	4:13:50 PM	PH3 MFC set to  0.000000
2/17/2012	4:13:50 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:13:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:13:50 PM	Tube furnace set to 0
2/17/2012	4:13:53 PM	Helium valve closed
2/17/2012	4:13:53 PM	BCl3 valve closed
2/17/2012	4:13:53 PM	PH3 valve closed
2/17/2012	4:13:53 PM	SiCl4 pre valve closed
2/17/2012	4:13:53 PM	SiCl4 post valve closed
2/17/2012	4:13:53 PM	Main Vac valve closed
2/17/2012	4:13:53 PM	Bypass valve closed
2/17/2012	4:13:53 PM	Bubbler valve closed
2/17/2012	4:13:53 PM	H2 valve opened
2/17/2012	4:13:53 PM	Helium MFC set to  0.000000
2/17/2012	4:13:53 PM	H2 MFC set to  500.000000
2/17/2012	4:13:53 PM	BCl3 MFC set to  0.000000
2/17/2012	4:13:53 PM	PH3 MFC set to  0.000000
2/17/2012	4:13:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:13:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:13:53 PM	Tube furnace set to 0
2/17/2012	4:14:58 PM	Helium valve closed
2/17/2012	4:14:58 PM	BCl3 valve closed
2/17/2012	4:14:58 PM	PH3 valve closed
2/17/2012	4:14:58 PM	SiCl4 pre valve closed
2/17/2012	4:14:58 PM	SiCl4 post valve closed
2/17/2012	4:14:58 PM	Main Vac valve closed
2/17/2012	4:14:58 PM	Bypass valve closed
2/17/2012	4:14:58 PM	H2 valve opened
2/17/2012	4:14:58 PM	Bubbler valve opened
2/17/2012	4:14:58 PM	Helium MFC set to  0.000000
2/17/2012	4:14:58 PM	H2 MFC set to  500.000000
2/17/2012	4:14:58 PM	BCl3 MFC set to  0.000000
2/17/2012	4:14:58 PM	PH3 MFC set to  0.000000
2/17/2012	4:14:58 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:14:58 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:14:59 PM	Tube furnace set to 0
2/17/2012	4:15:00 PM	Helium valve closed
2/17/2012	4:15:00 PM	BCl3 valve closed
2/17/2012	4:15:00 PM	PH3 valve closed
2/17/2012	4:15:00 PM	SiCl4 pre valve closed
2/17/2012	4:15:00 PM	SiCl4 post valve closed
2/17/2012	4:15:00 PM	Main Vac valve closed
2/17/2012	4:15:00 PM	Bypass valve closed
2/17/2012	4:15:00 PM	H2 valve opened
2/17/2012	4:15:00 PM	Bubbler valve opened
2/17/2012	4:15:00 PM	Helium MFC set to  0.000000
2/17/2012	4:15:00 PM	H2 MFC set to  500.000000
2/17/2012	4:15:00 PM	BCl3 MFC set to  0.000000
2/17/2012	4:15:00 PM	PH3 MFC set to  0.000000
2/17/2012	4:15:00 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:15:00 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:15:00 PM	Tube furnace set to 1000
2/17/2012	4:35:00 PM	Helium valve closed
2/17/2012	4:35:00 PM	BCl3 valve closed
2/17/2012	4:35:00 PM	Main Vac valve closed
2/17/2012	4:35:00 PM	Bypass valve closed
2/17/2012	4:35:00 PM	H2 valve opened
2/17/2012	4:35:00 PM	PH3 valve opened
2/17/2012	4:35:00 PM	SiCl4 pre valve opened
2/17/2012	4:35:00 PM	SiCl4 post valve opened
2/17/2012	4:35:00 PM	Bubbler valve opened
2/17/2012	4:35:00 PM	Helium MFC set to  0.000000
2/17/2012	4:35:00 PM	H2 MFC set to  500.000000
2/17/2012	4:35:00 PM	BCl3 MFC set to  0.000000
2/17/2012	4:35:00 PM	PH3 MFC set to  0.300000
2/17/2012	4:35:00 PM	SiCl4 MFC set to  25.000000
2/17/2012	4:35:00 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:35:00 PM	Tube furnace set to 1000
2/17/2012	4:44:00 PM	Helium valve closed
2/17/2012	4:44:00 PM	BCl3 valve closed
2/17/2012	4:44:00 PM	PH3 valve closed
2/17/2012	4:44:00 PM	SiCl4 pre valve closed
2/17/2012	4:44:00 PM	SiCl4 post valve closed
2/17/2012	4:44:00 PM	Main Vac valve closed
2/17/2012	4:44:00 PM	Bypass valve closed
2/17/2012	4:44:00 PM	H2 valve opened
2/17/2012	4:44:00 PM	Bubbler valve opened
2/17/2012	4:44:00 PM	Helium MFC set to  0.000000
2/17/2012	4:44:00 PM	H2 MFC set to  500.000000
2/17/2012	4:44:00 PM	BCl3 MFC set to  0.000000
2/17/2012	4:44:00 PM	PH3 MFC set to  0.000000
2/17/2012	4:44:00 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:44:00 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:44:00 PM	Tube furnace set to 750
2/17/2012	4:49:00 PM	H2 valve closed
2/17/2012	4:49:00 PM	BCl3 valve closed
2/17/2012	4:49:00 PM	PH3 valve closed
2/17/2012	4:49:00 PM	SiCl4 pre valve closed
2/17/2012	4:49:00 PM	SiCl4 post valve closed
2/17/2012	4:49:00 PM	Main Vac valve closed
2/17/2012	4:49:00 PM	Bypass valve closed
2/17/2012	4:49:00 PM	Helium valve opened
2/17/2012	4:49:00 PM	Bubbler valve opened
2/17/2012	4:49:00 PM	Helium MFC set to  500.000000
2/17/2012	4:49:00 PM	H2 MFC set to  0.000000
2/17/2012	4:49:00 PM	BCl3 MFC set to  0.000000
2/17/2012	4:49:00 PM	PH3 MFC set to  0.000000
2/17/2012	4:49:00 PM	SiCl4 MFC set to  0.000000
2/17/2012	4:49:00 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	4:49:00 PM	Tube furnace set to 0
2/17/2012	5:09:00 PM	Helium valve closed
2/17/2012	5:09:00 PM	H2 valve closed
2/17/2012	5:09:00 PM	BCl3 valve closed
2/17/2012	5:09:00 PM	PH3 valve closed
2/17/2012	5:09:00 PM	SiCl4 pre valve closed
2/17/2012	5:09:00 PM	SiCl4 post valve closed
2/17/2012	5:09:00 PM	Main Vac valve closed
2/17/2012	5:09:00 PM	Bypass valve closed
2/17/2012	5:09:00 PM	Bubbler valve closed
2/17/2012	5:09:00 PM	Helium MFC set to  0.000000
2/17/2012	5:09:00 PM	H2 MFC set to  0.000000
2/17/2012	5:09:00 PM	BCl3 MFC set to  0.000000
2/17/2012	5:09:00 PM	PH3 MFC set to  0.000000
2/17/2012	5:09:00 PM	SiCl4 MFC set to  0.000000
2/17/2012	5:09:00 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	5:09:01 PM	Tube furnace set to 0
2/17/2012	5:09:02 PM	Run finished at 5:09 PM
2/17/2012	6:18:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	6:18:42 PM	Recipe started at 6:18 PM
2/17/2012	6:18:42 PM	Helium valve closed
2/17/2012	6:18:42 PM	H2 valve closed
2/17/2012	6:18:42 PM	BCl3 valve closed
2/17/2012	6:18:42 PM	PH3 valve closed
2/17/2012	6:18:42 PM	SiCl4 pre valve closed
2/17/2012	6:18:42 PM	SiCl4 post valve closed
2/17/2012	6:18:42 PM	Main Vac valve closed
2/17/2012	6:18:42 PM	Bypass valve closed
2/17/2012	6:18:42 PM	Bubbler valve closed
2/17/2012	6:18:42 PM	Helium MFC set to  0.000000
2/17/2012	6:18:42 PM	H2 MFC set to  0.000000
2/17/2012	6:18:42 PM	BCl3 MFC set to  0.000000
2/17/2012	6:18:42 PM	PH3 MFC set to  0.000000
2/17/2012	6:18:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:18:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:18:42 PM	Tube furnace set to 0
2/17/2012	6:18:45 PM	H2 valve closed
2/17/2012	6:18:45 PM	BCl3 valve closed
2/17/2012	6:18:45 PM	PH3 valve closed
2/17/2012	6:18:45 PM	SiCl4 pre valve closed
2/17/2012	6:18:45 PM	SiCl4 post valve closed
2/17/2012	6:18:45 PM	Main Vac valve closed
2/17/2012	6:18:45 PM	Bypass valve closed
2/17/2012	6:18:45 PM	Bubbler valve closed
2/17/2012	6:18:45 PM	Helium valve opened
2/17/2012	6:18:45 PM	Helium MFC set to  500.000000
2/17/2012	6:18:45 PM	H2 MFC set to  0.000000
2/17/2012	6:18:45 PM	BCl3 MFC set to  0.000000
2/17/2012	6:18:45 PM	PH3 MFC set to  0.000000
2/17/2012	6:18:45 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:18:45 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:18:46 PM	Tube furnace set to 0
2/17/2012	6:18:47 PM	Helium valve closed
2/17/2012	6:18:47 PM	H2 valve closed
2/17/2012	6:18:47 PM	BCl3 valve closed
2/17/2012	6:18:47 PM	PH3 valve closed
2/17/2012	6:18:47 PM	SiCl4 pre valve closed
2/17/2012	6:18:47 PM	SiCl4 post valve closed
2/17/2012	6:18:47 PM	Main Vac valve closed
2/17/2012	6:18:47 PM	Bypass valve closed
2/17/2012	6:18:47 PM	Bubbler valve closed
2/17/2012	6:18:47 PM	Helium MFC set to  0.000000
2/17/2012	6:18:47 PM	H2 MFC set to  0.000000
2/17/2012	6:18:47 PM	BCl3 MFC set to  0.000000
2/17/2012	6:18:47 PM	PH3 MFC set to  0.000000
2/17/2012	6:18:47 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:18:47 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:18:47 PM	Tube furnace set to 0
2/17/2012	6:18:48 PM	Run finished at 6:18 PM
2/17/2012	6:18:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2012	6:21:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	6:21:07 PM	Recipe started at 6:21 PM
2/17/2012	6:21:07 PM	Helium valve closed
2/17/2012	6:21:07 PM	H2 valve closed
2/17/2012	6:21:07 PM	BCl3 valve closed
2/17/2012	6:21:07 PM	PH3 valve closed
2/17/2012	6:21:07 PM	SiCl4 pre valve closed
2/17/2012	6:21:07 PM	SiCl4 post valve closed
2/17/2012	6:21:07 PM	Main Vac valve closed
2/17/2012	6:21:07 PM	Bubbler valve closed
2/17/2012	6:21:07 PM	Bypass valve opened
2/17/2012	6:21:07 PM	Helium MFC set to  0.000000
2/17/2012	6:21:07 PM	H2 MFC set to  0.000000
2/17/2012	6:21:07 PM	BCl3 MFC set to  0.000000
2/17/2012	6:21:07 PM	PH3 MFC set to  0.000000
2/17/2012	6:21:07 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:21:07 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:21:08 PM	Tube furnace set to 0
2/17/2012	6:22:08 PM	Helium valve closed
2/17/2012	6:22:08 PM	H2 valve closed
2/17/2012	6:22:08 PM	BCl3 valve closed
2/17/2012	6:22:08 PM	PH3 valve closed
2/17/2012	6:22:08 PM	SiCl4 pre valve closed
2/17/2012	6:22:08 PM	SiCl4 post valve closed
2/17/2012	6:22:08 PM	Main Vac valve closed
2/17/2012	6:22:08 PM	Bubbler valve closed
2/17/2012	6:22:08 PM	Bypass valve opened
2/17/2012	6:22:08 PM	Helium MFC set to  0.000000
2/17/2012	6:22:08 PM	H2 MFC set to  0.000000
2/17/2012	6:22:08 PM	BCl3 MFC set to  0.000000
2/17/2012	6:22:08 PM	PH3 MFC set to  0.000000
2/17/2012	6:22:08 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:22:08 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:22:08 PM	Tube furnace set to 0
2/17/2012	6:23:08 PM	Helium valve closed
2/17/2012	6:23:08 PM	H2 valve closed
2/17/2012	6:23:08 PM	BCl3 valve closed
2/17/2012	6:23:08 PM	PH3 valve closed
2/17/2012	6:23:08 PM	SiCl4 pre valve closed
2/17/2012	6:23:08 PM	SiCl4 post valve closed
2/17/2012	6:23:08 PM	Bypass valve closed
2/17/2012	6:23:08 PM	Bubbler valve closed
2/17/2012	6:23:08 PM	Main Vac valve opened
2/17/2012	6:23:08 PM	Helium MFC set to  0.000000
2/17/2012	6:23:08 PM	H2 MFC set to  0.000000
2/17/2012	6:23:08 PM	BCl3 MFC set to  0.000000
2/17/2012	6:23:08 PM	PH3 MFC set to  0.000000
2/17/2012	6:23:08 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:23:08 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:23:08 PM	Tube furnace set to 0
2/17/2012	6:23:09 PM	Run finished at 6:23 PM
2/17/2012	6:23:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	6:38:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	6:38:51 PM	Recipe started at 6:38 PM
2/17/2012	6:38:51 PM	Helium valve closed
2/17/2012	6:38:51 PM	H2 valve closed
2/17/2012	6:38:51 PM	BCl3 valve closed
2/17/2012	6:38:51 PM	PH3 valve closed
2/17/2012	6:38:51 PM	SiCl4 pre valve closed
2/17/2012	6:38:51 PM	SiCl4 post valve closed
2/17/2012	6:38:51 PM	Main Vac valve closed
2/17/2012	6:38:51 PM	Bubbler valve closed
2/17/2012	6:38:51 PM	Bypass valve opened
2/17/2012	6:38:52 PM	Helium MFC set to  0.000000
2/17/2012	6:38:52 PM	H2 MFC set to  0.000000
2/17/2012	6:38:52 PM	BCl3 MFC set to  0.000000
2/17/2012	6:38:52 PM	PH3 MFC set to  0.000000
2/17/2012	6:38:52 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:38:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:38:52 PM	Tube furnace set to 0
2/17/2012	6:38:52 PM	Helium valve closed
2/17/2012	6:38:52 PM	H2 valve closed
2/17/2012	6:38:52 PM	BCl3 valve closed
2/17/2012	6:38:52 PM	PH3 valve closed
2/17/2012	6:38:52 PM	SiCl4 pre valve closed
2/17/2012	6:38:52 PM	SiCl4 post valve closed
2/17/2012	6:38:52 PM	Main Vac valve closed
2/17/2012	6:38:52 PM	Bubbler valve closed
2/17/2012	6:38:52 PM	Bypass valve opened
2/17/2012	6:38:52 PM	Helium MFC set to  0.000000
2/17/2012	6:38:52 PM	H2 MFC set to  0.000000
2/17/2012	6:38:52 PM	BCl3 MFC set to  0.000000
2/17/2012	6:38:52 PM	PH3 MFC set to  0.000000
2/17/2012	6:38:52 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:38:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:38:52 PM	Tube furnace set to 0
2/17/2012	6:38:52 PM	Helium valve closed
2/17/2012	6:38:52 PM	H2 valve closed
2/17/2012	6:38:52 PM	BCl3 valve closed
2/17/2012	6:38:52 PM	PH3 valve closed
2/17/2012	6:38:52 PM	SiCl4 pre valve closed
2/17/2012	6:38:52 PM	SiCl4 post valve closed
2/17/2012	6:38:52 PM	Bypass valve closed
2/17/2012	6:38:52 PM	Bubbler valve closed
2/17/2012	6:38:52 PM	Main Vac valve opened
2/17/2012	6:38:52 PM	Helium MFC set to  0.000000
2/17/2012	6:38:52 PM	H2 MFC set to  0.000000
2/17/2012	6:38:52 PM	BCl3 MFC set to  0.000000
2/17/2012	6:38:52 PM	PH3 MFC set to  0.000000
2/17/2012	6:38:52 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:38:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:38:53 PM	Tube furnace set to 0
2/17/2012	6:39:23 PM	H2 valve closed
2/17/2012	6:39:23 PM	BCl3 valve closed
2/17/2012	6:39:23 PM	PH3 valve closed
2/17/2012	6:39:23 PM	SiCl4 pre valve closed
2/17/2012	6:39:23 PM	SiCl4 post valve closed
2/17/2012	6:39:23 PM	Bypass valve closed
2/17/2012	6:39:23 PM	Bubbler valve closed
2/17/2012	6:39:23 PM	Helium valve opened
2/17/2012	6:39:23 PM	Main Vac valve opened
2/17/2012	6:39:23 PM	Helium MFC set to  20.000000
2/17/2012	6:39:23 PM	H2 MFC set to  0.000000
2/17/2012	6:39:23 PM	BCl3 MFC set to  0.000000
2/17/2012	6:39:23 PM	PH3 MFC set to  0.000000
2/17/2012	6:39:23 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:39:23 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:39:23 PM	Tube furnace set to 0
2/17/2012	6:39:53 PM	Helium valve closed
2/17/2012	6:39:53 PM	H2 valve closed
2/17/2012	6:39:53 PM	BCl3 valve closed
2/17/2012	6:39:53 PM	PH3 valve closed
2/17/2012	6:39:53 PM	SiCl4 pre valve closed
2/17/2012	6:39:53 PM	SiCl4 post valve closed
2/17/2012	6:39:53 PM	Bypass valve closed
2/17/2012	6:39:53 PM	Bubbler valve closed
2/17/2012	6:39:53 PM	Main Vac valve opened
2/17/2012	6:39:53 PM	Helium MFC set to  0.000000
2/17/2012	6:39:53 PM	H2 MFC set to  0.000000
2/17/2012	6:39:53 PM	BCl3 MFC set to  0.000000
2/17/2012	6:39:53 PM	PH3 MFC set to  0.000000
2/17/2012	6:39:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:39:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:39:53 PM	Tube furnace set to 0
2/17/2012	6:40:23 PM	H2 valve closed
2/17/2012	6:40:23 PM	BCl3 valve closed
2/17/2012	6:40:23 PM	PH3 valve closed
2/17/2012	6:40:23 PM	SiCl4 pre valve closed
2/17/2012	6:40:23 PM	SiCl4 post valve closed
2/17/2012	6:40:23 PM	Bypass valve closed
2/17/2012	6:40:23 PM	Bubbler valve closed
2/17/2012	6:40:23 PM	Helium valve opened
2/17/2012	6:40:23 PM	Main Vac valve opened
2/17/2012	6:40:23 PM	Helium MFC set to  20.000000
2/17/2012	6:40:23 PM	H2 MFC set to  0.000000
2/17/2012	6:40:23 PM	BCl3 MFC set to  0.000000
2/17/2012	6:40:23 PM	PH3 MFC set to  0.000000
2/17/2012	6:40:23 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:40:23 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:40:23 PM	Tube furnace set to 0
2/17/2012	6:40:53 PM	Helium valve closed
2/17/2012	6:40:53 PM	H2 valve closed
2/17/2012	6:40:53 PM	BCl3 valve closed
2/17/2012	6:40:53 PM	PH3 valve closed
2/17/2012	6:40:53 PM	SiCl4 pre valve closed
2/17/2012	6:40:53 PM	SiCl4 post valve closed
2/17/2012	6:40:53 PM	Bypass valve closed
2/17/2012	6:40:53 PM	Bubbler valve closed
2/17/2012	6:40:53 PM	Main Vac valve opened
2/17/2012	6:40:53 PM	Helium MFC set to  0.000000
2/17/2012	6:40:53 PM	H2 MFC set to  0.000000
2/17/2012	6:40:53 PM	BCl3 MFC set to  0.000000
2/17/2012	6:40:53 PM	PH3 MFC set to  0.000000
2/17/2012	6:40:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:40:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:40:53 PM	Tube furnace set to 0
2/17/2012	6:41:23 PM	H2 valve closed
2/17/2012	6:41:23 PM	BCl3 valve closed
2/17/2012	6:41:23 PM	PH3 valve closed
2/17/2012	6:41:23 PM	SiCl4 pre valve closed
2/17/2012	6:41:23 PM	SiCl4 post valve closed
2/17/2012	6:41:23 PM	Bypass valve closed
2/17/2012	6:41:23 PM	Bubbler valve closed
2/17/2012	6:41:23 PM	Helium valve opened
2/17/2012	6:41:23 PM	Main Vac valve opened
2/17/2012	6:41:23 PM	Helium MFC set to  20.000000
2/17/2012	6:41:23 PM	H2 MFC set to  0.000000
2/17/2012	6:41:23 PM	BCl3 MFC set to  0.000000
2/17/2012	6:41:23 PM	PH3 MFC set to  0.000000
2/17/2012	6:41:23 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:41:23 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:41:24 PM	Tube furnace set to 0
2/17/2012	6:41:54 PM	Helium valve closed
2/17/2012	6:41:54 PM	H2 valve closed
2/17/2012	6:41:54 PM	BCl3 valve closed
2/17/2012	6:41:54 PM	PH3 valve closed
2/17/2012	6:41:54 PM	SiCl4 pre valve closed
2/17/2012	6:41:54 PM	SiCl4 post valve closed
2/17/2012	6:41:54 PM	Bypass valve closed
2/17/2012	6:41:54 PM	Bubbler valve closed
2/17/2012	6:41:54 PM	Main Vac valve opened
2/17/2012	6:41:54 PM	Helium MFC set to  0.000000
2/17/2012	6:41:54 PM	H2 MFC set to  0.000000
2/17/2012	6:41:54 PM	BCl3 MFC set to  0.000000
2/17/2012	6:41:54 PM	PH3 MFC set to  0.000000
2/17/2012	6:41:54 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:41:54 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:41:54 PM	Tube furnace set to 0
2/17/2012	6:42:24 PM	H2 valve closed
2/17/2012	6:42:24 PM	BCl3 valve closed
2/17/2012	6:42:24 PM	PH3 valve closed
2/17/2012	6:42:24 PM	SiCl4 pre valve closed
2/17/2012	6:42:24 PM	SiCl4 post valve closed
2/17/2012	6:42:24 PM	Bypass valve closed
2/17/2012	6:42:24 PM	Bubbler valve closed
2/17/2012	6:42:24 PM	Helium valve opened
2/17/2012	6:42:24 PM	Main Vac valve opened
2/17/2012	6:42:24 PM	Helium MFC set to  20.000000
2/17/2012	6:42:24 PM	H2 MFC set to  0.000000
2/17/2012	6:42:24 PM	BCl3 MFC set to  0.000000
2/17/2012	6:42:24 PM	PH3 MFC set to  0.000000
2/17/2012	6:42:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:42:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:42:24 PM	Tube furnace set to 0
2/17/2012	6:42:54 PM	Helium valve closed
2/17/2012	6:42:54 PM	H2 valve closed
2/17/2012	6:42:54 PM	BCl3 valve closed
2/17/2012	6:42:54 PM	PH3 valve closed
2/17/2012	6:42:54 PM	SiCl4 pre valve closed
2/17/2012	6:42:54 PM	SiCl4 post valve closed
2/17/2012	6:42:54 PM	Bypass valve closed
2/17/2012	6:42:54 PM	Bubbler valve closed
2/17/2012	6:42:54 PM	Main Vac valve opened
2/17/2012	6:42:54 PM	Helium MFC set to  0.000000
2/17/2012	6:42:54 PM	H2 MFC set to  0.000000
2/17/2012	6:42:54 PM	BCl3 MFC set to  0.000000
2/17/2012	6:42:54 PM	PH3 MFC set to  0.000000
2/17/2012	6:42:54 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:42:54 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:42:54 PM	Tube furnace set to 0
2/17/2012	6:43:24 PM	H2 valve closed
2/17/2012	6:43:24 PM	BCl3 valve closed
2/17/2012	6:43:24 PM	PH3 valve closed
2/17/2012	6:43:24 PM	SiCl4 pre valve closed
2/17/2012	6:43:24 PM	SiCl4 post valve closed
2/17/2012	6:43:24 PM	Bypass valve closed
2/17/2012	6:43:24 PM	Bubbler valve closed
2/17/2012	6:43:24 PM	Helium valve opened
2/17/2012	6:43:24 PM	Main Vac valve opened
2/17/2012	6:43:24 PM	Helium MFC set to  20.000000
2/17/2012	6:43:24 PM	H2 MFC set to  0.000000
2/17/2012	6:43:24 PM	BCl3 MFC set to  0.000000
2/17/2012	6:43:24 PM	PH3 MFC set to  0.000000
2/17/2012	6:43:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:43:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:43:24 PM	Tube furnace set to 0
2/17/2012	6:43:54 PM	Helium valve closed
2/17/2012	6:43:54 PM	H2 valve closed
2/17/2012	6:43:54 PM	BCl3 valve closed
2/17/2012	6:43:54 PM	PH3 valve closed
2/17/2012	6:43:54 PM	SiCl4 pre valve closed
2/17/2012	6:43:54 PM	SiCl4 post valve closed
2/17/2012	6:43:54 PM	Bypass valve closed
2/17/2012	6:43:54 PM	Bubbler valve closed
2/17/2012	6:43:54 PM	Main Vac valve opened
2/17/2012	6:43:54 PM	Helium MFC set to  0.000000
2/17/2012	6:43:54 PM	H2 MFC set to  0.000000
2/17/2012	6:43:54 PM	BCl3 MFC set to  0.000000
2/17/2012	6:43:54 PM	PH3 MFC set to  0.000000
2/17/2012	6:43:54 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:43:54 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:43:55 PM	Tube furnace set to 0
2/17/2012	6:44:25 PM	H2 valve closed
2/17/2012	6:44:25 PM	BCl3 valve closed
2/17/2012	6:44:25 PM	PH3 valve closed
2/17/2012	6:44:25 PM	SiCl4 pre valve closed
2/17/2012	6:44:25 PM	SiCl4 post valve closed
2/17/2012	6:44:25 PM	Bypass valve closed
2/17/2012	6:44:25 PM	Bubbler valve closed
2/17/2012	6:44:25 PM	Helium valve opened
2/17/2012	6:44:25 PM	Main Vac valve opened
2/17/2012	6:44:25 PM	Helium MFC set to  20.000000
2/17/2012	6:44:25 PM	H2 MFC set to  0.000000
2/17/2012	6:44:25 PM	BCl3 MFC set to  0.000000
2/17/2012	6:44:25 PM	PH3 MFC set to  0.000000
2/17/2012	6:44:25 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:44:25 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:44:25 PM	Tube furnace set to 0
2/17/2012	6:44:55 PM	Helium valve closed
2/17/2012	6:44:55 PM	H2 valve closed
2/17/2012	6:44:55 PM	BCl3 valve closed
2/17/2012	6:44:55 PM	PH3 valve closed
2/17/2012	6:44:55 PM	SiCl4 pre valve closed
2/17/2012	6:44:55 PM	SiCl4 post valve closed
2/17/2012	6:44:55 PM	Bypass valve closed
2/17/2012	6:44:55 PM	Bubbler valve closed
2/17/2012	6:44:55 PM	Main Vac valve opened
2/17/2012	6:44:55 PM	Helium MFC set to  0.000000
2/17/2012	6:44:55 PM	H2 MFC set to  0.000000
2/17/2012	6:44:55 PM	BCl3 MFC set to  0.000000
2/17/2012	6:44:55 PM	PH3 MFC set to  0.000000
2/17/2012	6:44:55 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:44:55 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:44:55 PM	Tube furnace set to 0
2/17/2012	6:45:25 PM	H2 valve closed
2/17/2012	6:45:25 PM	BCl3 valve closed
2/17/2012	6:45:25 PM	PH3 valve closed
2/17/2012	6:45:25 PM	SiCl4 pre valve closed
2/17/2012	6:45:25 PM	SiCl4 post valve closed
2/17/2012	6:45:25 PM	Bypass valve closed
2/17/2012	6:45:25 PM	Bubbler valve closed
2/17/2012	6:45:25 PM	Helium valve opened
2/17/2012	6:45:25 PM	Main Vac valve opened
2/17/2012	6:45:25 PM	Helium MFC set to  20.000000
2/17/2012	6:45:25 PM	H2 MFC set to  0.000000
2/17/2012	6:45:25 PM	BCl3 MFC set to  0.000000
2/17/2012	6:45:25 PM	PH3 MFC set to  0.000000
2/17/2012	6:45:25 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:45:25 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:45:25 PM	Tube furnace set to 0
2/17/2012	6:45:55 PM	Helium valve closed
2/17/2012	6:45:55 PM	H2 valve closed
2/17/2012	6:45:55 PM	BCl3 valve closed
2/17/2012	6:45:55 PM	PH3 valve closed
2/17/2012	6:45:55 PM	SiCl4 pre valve closed
2/17/2012	6:45:55 PM	SiCl4 post valve closed
2/17/2012	6:45:55 PM	Bypass valve closed
2/17/2012	6:45:55 PM	Bubbler valve closed
2/17/2012	6:45:55 PM	Main Vac valve opened
2/17/2012	6:45:55 PM	Helium MFC set to  0.000000
2/17/2012	6:45:55 PM	H2 MFC set to  0.000000
2/17/2012	6:45:55 PM	BCl3 MFC set to  0.000000
2/17/2012	6:45:55 PM	PH3 MFC set to  0.000000
2/17/2012	6:45:55 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:45:55 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:45:55 PM	Tube furnace set to 0
2/17/2012	6:46:25 PM	H2 valve closed
2/17/2012	6:46:25 PM	BCl3 valve closed
2/17/2012	6:46:25 PM	PH3 valve closed
2/17/2012	6:46:25 PM	SiCl4 pre valve closed
2/17/2012	6:46:25 PM	SiCl4 post valve closed
2/17/2012	6:46:25 PM	Bypass valve closed
2/17/2012	6:46:25 PM	Bubbler valve closed
2/17/2012	6:46:25 PM	Helium valve opened
2/17/2012	6:46:25 PM	Main Vac valve opened
2/17/2012	6:46:25 PM	Helium MFC set to  20.000000
2/17/2012	6:46:25 PM	H2 MFC set to  0.000000
2/17/2012	6:46:25 PM	BCl3 MFC set to  0.000000
2/17/2012	6:46:25 PM	PH3 MFC set to  0.000000
2/17/2012	6:46:25 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:46:25 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:46:26 PM	Tube furnace set to 0
2/17/2012	6:46:56 PM	Helium valve closed
2/17/2012	6:46:56 PM	H2 valve closed
2/17/2012	6:46:56 PM	BCl3 valve closed
2/17/2012	6:46:56 PM	PH3 valve closed
2/17/2012	6:46:56 PM	SiCl4 pre valve closed
2/17/2012	6:46:56 PM	SiCl4 post valve closed
2/17/2012	6:46:56 PM	Bypass valve closed
2/17/2012	6:46:56 PM	Bubbler valve closed
2/17/2012	6:46:56 PM	Main Vac valve opened
2/17/2012	6:46:56 PM	Helium MFC set to  0.000000
2/17/2012	6:46:56 PM	H2 MFC set to  0.000000
2/17/2012	6:46:56 PM	BCl3 MFC set to  0.000000
2/17/2012	6:46:56 PM	PH3 MFC set to  0.000000
2/17/2012	6:46:56 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:46:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:46:56 PM	Tube furnace set to 0
2/17/2012	6:47:26 PM	H2 valve closed
2/17/2012	6:47:26 PM	BCl3 valve closed
2/17/2012	6:47:26 PM	PH3 valve closed
2/17/2012	6:47:26 PM	SiCl4 pre valve closed
2/17/2012	6:47:26 PM	SiCl4 post valve closed
2/17/2012	6:47:26 PM	Bypass valve closed
2/17/2012	6:47:26 PM	Bubbler valve closed
2/17/2012	6:47:26 PM	Helium valve opened
2/17/2012	6:47:26 PM	Main Vac valve opened
2/17/2012	6:47:26 PM	Helium MFC set to  20.000000
2/17/2012	6:47:26 PM	H2 MFC set to  0.000000
2/17/2012	6:47:26 PM	BCl3 MFC set to  0.000000
2/17/2012	6:47:26 PM	PH3 MFC set to  0.000000
2/17/2012	6:47:26 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:47:26 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:47:26 PM	Tube furnace set to 0
2/17/2012	6:47:56 PM	Helium valve closed
2/17/2012	6:47:56 PM	H2 valve closed
2/17/2012	6:47:56 PM	BCl3 valve closed
2/17/2012	6:47:56 PM	PH3 valve closed
2/17/2012	6:47:56 PM	SiCl4 pre valve closed
2/17/2012	6:47:56 PM	SiCl4 post valve closed
2/17/2012	6:47:56 PM	Bypass valve closed
2/17/2012	6:47:56 PM	Bubbler valve closed
2/17/2012	6:47:56 PM	Main Vac valve opened
2/17/2012	6:47:56 PM	Helium MFC set to  0.000000
2/17/2012	6:47:56 PM	H2 MFC set to  0.000000
2/17/2012	6:47:56 PM	BCl3 MFC set to  0.000000
2/17/2012	6:47:56 PM	PH3 MFC set to  0.000000
2/17/2012	6:47:56 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:47:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:47:56 PM	Tube furnace set to 0
2/17/2012	6:48:26 PM	H2 valve closed
2/17/2012	6:48:26 PM	BCl3 valve closed
2/17/2012	6:48:26 PM	PH3 valve closed
2/17/2012	6:48:26 PM	SiCl4 pre valve closed
2/17/2012	6:48:26 PM	SiCl4 post valve closed
2/17/2012	6:48:26 PM	Bypass valve closed
2/17/2012	6:48:26 PM	Bubbler valve closed
2/17/2012	6:48:26 PM	Helium valve opened
2/17/2012	6:48:26 PM	Main Vac valve opened
2/17/2012	6:48:26 PM	Helium MFC set to  20.000000
2/17/2012	6:48:26 PM	H2 MFC set to  0.000000
2/17/2012	6:48:26 PM	BCl3 MFC set to  0.000000
2/17/2012	6:48:26 PM	PH3 MFC set to  0.000000
2/17/2012	6:48:26 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:48:26 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:48:26 PM	Tube furnace set to 0
2/17/2012	6:48:56 PM	Helium valve closed
2/17/2012	6:48:56 PM	H2 valve closed
2/17/2012	6:48:56 PM	BCl3 valve closed
2/17/2012	6:48:56 PM	PH3 valve closed
2/17/2012	6:48:56 PM	SiCl4 pre valve closed
2/17/2012	6:48:56 PM	SiCl4 post valve closed
2/17/2012	6:48:56 PM	Bypass valve closed
2/17/2012	6:48:56 PM	Bubbler valve closed
2/17/2012	6:48:56 PM	Main Vac valve opened
2/17/2012	6:48:56 PM	Helium MFC set to  0.000000
2/17/2012	6:48:56 PM	H2 MFC set to  0.000000
2/17/2012	6:48:56 PM	BCl3 MFC set to  0.000000
2/17/2012	6:48:56 PM	PH3 MFC set to  0.000000
2/17/2012	6:48:56 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:48:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:48:57 PM	Tube furnace set to 0
2/17/2012	6:48:58 PM	Run finished at 6:48 PM
2/17/2012	6:48:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	6:52:08 PM	Main Vac valve closed
2/17/2012	6:52:31 PM	Main Vac valve opened
2/17/2012	6:53:33 PM	Recipe started at 6:53 PM
2/17/2012	6:53:33 PM	Helium valve closed
2/17/2012	6:53:33 PM	H2 valve closed
2/17/2012	6:53:33 PM	BCl3 valve closed
2/17/2012	6:53:33 PM	PH3 valve closed
2/17/2012	6:53:33 PM	SiCl4 pre valve closed
2/17/2012	6:53:33 PM	SiCl4 post valve closed
2/17/2012	6:53:33 PM	Main Vac valve closed
2/17/2012	6:53:33 PM	Bypass valve closed
2/17/2012	6:53:33 PM	Bubbler valve closed
2/17/2012	6:53:33 PM	Helium MFC set to  0.000000
2/17/2012	6:53:33 PM	H2 MFC set to  0.000000
2/17/2012	6:53:33 PM	BCl3 MFC set to  0.000000
2/17/2012	6:53:33 PM	PH3 MFC set to  0.000000
2/17/2012	6:53:33 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:53:33 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:53:33 PM	Tube furnace set to 0
2/17/2012	6:53:36 PM	Helium valve closed
2/17/2012	6:53:36 PM	BCl3 valve closed
2/17/2012	6:53:36 PM	PH3 valve closed
2/17/2012	6:53:36 PM	SiCl4 pre valve closed
2/17/2012	6:53:36 PM	SiCl4 post valve closed
2/17/2012	6:53:36 PM	Main Vac valve closed
2/17/2012	6:53:36 PM	Bypass valve closed
2/17/2012	6:53:36 PM	Bubbler valve closed
2/17/2012	6:53:36 PM	H2 valve opened
2/17/2012	6:53:36 PM	Helium MFC set to  0.000000
2/17/2012	6:53:36 PM	H2 MFC set to  500.000000
2/17/2012	6:53:36 PM	BCl3 MFC set to  0.000000
2/17/2012	6:53:36 PM	PH3 MFC set to  0.000000
2/17/2012	6:53:36 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:53:36 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:53:36 PM	Tube furnace set to 0
2/17/2012	6:54:44 PM	Helium valve closed
2/17/2012	6:54:44 PM	BCl3 valve closed
2/17/2012	6:54:44 PM	PH3 valve closed
2/17/2012	6:54:44 PM	SiCl4 pre valve closed
2/17/2012	6:54:44 PM	SiCl4 post valve closed
2/17/2012	6:54:44 PM	Main Vac valve closed
2/17/2012	6:54:44 PM	Bypass valve closed
2/17/2012	6:54:44 PM	H2 valve opened
2/17/2012	6:54:44 PM	Bubbler valve opened
2/17/2012	6:54:44 PM	Helium MFC set to  0.000000
2/17/2012	6:54:44 PM	H2 MFC set to  500.000000
2/17/2012	6:54:44 PM	BCl3 MFC set to  0.000000
2/17/2012	6:54:44 PM	PH3 MFC set to  0.000000
2/17/2012	6:54:44 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:54:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:54:44 PM	Tube furnace set to 0
2/17/2012	6:54:45 PM	Helium valve closed
2/17/2012	6:54:45 PM	BCl3 valve closed
2/17/2012	6:54:45 PM	PH3 valve closed
2/17/2012	6:54:45 PM	SiCl4 pre valve closed
2/17/2012	6:54:45 PM	SiCl4 post valve closed
2/17/2012	6:54:45 PM	Main Vac valve closed
2/17/2012	6:54:45 PM	Bypass valve closed
2/17/2012	6:54:45 PM	H2 valve opened
2/17/2012	6:54:45 PM	Bubbler valve opened
2/17/2012	6:54:45 PM	Helium MFC set to  0.000000
2/17/2012	6:54:45 PM	H2 MFC set to  500.000000
2/17/2012	6:54:45 PM	BCl3 MFC set to  0.000000
2/17/2012	6:54:45 PM	PH3 MFC set to  0.000000
2/17/2012	6:54:45 PM	SiCl4 MFC set to  0.000000
2/17/2012	6:54:45 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	6:54:45 PM	Tube furnace set to 1000
2/17/2012	7:14:45 PM	Helium valve closed
2/17/2012	7:14:45 PM	BCl3 valve closed
2/17/2012	7:14:45 PM	Main Vac valve closed
2/17/2012	7:14:45 PM	Bypass valve closed
2/17/2012	7:14:45 PM	H2 valve opened
2/17/2012	7:14:45 PM	PH3 valve opened
2/17/2012	7:14:45 PM	SiCl4 pre valve opened
2/17/2012	7:14:45 PM	SiCl4 post valve opened
2/17/2012	7:14:45 PM	Bubbler valve opened
2/17/2012	7:14:45 PM	Helium MFC set to  0.000000
2/17/2012	7:14:45 PM	H2 MFC set to  500.000000
2/17/2012	7:14:45 PM	BCl3 MFC set to  0.000000
2/17/2012	7:14:45 PM	PH3 MFC set to  0.300000
2/17/2012	7:14:45 PM	SiCl4 MFC set to  25.000000
2/17/2012	7:14:45 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:14:45 PM	Tube furnace set to 1000
2/17/2012	7:23:45 PM	Helium valve closed
2/17/2012	7:23:45 PM	BCl3 valve closed
2/17/2012	7:23:45 PM	PH3 valve closed
2/17/2012	7:23:45 PM	SiCl4 pre valve closed
2/17/2012	7:23:46 PM	SiCl4 post valve closed
2/17/2012	7:23:46 PM	Main Vac valve closed
2/17/2012	7:23:46 PM	Bypass valve closed
2/17/2012	7:23:46 PM	H2 valve opened
2/17/2012	7:23:46 PM	Bubbler valve opened
2/17/2012	7:23:46 PM	Helium MFC set to  0.000000
2/17/2012	7:23:46 PM	H2 MFC set to  500.000000
2/17/2012	7:23:46 PM	BCl3 MFC set to  0.000000
2/17/2012	7:23:46 PM	PH3 MFC set to  0.000000
2/17/2012	7:23:46 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:23:46 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:23:46 PM	Tube furnace set to 750
2/17/2012	7:28:46 PM	H2 valve closed
2/17/2012	7:28:46 PM	BCl3 valve closed
2/17/2012	7:28:46 PM	PH3 valve closed
2/17/2012	7:28:46 PM	SiCl4 pre valve closed
2/17/2012	7:28:46 PM	SiCl4 post valve closed
2/17/2012	7:28:46 PM	Main Vac valve closed
2/17/2012	7:28:46 PM	Bypass valve closed
2/17/2012	7:28:46 PM	Helium valve opened
2/17/2012	7:28:46 PM	Bubbler valve opened
2/17/2012	7:28:46 PM	Helium MFC set to  500.000000
2/17/2012	7:28:46 PM	H2 MFC set to  0.000000
2/17/2012	7:28:46 PM	BCl3 MFC set to  0.000000
2/17/2012	7:28:46 PM	PH3 MFC set to  0.000000
2/17/2012	7:28:46 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:28:46 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:28:46 PM	Tube furnace set to 0
2/17/2012	7:45:35 PM	Helium valve closed
2/17/2012	7:45:35 PM	H2 valve closed
2/17/2012	7:45:35 PM	BCl3 valve closed
2/17/2012	7:45:35 PM	PH3 valve closed
2/17/2012	7:45:35 PM	SiCl4 pre valve closed
2/17/2012	7:45:35 PM	SiCl4 post valve closed
2/17/2012	7:45:35 PM	Main Vac valve closed
2/17/2012	7:45:35 PM	Bypass valve closed
2/17/2012	7:45:35 PM	Bubbler valve closed
2/17/2012	7:45:35 PM	Helium MFC set to  0.000000
2/17/2012	7:45:35 PM	H2 MFC set to  0.000000
2/17/2012	7:45:35 PM	BCl3 MFC set to  0.000000
2/17/2012	7:45:35 PM	PH3 MFC set to  0.000000
2/17/2012	7:45:35 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:45:35 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:45:35 PM	Tube furnace set to 0
2/17/2012	7:45:36 PM	Run finished at 7:45 PM
2/17/2012	7:48:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	7:48:24 PM	Recipe started at 7:48 PM
2/17/2012	7:48:24 PM	Helium valve closed
2/17/2012	7:48:24 PM	H2 valve closed
2/17/2012	7:48:24 PM	BCl3 valve closed
2/17/2012	7:48:24 PM	PH3 valve closed
2/17/2012	7:48:24 PM	SiCl4 pre valve closed
2/17/2012	7:48:24 PM	SiCl4 post valve closed
2/17/2012	7:48:24 PM	Main Vac valve closed
2/17/2012	7:48:24 PM	Bubbler valve closed
2/17/2012	7:48:24 PM	Bypass valve opened
2/17/2012	7:48:24 PM	Helium MFC set to  0.000000
2/17/2012	7:48:24 PM	H2 MFC set to  0.000000
2/17/2012	7:48:24 PM	BCl3 MFC set to  0.000000
2/17/2012	7:48:24 PM	PH3 MFC set to  0.000000
2/17/2012	7:48:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:48:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:48:25 PM	Tube furnace set to 0
2/17/2012	7:49:24 PM	Helium valve closed
2/17/2012	7:49:24 PM	H2 valve closed
2/17/2012	7:49:24 PM	BCl3 valve closed
2/17/2012	7:49:24 PM	PH3 valve closed
2/17/2012	7:49:24 PM	SiCl4 pre valve closed
2/17/2012	7:49:24 PM	SiCl4 post valve closed
2/17/2012	7:49:24 PM	Main Vac valve closed
2/17/2012	7:49:24 PM	Bubbler valve closed
2/17/2012	7:49:24 PM	Bypass valve opened
2/17/2012	7:49:24 PM	Helium MFC set to  0.000000
2/17/2012	7:49:24 PM	H2 MFC set to  0.000000
2/17/2012	7:49:24 PM	BCl3 MFC set to  0.000000
2/17/2012	7:49:24 PM	PH3 MFC set to  0.000000
2/17/2012	7:49:24 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:49:24 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:49:25 PM	Tube furnace set to 0
2/17/2012	7:50:25 PM	Helium valve closed
2/17/2012	7:50:25 PM	H2 valve closed
2/17/2012	7:50:25 PM	BCl3 valve closed
2/17/2012	7:50:25 PM	PH3 valve closed
2/17/2012	7:50:25 PM	SiCl4 pre valve closed
2/17/2012	7:50:25 PM	SiCl4 post valve closed
2/17/2012	7:50:25 PM	Bypass valve closed
2/17/2012	7:50:25 PM	Bubbler valve closed
2/17/2012	7:50:25 PM	Main Vac valve opened
2/17/2012	7:50:25 PM	Helium MFC set to  0.000000
2/17/2012	7:50:25 PM	H2 MFC set to  0.000000
2/17/2012	7:50:25 PM	BCl3 MFC set to  0.000000
2/17/2012	7:50:25 PM	PH3 MFC set to  0.000000
2/17/2012	7:50:25 PM	SiCl4 MFC set to  0.000000
2/17/2012	7:50:25 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	7:50:25 PM	Tube furnace set to 0
2/17/2012	7:50:26 PM	Run finished at 7:50 PM
2/17/2012	7:50:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	8:24:32 PM	Main Vac valve closed
2/17/2012	8:24:54 PM	Main Vac valve opened
2/17/2012	8:25:35 PM	Recipe started at 8:25 PM
2/17/2012	8:25:35 PM	Helium valve closed
2/17/2012	8:25:35 PM	H2 valve closed
2/17/2012	8:25:35 PM	BCl3 valve closed
2/17/2012	8:25:35 PM	PH3 valve closed
2/17/2012	8:25:35 PM	SiCl4 pre valve closed
2/17/2012	8:25:35 PM	SiCl4 post valve closed
2/17/2012	8:25:35 PM	Main Vac valve closed
2/17/2012	8:25:35 PM	Bypass valve closed
2/17/2012	8:25:35 PM	Bubbler valve closed
2/17/2012	8:25:35 PM	Helium MFC set to  0.000000
2/17/2012	8:25:35 PM	H2 MFC set to  0.000000
2/17/2012	8:25:35 PM	BCl3 MFC set to  0.000000
2/17/2012	8:25:35 PM	PH3 MFC set to  0.000000
2/17/2012	8:25:35 PM	SiCl4 MFC set to  0.000000
2/17/2012	8:25:35 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:25:35 PM	Tube furnace set to 0
2/17/2012	8:25:38 PM	Helium valve closed
2/17/2012	8:25:38 PM	BCl3 valve closed
2/17/2012	8:25:38 PM	PH3 valve closed
2/17/2012	8:25:38 PM	SiCl4 pre valve closed
2/17/2012	8:25:38 PM	SiCl4 post valve closed
2/17/2012	8:25:38 PM	Main Vac valve closed
2/17/2012	8:25:38 PM	Bypass valve closed
2/17/2012	8:25:38 PM	Bubbler valve closed
2/17/2012	8:25:38 PM	H2 valve opened
2/17/2012	8:25:38 PM	Helium MFC set to  0.000000
2/17/2012	8:25:38 PM	H2 MFC set to  500.000000
2/17/2012	8:25:38 PM	BCl3 MFC set to  0.000000
2/17/2012	8:25:38 PM	PH3 MFC set to  0.000000
2/17/2012	8:25:38 PM	SiCl4 MFC set to  0.000000
2/17/2012	8:25:38 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:25:38 PM	Tube furnace set to 0
2/17/2012	8:26:42 PM	Helium valve closed
2/17/2012	8:26:42 PM	BCl3 valve closed
2/17/2012	8:26:42 PM	PH3 valve closed
2/17/2012	8:26:42 PM	SiCl4 pre valve closed
2/17/2012	8:26:42 PM	SiCl4 post valve closed
2/17/2012	8:26:42 PM	Main Vac valve closed
2/17/2012	8:26:42 PM	Bypass valve closed
2/17/2012	8:26:42 PM	H2 valve opened
2/17/2012	8:26:42 PM	Bubbler valve opened
2/17/2012	8:26:42 PM	Helium MFC set to  0.000000
2/17/2012	8:26:42 PM	H2 MFC set to  500.000000
2/17/2012	8:26:42 PM	BCl3 MFC set to  0.000000
2/17/2012	8:26:42 PM	PH3 MFC set to  0.000000
2/17/2012	8:26:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	8:26:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:26:42 PM	Tube furnace set to 0
2/17/2012	8:26:43 PM	Helium valve closed
2/17/2012	8:26:43 PM	BCl3 valve closed
2/17/2012	8:26:43 PM	PH3 valve closed
2/17/2012	8:26:43 PM	SiCl4 pre valve closed
2/17/2012	8:26:43 PM	SiCl4 post valve closed
2/17/2012	8:26:43 PM	Main Vac valve closed
2/17/2012	8:26:43 PM	Bypass valve closed
2/17/2012	8:26:43 PM	H2 valve opened
2/17/2012	8:26:43 PM	Bubbler valve opened
2/17/2012	8:26:43 PM	Helium MFC set to  0.000000
2/17/2012	8:26:43 PM	H2 MFC set to  500.000000
2/17/2012	8:26:43 PM	BCl3 MFC set to  0.000000
2/17/2012	8:26:43 PM	PH3 MFC set to  0.000000
2/17/2012	8:26:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	8:26:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:26:44 PM	Tube furnace set to 1000
2/17/2012	8:46:44 PM	Helium valve closed
2/17/2012	8:46:44 PM	BCl3 valve closed
2/17/2012	8:46:44 PM	Main Vac valve closed
2/17/2012	8:46:44 PM	Bypass valve closed
2/17/2012	8:46:44 PM	H2 valve opened
2/17/2012	8:46:44 PM	PH3 valve opened
2/17/2012	8:46:44 PM	SiCl4 pre valve opened
2/17/2012	8:46:44 PM	SiCl4 post valve opened
2/17/2012	8:46:44 PM	Bubbler valve opened
2/17/2012	8:46:44 PM	Helium MFC set to  0.000000
2/17/2012	8:46:44 PM	H2 MFC set to  500.000000
2/17/2012	8:46:44 PM	BCl3 MFC set to  0.000000
2/17/2012	8:46:44 PM	PH3 MFC set to  0.300000
2/17/2012	8:46:44 PM	SiCl4 MFC set to  25.000000
2/17/2012	8:46:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:46:44 PM	Tube furnace set to 1000
2/17/2012	8:55:44 PM	Helium valve closed
2/17/2012	8:55:44 PM	BCl3 valve closed
2/17/2012	8:55:44 PM	PH3 valve closed
2/17/2012	8:55:44 PM	SiCl4 pre valve closed
2/17/2012	8:55:44 PM	SiCl4 post valve closed
2/17/2012	8:55:44 PM	Main Vac valve closed
2/17/2012	8:55:44 PM	Bypass valve closed
2/17/2012	8:55:44 PM	H2 valve opened
2/17/2012	8:55:44 PM	Bubbler valve opened
2/17/2012	8:55:44 PM	Helium MFC set to  0.000000
2/17/2012	8:55:44 PM	H2 MFC set to  500.000000
2/17/2012	8:55:44 PM	BCl3 MFC set to  0.000000
2/17/2012	8:55:44 PM	PH3 MFC set to  0.000000
2/17/2012	8:55:44 PM	SiCl4 MFC set to  0.000000
2/17/2012	8:55:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	8:55:44 PM	Tube furnace set to 750
2/17/2012	9:00:44 PM	H2 valve closed
2/17/2012	9:00:44 PM	BCl3 valve closed
2/17/2012	9:00:44 PM	PH3 valve closed
2/17/2012	9:00:44 PM	SiCl4 pre valve closed
2/17/2012	9:00:44 PM	SiCl4 post valve closed
2/17/2012	9:00:44 PM	Main Vac valve closed
2/17/2012	9:00:44 PM	Bypass valve closed
2/17/2012	9:00:44 PM	Helium valve opened
2/17/2012	9:00:44 PM	Bubbler valve opened
2/17/2012	9:00:44 PM	Helium MFC set to  500.000000
2/17/2012	9:00:44 PM	H2 MFC set to  0.000000
2/17/2012	9:00:44 PM	BCl3 MFC set to  0.000000
2/17/2012	9:00:44 PM	PH3 MFC set to  0.000000
2/17/2012	9:00:44 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:00:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:00:44 PM	Tube furnace set to 0
2/17/2012	9:20:44 PM	Helium valve closed
2/17/2012	9:20:44 PM	H2 valve closed
2/17/2012	9:20:44 PM	BCl3 valve closed
2/17/2012	9:20:44 PM	PH3 valve closed
2/17/2012	9:20:44 PM	SiCl4 pre valve closed
2/17/2012	9:20:44 PM	SiCl4 post valve closed
2/17/2012	9:20:44 PM	Main Vac valve closed
2/17/2012	9:20:44 PM	Bypass valve closed
2/17/2012	9:20:44 PM	Bubbler valve closed
2/17/2012	9:20:44 PM	Helium MFC set to  0.000000
2/17/2012	9:20:44 PM	H2 MFC set to  0.000000
2/17/2012	9:20:44 PM	BCl3 MFC set to  0.000000
2/17/2012	9:20:44 PM	PH3 MFC set to  0.000000
2/17/2012	9:20:44 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:20:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:20:44 PM	Tube furnace set to 0
2/17/2012	9:20:45 PM	Run finished at 9:20 PM
2/17/2012	9:36:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	9:36:21 PM	Recipe started at 9:36 PM
2/17/2012	9:36:21 PM	Helium valve closed
2/17/2012	9:36:21 PM	H2 valve closed
2/17/2012	9:36:21 PM	BCl3 valve closed
2/17/2012	9:36:21 PM	PH3 valve closed
2/17/2012	9:36:21 PM	SiCl4 pre valve closed
2/17/2012	9:36:21 PM	SiCl4 post valve closed
2/17/2012	9:36:21 PM	Main Vac valve closed
2/17/2012	9:36:21 PM	Bubbler valve closed
2/17/2012	9:36:21 PM	Bypass valve opened
2/17/2012	9:36:21 PM	Helium MFC set to  0.000000
2/17/2012	9:36:21 PM	H2 MFC set to  0.000000
2/17/2012	9:36:21 PM	BCl3 MFC set to  0.000000
2/17/2012	9:36:21 PM	PH3 MFC set to  0.000000
2/17/2012	9:36:21 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:36:21 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:36:22 PM	Tube furnace set to 0
2/17/2012	9:37:30 PM	Helium valve closed
2/17/2012	9:37:30 PM	H2 valve closed
2/17/2012	9:37:30 PM	BCl3 valve closed
2/17/2012	9:37:30 PM	PH3 valve closed
2/17/2012	9:37:30 PM	SiCl4 pre valve closed
2/17/2012	9:37:30 PM	SiCl4 post valve closed
2/17/2012	9:37:30 PM	Main Vac valve closed
2/17/2012	9:37:30 PM	Bubbler valve closed
2/17/2012	9:37:30 PM	Bypass valve opened
2/17/2012	9:37:30 PM	Helium MFC set to  0.000000
2/17/2012	9:37:30 PM	H2 MFC set to  0.000000
2/17/2012	9:37:30 PM	BCl3 MFC set to  0.000000
2/17/2012	9:37:30 PM	PH3 MFC set to  0.000000
2/17/2012	9:37:30 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:37:30 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:37:30 PM	Tube furnace set to 0
2/17/2012	9:38:30 PM	Helium valve closed
2/17/2012	9:38:30 PM	H2 valve closed
2/17/2012	9:38:30 PM	BCl3 valve closed
2/17/2012	9:38:30 PM	PH3 valve closed
2/17/2012	9:38:30 PM	SiCl4 pre valve closed
2/17/2012	9:38:30 PM	SiCl4 post valve closed
2/17/2012	9:38:30 PM	Bypass valve closed
2/17/2012	9:38:30 PM	Bubbler valve closed
2/17/2012	9:38:30 PM	Main Vac valve opened
2/17/2012	9:38:30 PM	Helium MFC set to  0.000000
2/17/2012	9:38:30 PM	H2 MFC set to  0.000000
2/17/2012	9:38:30 PM	BCl3 MFC set to  0.000000
2/17/2012	9:38:30 PM	PH3 MFC set to  0.000000
2/17/2012	9:38:30 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:38:30 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:38:30 PM	Tube furnace set to 0
2/17/2012	9:38:31 PM	Run finished at 9:38 PM
2/17/2012	9:38:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	9:48:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	9:48:39 PM	Recipe started at 9:48 PM
2/17/2012	9:48:39 PM	Helium valve closed
2/17/2012	9:48:39 PM	H2 valve closed
2/17/2012	9:48:39 PM	BCl3 valve closed
2/17/2012	9:48:39 PM	PH3 valve closed
2/17/2012	9:48:39 PM	SiCl4 pre valve closed
2/17/2012	9:48:39 PM	SiCl4 post valve closed
2/17/2012	9:48:39 PM	Main Vac valve closed
2/17/2012	9:48:39 PM	Bubbler valve closed
2/17/2012	9:48:39 PM	Bypass valve opened
2/17/2012	9:48:39 PM	Helium MFC set to  0.000000
2/17/2012	9:48:39 PM	H2 MFC set to  0.000000
2/17/2012	9:48:39 PM	BCl3 MFC set to  0.000000
2/17/2012	9:48:39 PM	PH3 MFC set to  0.000000
2/17/2012	9:48:39 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:48:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:48:39 PM	Tube furnace set to 0
2/17/2012	9:48:39 PM	Helium valve closed
2/17/2012	9:48:39 PM	H2 valve closed
2/17/2012	9:48:39 PM	BCl3 valve closed
2/17/2012	9:48:39 PM	PH3 valve closed
2/17/2012	9:48:39 PM	SiCl4 pre valve closed
2/17/2012	9:48:39 PM	SiCl4 post valve closed
2/17/2012	9:48:39 PM	Main Vac valve closed
2/17/2012	9:48:39 PM	Bubbler valve closed
2/17/2012	9:48:39 PM	Bypass valve opened
2/17/2012	9:48:39 PM	Helium MFC set to  0.000000
2/17/2012	9:48:39 PM	H2 MFC set to  0.000000
2/17/2012	9:48:39 PM	BCl3 MFC set to  0.000000
2/17/2012	9:48:39 PM	PH3 MFC set to  0.000000
2/17/2012	9:48:39 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:48:39 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:48:39 PM	Tube furnace set to 0
2/17/2012	9:48:40 PM	Helium valve closed
2/17/2012	9:48:40 PM	H2 valve closed
2/17/2012	9:48:40 PM	BCl3 valve closed
2/17/2012	9:48:40 PM	PH3 valve closed
2/17/2012	9:48:40 PM	SiCl4 pre valve closed
2/17/2012	9:48:40 PM	SiCl4 post valve closed
2/17/2012	9:48:40 PM	Bypass valve closed
2/17/2012	9:48:40 PM	Bubbler valve closed
2/17/2012	9:48:40 PM	Main Vac valve opened
2/17/2012	9:48:40 PM	Helium MFC set to  0.000000
2/17/2012	9:48:40 PM	H2 MFC set to  0.000000
2/17/2012	9:48:40 PM	BCl3 MFC set to  0.000000
2/17/2012	9:48:40 PM	PH3 MFC set to  0.000000
2/17/2012	9:48:40 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:48:40 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:48:40 PM	Tube furnace set to 0
2/17/2012	9:49:10 PM	H2 valve closed
2/17/2012	9:49:10 PM	BCl3 valve closed
2/17/2012	9:49:10 PM	PH3 valve closed
2/17/2012	9:49:10 PM	SiCl4 pre valve closed
2/17/2012	9:49:10 PM	SiCl4 post valve closed
2/17/2012	9:49:10 PM	Bypass valve closed
2/17/2012	9:49:10 PM	Bubbler valve closed
2/17/2012	9:49:10 PM	Helium valve opened
2/17/2012	9:49:10 PM	Main Vac valve opened
2/17/2012	9:49:10 PM	Helium MFC set to  20.000000
2/17/2012	9:49:10 PM	H2 MFC set to  0.000000
2/17/2012	9:49:10 PM	BCl3 MFC set to  0.000000
2/17/2012	9:49:10 PM	PH3 MFC set to  0.000000
2/17/2012	9:49:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:49:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:49:10 PM	Tube furnace set to 0
2/17/2012	9:49:40 PM	Helium valve closed
2/17/2012	9:49:40 PM	H2 valve closed
2/17/2012	9:49:40 PM	BCl3 valve closed
2/17/2012	9:49:40 PM	PH3 valve closed
2/17/2012	9:49:40 PM	SiCl4 pre valve closed
2/17/2012	9:49:40 PM	SiCl4 post valve closed
2/17/2012	9:49:40 PM	Bypass valve closed
2/17/2012	9:49:40 PM	Bubbler valve closed
2/17/2012	9:49:40 PM	Main Vac valve opened
2/17/2012	9:49:40 PM	Helium MFC set to  0.000000
2/17/2012	9:49:40 PM	H2 MFC set to  0.000000
2/17/2012	9:49:40 PM	BCl3 MFC set to  0.000000
2/17/2012	9:49:40 PM	PH3 MFC set to  0.000000
2/17/2012	9:49:40 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:49:40 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:49:40 PM	Tube furnace set to 0
2/17/2012	9:50:10 PM	H2 valve closed
2/17/2012	9:50:10 PM	BCl3 valve closed
2/17/2012	9:50:10 PM	PH3 valve closed
2/17/2012	9:50:10 PM	SiCl4 pre valve closed
2/17/2012	9:50:10 PM	SiCl4 post valve closed
2/17/2012	9:50:10 PM	Bypass valve closed
2/17/2012	9:50:10 PM	Bubbler valve closed
2/17/2012	9:50:10 PM	Helium valve opened
2/17/2012	9:50:10 PM	Main Vac valve opened
2/17/2012	9:50:10 PM	Helium MFC set to  20.000000
2/17/2012	9:50:10 PM	H2 MFC set to  0.000000
2/17/2012	9:50:10 PM	BCl3 MFC set to  0.000000
2/17/2012	9:50:10 PM	PH3 MFC set to  0.000000
2/17/2012	9:50:10 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:50:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:50:11 PM	Tube furnace set to 0
2/17/2012	9:50:41 PM	Helium valve closed
2/17/2012	9:50:41 PM	H2 valve closed
2/17/2012	9:50:41 PM	BCl3 valve closed
2/17/2012	9:50:41 PM	PH3 valve closed
2/17/2012	9:50:41 PM	SiCl4 pre valve closed
2/17/2012	9:50:41 PM	SiCl4 post valve closed
2/17/2012	9:50:41 PM	Bypass valve closed
2/17/2012	9:50:41 PM	Bubbler valve closed
2/17/2012	9:50:41 PM	Main Vac valve opened
2/17/2012	9:50:41 PM	Helium MFC set to  0.000000
2/17/2012	9:50:41 PM	H2 MFC set to  0.000000
2/17/2012	9:50:41 PM	BCl3 MFC set to  0.000000
2/17/2012	9:50:41 PM	PH3 MFC set to  0.000000
2/17/2012	9:50:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:50:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:50:41 PM	Tube furnace set to 0
2/17/2012	9:51:11 PM	H2 valve closed
2/17/2012	9:51:11 PM	BCl3 valve closed
2/17/2012	9:51:11 PM	PH3 valve closed
2/17/2012	9:51:11 PM	SiCl4 pre valve closed
2/17/2012	9:51:11 PM	SiCl4 post valve closed
2/17/2012	9:51:11 PM	Bypass valve closed
2/17/2012	9:51:11 PM	Bubbler valve closed
2/17/2012	9:51:11 PM	Helium valve opened
2/17/2012	9:51:11 PM	Main Vac valve opened
2/17/2012	9:51:11 PM	Helium MFC set to  20.000000
2/17/2012	9:51:11 PM	H2 MFC set to  0.000000
2/17/2012	9:51:11 PM	BCl3 MFC set to  0.000000
2/17/2012	9:51:11 PM	PH3 MFC set to  0.000000
2/17/2012	9:51:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:51:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:51:11 PM	Tube furnace set to 0
2/17/2012	9:51:41 PM	Helium valve closed
2/17/2012	9:51:41 PM	H2 valve closed
2/17/2012	9:51:41 PM	BCl3 valve closed
2/17/2012	9:51:41 PM	PH3 valve closed
2/17/2012	9:51:41 PM	SiCl4 pre valve closed
2/17/2012	9:51:41 PM	SiCl4 post valve closed
2/17/2012	9:51:41 PM	Bypass valve closed
2/17/2012	9:51:41 PM	Bubbler valve closed
2/17/2012	9:51:41 PM	Main Vac valve opened
2/17/2012	9:51:41 PM	Helium MFC set to  0.000000
2/17/2012	9:51:41 PM	H2 MFC set to  0.000000
2/17/2012	9:51:41 PM	BCl3 MFC set to  0.000000
2/17/2012	9:51:41 PM	PH3 MFC set to  0.000000
2/17/2012	9:51:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:51:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:51:41 PM	Tube furnace set to 0
2/17/2012	9:52:11 PM	H2 valve closed
2/17/2012	9:52:11 PM	BCl3 valve closed
2/17/2012	9:52:11 PM	PH3 valve closed
2/17/2012	9:52:11 PM	SiCl4 pre valve closed
2/17/2012	9:52:11 PM	SiCl4 post valve closed
2/17/2012	9:52:11 PM	Bypass valve closed
2/17/2012	9:52:11 PM	Bubbler valve closed
2/17/2012	9:52:11 PM	Helium valve opened
2/17/2012	9:52:11 PM	Main Vac valve opened
2/17/2012	9:52:11 PM	Helium MFC set to  20.000000
2/17/2012	9:52:11 PM	H2 MFC set to  0.000000
2/17/2012	9:52:11 PM	BCl3 MFC set to  0.000000
2/17/2012	9:52:11 PM	PH3 MFC set to  0.000000
2/17/2012	9:52:11 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:52:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:52:11 PM	Tube furnace set to 0
2/17/2012	9:52:41 PM	Helium valve closed
2/17/2012	9:52:41 PM	H2 valve closed
2/17/2012	9:52:41 PM	BCl3 valve closed
2/17/2012	9:52:41 PM	PH3 valve closed
2/17/2012	9:52:41 PM	SiCl4 pre valve closed
2/17/2012	9:52:41 PM	SiCl4 post valve closed
2/17/2012	9:52:41 PM	Bypass valve closed
2/17/2012	9:52:41 PM	Bubbler valve closed
2/17/2012	9:52:41 PM	Main Vac valve opened
2/17/2012	9:52:41 PM	Helium MFC set to  0.000000
2/17/2012	9:52:41 PM	H2 MFC set to  0.000000
2/17/2012	9:52:41 PM	BCl3 MFC set to  0.000000
2/17/2012	9:52:41 PM	PH3 MFC set to  0.000000
2/17/2012	9:52:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:52:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:52:42 PM	Tube furnace set to 0
2/17/2012	9:53:12 PM	H2 valve closed
2/17/2012	9:53:12 PM	BCl3 valve closed
2/17/2012	9:53:12 PM	PH3 valve closed
2/17/2012	9:53:12 PM	SiCl4 pre valve closed
2/17/2012	9:53:12 PM	SiCl4 post valve closed
2/17/2012	9:53:12 PM	Bypass valve closed
2/17/2012	9:53:12 PM	Bubbler valve closed
2/17/2012	9:53:12 PM	Helium valve opened
2/17/2012	9:53:12 PM	Main Vac valve opened
2/17/2012	9:53:12 PM	Helium MFC set to  20.000000
2/17/2012	9:53:12 PM	H2 MFC set to  0.000000
2/17/2012	9:53:12 PM	BCl3 MFC set to  0.000000
2/17/2012	9:53:12 PM	PH3 MFC set to  0.000000
2/17/2012	9:53:12 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:53:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:53:12 PM	Tube furnace set to 0
2/17/2012	9:53:42 PM	Helium valve closed
2/17/2012	9:53:42 PM	H2 valve closed
2/17/2012	9:53:42 PM	BCl3 valve closed
2/17/2012	9:53:42 PM	PH3 valve closed
2/17/2012	9:53:42 PM	SiCl4 pre valve closed
2/17/2012	9:53:42 PM	SiCl4 post valve closed
2/17/2012	9:53:42 PM	Bypass valve closed
2/17/2012	9:53:42 PM	Bubbler valve closed
2/17/2012	9:53:42 PM	Main Vac valve opened
2/17/2012	9:53:42 PM	Helium MFC set to  0.000000
2/17/2012	9:53:42 PM	H2 MFC set to  0.000000
2/17/2012	9:53:42 PM	BCl3 MFC set to  0.000000
2/17/2012	9:53:42 PM	PH3 MFC set to  0.000000
2/17/2012	9:53:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:53:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:53:42 PM	Tube furnace set to 0
2/17/2012	9:54:12 PM	H2 valve closed
2/17/2012	9:54:12 PM	BCl3 valve closed
2/17/2012	9:54:12 PM	PH3 valve closed
2/17/2012	9:54:12 PM	SiCl4 pre valve closed
2/17/2012	9:54:12 PM	SiCl4 post valve closed
2/17/2012	9:54:12 PM	Bypass valve closed
2/17/2012	9:54:12 PM	Bubbler valve closed
2/17/2012	9:54:12 PM	Helium valve opened
2/17/2012	9:54:12 PM	Main Vac valve opened
2/17/2012	9:54:12 PM	Helium MFC set to  20.000000
2/17/2012	9:54:12 PM	H2 MFC set to  0.000000
2/17/2012	9:54:12 PM	BCl3 MFC set to  0.000000
2/17/2012	9:54:12 PM	PH3 MFC set to  0.000000
2/17/2012	9:54:12 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:54:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:54:12 PM	Tube furnace set to 0
2/17/2012	9:54:42 PM	Helium valve closed
2/17/2012	9:54:42 PM	H2 valve closed
2/17/2012	9:54:42 PM	BCl3 valve closed
2/17/2012	9:54:42 PM	PH3 valve closed
2/17/2012	9:54:42 PM	SiCl4 pre valve closed
2/17/2012	9:54:42 PM	SiCl4 post valve closed
2/17/2012	9:54:42 PM	Bypass valve closed
2/17/2012	9:54:42 PM	Bubbler valve closed
2/17/2012	9:54:42 PM	Main Vac valve opened
2/17/2012	9:54:42 PM	Helium MFC set to  0.000000
2/17/2012	9:54:42 PM	H2 MFC set to  0.000000
2/17/2012	9:54:42 PM	BCl3 MFC set to  0.000000
2/17/2012	9:54:42 PM	PH3 MFC set to  0.000000
2/17/2012	9:54:42 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:54:42 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:54:42 PM	Tube furnace set to 0
2/17/2012	9:55:12 PM	H2 valve closed
2/17/2012	9:55:12 PM	BCl3 valve closed
2/17/2012	9:55:12 PM	PH3 valve closed
2/17/2012	9:55:12 PM	SiCl4 pre valve closed
2/17/2012	9:55:12 PM	SiCl4 post valve closed
2/17/2012	9:55:12 PM	Bypass valve closed
2/17/2012	9:55:12 PM	Bubbler valve closed
2/17/2012	9:55:12 PM	Helium valve opened
2/17/2012	9:55:12 PM	Main Vac valve opened
2/17/2012	9:55:12 PM	Helium MFC set to  20.000000
2/17/2012	9:55:12 PM	H2 MFC set to  0.000000
2/17/2012	9:55:12 PM	BCl3 MFC set to  0.000000
2/17/2012	9:55:12 PM	PH3 MFC set to  0.000000
2/17/2012	9:55:12 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:55:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:55:13 PM	Tube furnace set to 0
2/17/2012	9:55:43 PM	Helium valve closed
2/17/2012	9:55:43 PM	H2 valve closed
2/17/2012	9:55:43 PM	BCl3 valve closed
2/17/2012	9:55:43 PM	PH3 valve closed
2/17/2012	9:55:43 PM	SiCl4 pre valve closed
2/17/2012	9:55:43 PM	SiCl4 post valve closed
2/17/2012	9:55:43 PM	Bypass valve closed
2/17/2012	9:55:43 PM	Bubbler valve closed
2/17/2012	9:55:43 PM	Main Vac valve opened
2/17/2012	9:55:43 PM	Helium MFC set to  0.000000
2/17/2012	9:55:43 PM	H2 MFC set to  0.000000
2/17/2012	9:55:43 PM	BCl3 MFC set to  0.000000
2/17/2012	9:55:43 PM	PH3 MFC set to  0.000000
2/17/2012	9:55:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:55:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:55:43 PM	Tube furnace set to 0
2/17/2012	9:56:13 PM	H2 valve closed
2/17/2012	9:56:13 PM	BCl3 valve closed
2/17/2012	9:56:13 PM	PH3 valve closed
2/17/2012	9:56:13 PM	SiCl4 pre valve closed
2/17/2012	9:56:13 PM	SiCl4 post valve closed
2/17/2012	9:56:13 PM	Bypass valve closed
2/17/2012	9:56:13 PM	Bubbler valve closed
2/17/2012	9:56:13 PM	Helium valve opened
2/17/2012	9:56:13 PM	Main Vac valve opened
2/17/2012	9:56:13 PM	Helium MFC set to  20.000000
2/17/2012	9:56:13 PM	H2 MFC set to  0.000000
2/17/2012	9:56:13 PM	BCl3 MFC set to  0.000000
2/17/2012	9:56:13 PM	PH3 MFC set to  0.000000
2/17/2012	9:56:13 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:56:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:56:13 PM	Tube furnace set to 0
2/17/2012	9:56:43 PM	Helium valve closed
2/17/2012	9:56:43 PM	H2 valve closed
2/17/2012	9:56:43 PM	BCl3 valve closed
2/17/2012	9:56:43 PM	PH3 valve closed
2/17/2012	9:56:43 PM	SiCl4 pre valve closed
2/17/2012	9:56:43 PM	SiCl4 post valve closed
2/17/2012	9:56:43 PM	Bypass valve closed
2/17/2012	9:56:43 PM	Bubbler valve closed
2/17/2012	9:56:43 PM	Main Vac valve opened
2/17/2012	9:56:43 PM	Helium MFC set to  0.000000
2/17/2012	9:56:43 PM	H2 MFC set to  0.000000
2/17/2012	9:56:43 PM	BCl3 MFC set to  0.000000
2/17/2012	9:56:43 PM	PH3 MFC set to  0.000000
2/17/2012	9:56:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:56:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:56:43 PM	Tube furnace set to 0
2/17/2012	9:57:13 PM	H2 valve closed
2/17/2012	9:57:13 PM	BCl3 valve closed
2/17/2012	9:57:13 PM	PH3 valve closed
2/17/2012	9:57:13 PM	SiCl4 pre valve closed
2/17/2012	9:57:13 PM	SiCl4 post valve closed
2/17/2012	9:57:13 PM	Bypass valve closed
2/17/2012	9:57:13 PM	Bubbler valve closed
2/17/2012	9:57:13 PM	Helium valve opened
2/17/2012	9:57:13 PM	Main Vac valve opened
2/17/2012	9:57:13 PM	Helium MFC set to  20.000000
2/17/2012	9:57:13 PM	H2 MFC set to  0.000000
2/17/2012	9:57:13 PM	BCl3 MFC set to  0.000000
2/17/2012	9:57:13 PM	PH3 MFC set to  0.000000
2/17/2012	9:57:13 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:57:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:57:13 PM	Tube furnace set to 0
2/17/2012	9:57:43 PM	Helium valve closed
2/17/2012	9:57:43 PM	H2 valve closed
2/17/2012	9:57:43 PM	BCl3 valve closed
2/17/2012	9:57:43 PM	PH3 valve closed
2/17/2012	9:57:43 PM	SiCl4 pre valve closed
2/17/2012	9:57:43 PM	SiCl4 post valve closed
2/17/2012	9:57:43 PM	Bypass valve closed
2/17/2012	9:57:43 PM	Bubbler valve closed
2/17/2012	9:57:43 PM	Main Vac valve opened
2/17/2012	9:57:43 PM	Helium MFC set to  0.000000
2/17/2012	9:57:43 PM	H2 MFC set to  0.000000
2/17/2012	9:57:43 PM	BCl3 MFC set to  0.000000
2/17/2012	9:57:43 PM	PH3 MFC set to  0.000000
2/17/2012	9:57:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:57:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:57:44 PM	Tube furnace set to 0
2/17/2012	9:58:14 PM	H2 valve closed
2/17/2012	9:58:14 PM	BCl3 valve closed
2/17/2012	9:58:14 PM	PH3 valve closed
2/17/2012	9:58:14 PM	SiCl4 pre valve closed
2/17/2012	9:58:14 PM	SiCl4 post valve closed
2/17/2012	9:58:14 PM	Bypass valve closed
2/17/2012	9:58:14 PM	Bubbler valve closed
2/17/2012	9:58:14 PM	Helium valve opened
2/17/2012	9:58:14 PM	Main Vac valve opened
2/17/2012	9:58:14 PM	Helium MFC set to  20.000000
2/17/2012	9:58:14 PM	H2 MFC set to  0.000000
2/17/2012	9:58:14 PM	BCl3 MFC set to  0.000000
2/17/2012	9:58:14 PM	PH3 MFC set to  0.000000
2/17/2012	9:58:14 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:58:14 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:58:14 PM	Tube furnace set to 0
2/17/2012	9:58:44 PM	Helium valve closed
2/17/2012	9:58:44 PM	H2 valve closed
2/17/2012	9:58:44 PM	BCl3 valve closed
2/17/2012	9:58:44 PM	PH3 valve closed
2/17/2012	9:58:44 PM	SiCl4 pre valve closed
2/17/2012	9:58:44 PM	SiCl4 post valve closed
2/17/2012	9:58:44 PM	Bypass valve closed
2/17/2012	9:58:44 PM	Bubbler valve closed
2/17/2012	9:58:44 PM	Main Vac valve opened
2/17/2012	9:58:44 PM	Helium MFC set to  0.000000
2/17/2012	9:58:44 PM	H2 MFC set to  0.000000
2/17/2012	9:58:44 PM	BCl3 MFC set to  0.000000
2/17/2012	9:58:44 PM	PH3 MFC set to  0.000000
2/17/2012	9:58:44 PM	SiCl4 MFC set to  0.000000
2/17/2012	9:58:44 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	9:58:44 PM	Tube furnace set to 0
2/17/2012	9:58:45 PM	Run finished at 9:58 PM
2/17/2012	9:58:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/17/2012	10:05:57 PM	Main Vac valve closed
2/17/2012	10:06:11 PM	Main Vac valve opened
2/17/2012	10:07:41 PM	Recipe started at 10:07 PM
2/17/2012	10:07:41 PM	Helium valve closed
2/17/2012	10:07:41 PM	H2 valve closed
2/17/2012	10:07:41 PM	BCl3 valve closed
2/17/2012	10:07:41 PM	PH3 valve closed
2/17/2012	10:07:41 PM	SiCl4 pre valve closed
2/17/2012	10:07:41 PM	SiCl4 post valve closed
2/17/2012	10:07:41 PM	Main Vac valve closed
2/17/2012	10:07:41 PM	Bypass valve closed
2/17/2012	10:07:41 PM	Bubbler valve closed
2/17/2012	10:07:41 PM	Helium MFC set to  0.000000
2/17/2012	10:07:41 PM	H2 MFC set to  0.000000
2/17/2012	10:07:41 PM	BCl3 MFC set to  0.000000
2/17/2012	10:07:41 PM	PH3 MFC set to  0.000000
2/17/2012	10:07:41 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:07:41 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:07:41 PM	Tube furnace set to 0
2/17/2012	10:07:45 PM	Helium valve closed
2/17/2012	10:07:45 PM	BCl3 valve closed
2/17/2012	10:07:45 PM	PH3 valve closed
2/17/2012	10:07:45 PM	SiCl4 pre valve closed
2/17/2012	10:07:45 PM	SiCl4 post valve closed
2/17/2012	10:07:45 PM	Main Vac valve closed
2/17/2012	10:07:45 PM	Bypass valve closed
2/17/2012	10:07:45 PM	Bubbler valve closed
2/17/2012	10:07:45 PM	H2 valve opened
2/17/2012	10:07:45 PM	Helium MFC set to  0.000000
2/17/2012	10:07:45 PM	H2 MFC set to  500.000000
2/17/2012	10:07:45 PM	BCl3 MFC set to  0.000000
2/17/2012	10:07:45 PM	PH3 MFC set to  0.000000
2/17/2012	10:07:45 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:07:45 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:07:45 PM	Tube furnace set to 0
2/17/2012	10:08:51 PM	Helium valve closed
2/17/2012	10:08:51 PM	BCl3 valve closed
2/17/2012	10:08:51 PM	PH3 valve closed
2/17/2012	10:08:51 PM	SiCl4 pre valve closed
2/17/2012	10:08:51 PM	SiCl4 post valve closed
2/17/2012	10:08:51 PM	Main Vac valve closed
2/17/2012	10:08:51 PM	Bypass valve closed
2/17/2012	10:08:51 PM	H2 valve opened
2/17/2012	10:08:51 PM	Bubbler valve opened
2/17/2012	10:08:51 PM	Helium MFC set to  0.000000
2/17/2012	10:08:51 PM	H2 MFC set to  500.000000
2/17/2012	10:08:51 PM	BCl3 MFC set to  0.000000
2/17/2012	10:08:51 PM	PH3 MFC set to  0.000000
2/17/2012	10:08:51 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:08:51 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:08:52 PM	Tube furnace set to 0
2/17/2012	10:08:53 PM	Helium valve closed
2/17/2012	10:08:53 PM	BCl3 valve closed
2/17/2012	10:08:53 PM	PH3 valve closed
2/17/2012	10:08:53 PM	SiCl4 pre valve closed
2/17/2012	10:08:53 PM	SiCl4 post valve closed
2/17/2012	10:08:53 PM	Main Vac valve closed
2/17/2012	10:08:53 PM	Bypass valve closed
2/17/2012	10:08:53 PM	H2 valve opened
2/17/2012	10:08:53 PM	Bubbler valve opened
2/17/2012	10:08:53 PM	Helium MFC set to  0.000000
2/17/2012	10:08:53 PM	H2 MFC set to  500.000000
2/17/2012	10:08:53 PM	BCl3 MFC set to  0.000000
2/17/2012	10:08:53 PM	PH3 MFC set to  0.000000
2/17/2012	10:08:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:08:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:08:53 PM	Tube furnace set to 950
2/17/2012	10:23:53 PM	Helium valve closed
2/17/2012	10:23:53 PM	PH3 valve closed
2/17/2012	10:23:53 PM	SiCl4 pre valve closed
2/17/2012	10:23:53 PM	SiCl4 post valve closed
2/17/2012	10:23:53 PM	Main Vac valve closed
2/17/2012	10:23:53 PM	Bypass valve closed
2/17/2012	10:23:53 PM	H2 valve opened
2/17/2012	10:23:53 PM	BCl3 valve opened
2/17/2012	10:23:53 PM	Bubbler valve opened
2/17/2012	10:23:53 PM	Helium MFC set to  0.000000
2/17/2012	10:23:53 PM	H2 MFC set to  400.000000
2/17/2012	10:23:53 PM	BCl3 MFC set to  20.000000
2/17/2012	10:23:53 PM	PH3 MFC set to  0.000000
2/17/2012	10:23:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:23:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:23:53 PM	Tube furnace set to 950
2/17/2012	10:53:53 PM	Helium valve closed
2/17/2012	10:53:53 PM	BCl3 valve closed
2/17/2012	10:53:53 PM	PH3 valve closed
2/17/2012	10:53:53 PM	SiCl4 pre valve closed
2/17/2012	10:53:53 PM	SiCl4 post valve closed
2/17/2012	10:53:53 PM	Main Vac valve closed
2/17/2012	10:53:53 PM	Bypass valve closed
2/17/2012	10:53:53 PM	H2 valve opened
2/17/2012	10:53:53 PM	Bubbler valve opened
2/17/2012	10:53:53 PM	Helium MFC set to  0.000000
2/17/2012	10:53:53 PM	H2 MFC set to  500.000000
2/17/2012	10:53:53 PM	BCl3 MFC set to  0.000000
2/17/2012	10:53:53 PM	PH3 MFC set to  0.000000
2/17/2012	10:53:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:53:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:53:53 PM	Tube furnace set to 750
2/17/2012	10:58:53 PM	H2 valve closed
2/17/2012	10:58:53 PM	BCl3 valve closed
2/17/2012	10:58:53 PM	PH3 valve closed
2/17/2012	10:58:53 PM	SiCl4 pre valve closed
2/17/2012	10:58:53 PM	SiCl4 post valve closed
2/17/2012	10:58:53 PM	Main Vac valve closed
2/17/2012	10:58:53 PM	Bypass valve closed
2/17/2012	10:58:53 PM	Helium valve opened
2/17/2012	10:58:53 PM	Bubbler valve opened
2/17/2012	10:58:53 PM	Helium MFC set to  500.000000
2/17/2012	10:58:53 PM	H2 MFC set to  0.000000
2/17/2012	10:58:53 PM	BCl3 MFC set to  0.000000
2/17/2012	10:58:53 PM	PH3 MFC set to  0.000000
2/17/2012	10:58:53 PM	SiCl4 MFC set to  0.000000
2/17/2012	10:58:53 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	10:58:53 PM	Tube furnace set to 0
2/17/2012	11:13:43 PM	Helium valve closed
2/17/2012	11:13:43 PM	H2 valve closed
2/17/2012	11:13:43 PM	BCl3 valve closed
2/17/2012	11:13:43 PM	PH3 valve closed
2/17/2012	11:13:43 PM	SiCl4 pre valve closed
2/17/2012	11:13:43 PM	SiCl4 post valve closed
2/17/2012	11:13:43 PM	Main Vac valve closed
2/17/2012	11:13:43 PM	Bypass valve closed
2/17/2012	11:13:43 PM	Bubbler valve closed
2/17/2012	11:13:43 PM	Helium MFC set to  0.000000
2/17/2012	11:13:43 PM	H2 MFC set to  0.000000
2/17/2012	11:13:43 PM	BCl3 MFC set to  0.000000
2/17/2012	11:13:43 PM	PH3 MFC set to  0.000000
2/17/2012	11:13:43 PM	SiCl4 MFC set to  0.000000
2/17/2012	11:13:43 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:13:44 PM	Tube furnace set to 0
2/17/2012	11:13:45 PM	Run finished at 11:13 PM
2/17/2012	11:20:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2012	11:20:08 PM	Recipe started at 11:20 PM
2/17/2012	11:20:08 PM	Helium valve closed
2/17/2012	11:20:08 PM	H2 valve closed
2/17/2012	11:20:08 PM	BCl3 valve closed
2/17/2012	11:20:08 PM	PH3 valve closed
2/17/2012	11:20:08 PM	SiCl4 pre valve closed
2/17/2012	11:20:08 PM	SiCl4 post valve closed
2/17/2012	11:20:08 PM	Main Vac valve closed
2/17/2012	11:20:08 PM	Bubbler valve closed
2/17/2012	11:20:08 PM	Bypass valve opened
2/17/2012	11:20:08 PM	Helium MFC set to  0.000000
2/17/2012	11:20:08 PM	H2 MFC set to  0.000000
2/17/2012	11:20:08 PM	BCl3 MFC set to  0.000000
2/17/2012	11:20:08 PM	PH3 MFC set to  0.000000
2/17/2012	11:20:08 PM	SiCl4 MFC set to  0.000000
2/17/2012	11:20:08 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:20:08 PM	Tube furnace set to 0
2/17/2012	11:21:13 PM	Helium valve closed
2/17/2012	11:21:13 PM	H2 valve closed
2/17/2012	11:21:13 PM	BCl3 valve closed
2/17/2012	11:21:13 PM	PH3 valve closed
2/17/2012	11:21:13 PM	SiCl4 pre valve closed
2/17/2012	11:21:13 PM	SiCl4 post valve closed
2/17/2012	11:21:13 PM	Main Vac valve closed
2/17/2012	11:21:13 PM	Bubbler valve closed
2/17/2012	11:21:13 PM	Bypass valve opened
2/17/2012	11:21:13 PM	Helium MFC set to  0.000000
2/17/2012	11:21:13 PM	H2 MFC set to  0.000000
2/17/2012	11:21:13 PM	BCl3 MFC set to  0.000000
2/17/2012	11:21:13 PM	PH3 MFC set to  0.000000
2/17/2012	11:21:13 PM	SiCl4 MFC set to  0.000000
2/17/2012	11:21:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:21:13 PM	Tube furnace set to 0
2/17/2012	11:22:13 PM	Helium valve closed
2/17/2012	11:22:13 PM	H2 valve closed
2/17/2012	11:22:13 PM	BCl3 valve closed
2/17/2012	11:22:13 PM	PH3 valve closed
2/17/2012	11:22:13 PM	SiCl4 pre valve closed
2/17/2012	11:22:13 PM	SiCl4 post valve closed
2/17/2012	11:22:14 PM	Bypass valve closed
2/17/2012	11:22:14 PM	Bubbler valve closed
2/17/2012	11:22:14 PM	Main Vac valve opened
2/17/2012	11:22:14 PM	Helium MFC set to  0.000000
2/17/2012	11:22:14 PM	H2 MFC set to  0.000000
2/17/2012	11:22:14 PM	BCl3 MFC set to  0.000000
2/17/2012	11:22:14 PM	PH3 MFC set to  0.000000
2/17/2012	11:22:14 PM	SiCl4 MFC set to  0.000000
2/17/2012	11:22:14 PM	Bypass solenoid MFC set to  0.000000
2/17/2012	11:22:14 PM	Tube furnace set to 0
2/17/2012	11:22:15 PM	Run finished at 11:22 PM
2/17/2012	11:22:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
